公开(公告)号：US20230223292A1

公开(公告)日：2023-07-13

申请号：US18009254

申请日：2021-06-10

Applicant: Lam Research Corporation

Inventor： Lai Wei ,  Ji Soo Kim ,  Alan Jeffrey Miller ,  William Thie ,  Frank Yun Lin ,  Jun Hee Hee Han ,  Jie Liu ,  Conan Chiang ,  Michael John Martin

IPC: H01L21/687 ,  H01J37/32 ,  H01L21/67 ,  H01L21/3065

CPC classification number: H01L21/68721 ,  H01L21/68735 ,  H01J37/32715 ,  H01L21/67069 ,  H01L21/3065 ,  H01J2237/334

Abstract: In some examples, a flat Bottom Shadow Ring (fBSR) is provided for processing a substrate in a processing chamber. An example fBSR comprises an overhang for covering an edge of the substrate in the processing chamber. The overhang includes a fiat zone that extends radially outward over the outer edge of the substrate.