公开(公告)号：US10591934B2

公开(公告)日：2020-03-17

申请号：US15917528

申请日：2018-03-09

Applicant: Lam Research Corporation

Inventor： Sudhakar Gopalakrishnan ,  Peter Reimer ,  John Haruff ,  Dennis Smith

IPC: G05D11/13 ,  G01F1/84 ,  H01L21/67 ,  G01N9/32

Abstract: Methods and apparatuses for delivering a process gas to a processing chamber are provided. A mass flow controller includes a first flow line for introducing a process fluid and an inlet valve disposed along the first flow line for controlling a flow rate of the process fluid. The mass flow controller includes a second flow line for introducing a carrier fluid into the mass flow controller and a micro-electro-mechanical system (MEMS) Coriolis sensor for providing a density signal and a mass flow rate signal for a mixture of the process fluid and the carrier fluid. The mass flow controller provided includes an outlet valve for controlling a mass flow rate of the mixture that is output by the mass flow controller as well as a controller for operating the inlet valve based on the density signal and for operating the outlet valve based on the mass flow rate signal.

公开(公告)号：US20190279888A1

公开(公告)日：2019-09-12

申请号：US15917528

申请日：2018-03-09

Applicant: Lam Research Corporation

Inventor： Sudhakar Gopalakrishnan ,  Peter Reimer ,  John Haruff ,  Dennis Smith

IPC: H01L21/67 ,  G01F1/84 ,  G01N9/32 ,  G05D11/13

Abstract: Methods and apparatuses for delivering a process gas to a processing chamber are provided. A mass flow controller includes a first flow line for introducing a process fluid and an inlet valve disposed along the first flow line for controlling a flow rate of the process fluid. The mass flow controller includes a second flow line for introducing a carrier fluid into the mass flow controller and a micro-electro-mechanical system (MEMS) Coriolis sensor for providing a density signal and a mass flow rate signal for a mixture of the process fluid and the carrier fluid. The mass flow controller provided includes an outlet valve for controlling a mass flow rate of the mixture that is output by the mass flow controller as well as a controller for operating the inlet valve based on the density signal and for operating the outlet valve based on the mass flow rate signal.

公开(公告)号：US11860016B2

公开(公告)日：2024-01-02

申请号：US17042059

申请日：2019-03-28

Applicant: LAM RESEARCH CORPORATION

Inventor： Dennis Smith ,  Peter Reimer ,  Sudhakar Gopalakrishnan

IPC: G01F1/84 ,  G01F15/00 ,  G01F15/12 ,  G01N9/32 ,  H01L21/67 ,  G05D7/06

CPC classification number: G01F1/8445 ,  G01F1/8422 ,  G01F1/8427 ,  G01F1/8431 ,  G01F15/005 ,  G01F15/125 ,  G01N9/32 ,  H01L21/67253 ,  G05D7/0688

Abstract: A mass flow controller assembly includes a housing defining a cavity, a plurality of internal passages, a first inlet, a first outlet, a second inlet, and a second outlet. A valve is connected to the housing, has an inlet fluidly coupled to the second outlet of the housing and an outlet fluidly coupled to the second inlet of the housing. The valve is configured to control fluid flow from the second outlet of the housing to the second inlet of the housing. A microelectromechanical (MEMS) Coriolis flow sensor is arranged in the cavity, includes an inlet fluidly coupled by at least one of the plurality of internal passages to the first inlet of the housing and is configured to measure at least one of a mass flow rate and density of fluid flowing through the MEMS Coriolis flow sensor. An outlet of the MEMS Coriolis flow sensor is fluidly coupled by at least one of the plurality of internal passages to the second outlet of the housing. The second inlet of the housing is fluidly coupled by at least one of the plurality of internal passages to the first outlet of the housing.