PRAMS having phase-change layer pattern with electrode contact area and methods of forming the same
    4.
    发明申请
    PRAMS having phase-change layer pattern with electrode contact area and methods of forming the same 有权
    具有具有电极接触面积的相变层图案的PRAMS及其形成方法

    公开(公告)号:US20060043355A1

    公开(公告)日:2006-03-02

    申请号:US11217943

    申请日:2005-09-01

    IPC分类号: H01L29/02

    摘要: According to some embodiments of the present invention, there are provided PRAMS having a phase-change layer pattern interposed between a molding layer and a forming layer pattern, and methods of forming the same that include a node conductive layer pattern, a molding layer, a forming layer pattern and a protecting layer. The molding layer, the forming layer pattern and the protecting layer are formed to cover the planarized interlayer insulating layer and the node conductive layer pattern. A lower electrode is interposed between the molding layer and the planarized interlayer insulating layer. A phase-change layer pattern is formed on the planarized interlayer insulating layer. A spacer pattern is disposed between the phase-change layer pattern and the molding layer.

    摘要翻译: 根据本发明的一些实施例,提供了一种在成型层和成形层图案之间具有相变层图案的PRAMS及其形成方法,其包括节点导电层图案,成型层, 形成层图案和保护层。 成形层,成形层图案和保护层形成为覆盖平坦化层间绝缘层和节点导电层图案。 在模制层和平坦化层间绝缘层之间插入下电极。 在平坦化层间绝缘层上形成相变层图案。 间隔图案设置在相变层图案和成型层之间。

    PRAMS having phase-change layer pattern with electrode contact area and methods of forming the same
    5.
    发明授权
    PRAMS having phase-change layer pattern with electrode contact area and methods of forming the same 有权
    具有具有电极接触面积的相变层图案的PRAMS及其形成方法

    公开(公告)号:US07214957B2

    公开(公告)日:2007-05-08

    申请号:US11217943

    申请日:2005-09-01

    IPC分类号: H01L29/02

    摘要: According to some embodiments of the present invention, there are provided PRAMS having a phase-change layer pattern interposed between a molding layer and a forming layer pattern, and methods of forming the same that include a node conductive layer pattern, a molding layer, a forming layer pattern and a protecting layer. The molding layer, the forming layer pattern and the protecting layer are formed to cover the planarized interlayer insulating layer and the node conductive layer pattern. A lower electrode is interposed between the molding layer and the planarized interlayer insulating layer. A phase-change layer pattern is formed on the planarized interlayer insulating layer. A spacer pattern is disposed between the phase-change layer pattern and the molding layer.

    摘要翻译: 根据本发明的一些实施例,提供了在成型层和成形层图案之间具有相变层图案的PRAMS及其形成方法,其包括节点导电层图案,成型层, 形成层图案和保护层。 成形层,成形层图案和保护层形成为覆盖平坦化层间绝缘层和节点导电层图案。 在模制层和平坦化层间绝缘层之间插入下电极。 在平坦化层间绝缘层上形成相变层图案。 间隔图案设置在相变层图案和成型层之间。

    Memory devices including spacers on sidewalls of memory storage elements and related methods
    9.
    发明申请
    Memory devices including spacers on sidewalls of memory storage elements and related methods 审中-公开
    存储器件包括存储器存储元件侧壁上的隔离物和相关方法

    公开(公告)号:US20060228853A1

    公开(公告)日:2006-10-12

    申请号:US11388111

    申请日:2006-03-23

    IPC分类号: H01L21/8244 H01L21/8234

    摘要: A method of forming a memory device may include forming an insulating layer on a substrate, and forming a first electrode through at least a portion of the insulating layer. A memory storage element may be formed on the first electrode so that the first electrode is between the memory storage element and the substrate, and a second electrode may be formed on the memory storage element so that the memory storage element is between the first and second electrodes. After forming the memory storage element and after forming the second electrode, insulating spacers may be formed on sidewalls of the memory storage element. After forming the insulating spacers, an interconnection line may be formed on the second electrode, on the insulating spacers, and on the insulating layer beyond the insulating spacers. Related memory devices are also discussed.

    摘要翻译: 形成存储器件的方法可以包括在衬底上形成绝缘层,以及通过绝缘层的至少一部分形成第一电极。 存储器存储元件可以形成在第一电极上,使得第一电极位于存储器存储元件和衬底之间,并且可以在存储器存储元件上形成第二电极,使得存储器存储元件位于第一和第二电极之间 电极。 在形成存储器元件之后,在形成第二电极之后,可以在存储器存储元件的侧壁上形成绝缘间隔物。 在形成绝缘间隔物之后,可以在第二电极,绝缘间隔物上以及绝缘层上形成互连线,超过绝缘间隔物。 还讨论了相关的存储器件。