ION IMPLANTATION DEVICE
    2.
    发明申请
    ION IMPLANTATION DEVICE 有权
    离子植入装置

    公开(公告)号:US20150206700A1

    公开(公告)日:2015-07-23

    申请号:US14420777

    申请日:2013-09-12

    Abstract: An ion implantation device equipped with a vacuum chamber (11), an electrode roll (13) on a portion of the outer circumferential part of which a film (2) is wound, a voltage application means (21) that applies a voltage to the electrode roll, and a gas introduction means (31) that introduces a gas into the vacuum chamber, wherein a voltage is applied to the electrode roll by means of the voltage application means and a gas is introduced by means of the gas introduction means, and an ion implantation process is performed on the surface of the film. In addition, electrode members (42) are provided opposing the surface of the electrode roll on which the film is wound.

    Abstract translation: 一种离子注入装置,其具有真空室(11),在其外周部分的一部分卷绕有薄膜(2)的部分上的电极辊(13),向所述真空室施加电压的电压施加装置(21) 电极辊和气体引入装置(31),其将气体引入真空室,其中通过电压施加装置将电压施加到电极辊,并且气体通过气体引入装置引入,并且 在膜的表面上进行离子注入工艺。 此外,电极构件(42)设置成与其上缠绕有薄膜的电极辊的表面相对。

    Ion implantation device
    3.
    发明授权
    Ion implantation device 有权
    离子注入装置

    公开(公告)号:US09330880B2

    公开(公告)日:2016-05-03

    申请号:US14420777

    申请日:2013-09-12

    Abstract: An ion implantation device equipped with a vacuum chamber (11), an electrode roll (13) on a portion of the outer circumferential part of which a film (2) is wound, a voltage application means (21) that applies a voltage to the electrode roll, and a gas introduction means (31) that introduces a gas into the vacuum chamber, wherein a voltage is applied to the electrode roll by means of the voltage application means and a gas is introduced by means of the gas introduction means, and an ion implantation process is performed on the surface of the film. In addition, electrode members (42) are provided opposing the surface of the electrode roll on which the film is wound.

    Abstract translation: 一种离子注入装置,其具有真空室(11),在其外周部分的一部分卷绕有薄膜(2)的部分上的电极辊(13),向所述真空室施加电压的电压施加装置(21) 电极辊和气体引入装置(31),其将气体引入真空室,其中通过电压施加装置将电压施加到电极辊,并且气体通过气体引入装置引入,并且 在膜的表面上进行离子注入工艺。 此外,电极构件(42)设置成与其上缠绕有薄膜的电极辊的表面相对。

    ION IMPLANTATION DEVICE
    5.
    发明申请
    ION IMPLANTATION DEVICE 有权
    离子植入装置

    公开(公告)号:US20150206710A1

    公开(公告)日:2015-07-23

    申请号:US14420377

    申请日:2013-09-12

    Abstract: The disclosed ion implantation apparatus has a vacuum chamber 11, a roller electrode 13 having a portion of an outer circumferential part on which a film 3 is wound, voltage application unit 23 for applying a voltage to the roller electrode, and. a gas introduction unit having a. gas supply outlet for supplying an ion implantation gas into the vacuum chamber, wherein the gas introduction unit and a gas discharge outlet are disposed, so as to be opposite each other along the axial direction of the roller electrode, the roller electrode intervening therebetween.

    Abstract translation: 所公开的离子注入装置具有真空室11,具有卷绕有膜3的外周部的一部分的辊电极13,向辊电极施加电压的电压施加单元23。 气体导入单元,具有a。 用于将离子注入气体供给到真空室中的气体供给口,其中,设置气体导入单元和气体排出口,沿着辊电极的轴向彼此相对,辊电极介于其间。

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