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公开(公告)号：US06544033B1
公开(公告)日：2003-04-08
申请号：US09658362
申请日：2000-09-08
IPC分类号： F27D1900
CPC分类号： H01L21/68757 , H01L21/67346 , H01L21/67748
摘要： Provided herein is a wafer carrier comprising a disk and a pocket, wherein the pocket is centered in the disk and holds a wafer. Also provided is a method of processing or testing a wafer for a semiconductor device, comprising the steps of placing the wafer in the wafer carrier disclosed herein; loading the wafer carrier in a loadlock chamber; and transferring the wafer carrier from the loadlock chamber to a process chamber for processing or testing.
摘要翻译： 本文提供了包括盘和袋的晶片载体，其中所述袋在盘中居中并保持晶片。 还提供了一种用于半导体器件的晶片的处理或测试的方法，包括以下步骤：将晶片放置在本文公开的晶片载体中; 将所述晶片载体装载在负载锁定室中; 并将晶片载体从负载锁定室转移到用于处理或测试的处理室。
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公开(公告)号：US06315833B1
公开(公告)日：2001-11-13
申请号：US09346657
申请日：1999-07-01
IPC分类号： C23C1600
CPC分类号： H01L21/67748 , H01L21/68728 , H01L21/68792 , Y10T29/49826 , Y10T29/49947
摘要： An apparatus for and method of supporting a substrate such as a semiconductor wafer. Silicon carbide sleeves cover substrate support members such as upwardly extending arms of a substrate carrier which is part of a substrate support assembly. The substrate carrier including the upwardly extending arms holds the substrate spaced apart from a platform such as a susceptor during loading and unloading of a processing chamber. The platform defines apertures through which the arms extend. The arms are vertically movable through the apertures with respect to the platform and engage the substrate at the substrate's edge or alternatively, inwardly from the edge.
摘要翻译： 用于支撑诸如半导体晶片的衬底的装置和方法。 碳化硅套筒覆盖衬底支撑构件，例如作为衬底支撑组件的一部分的衬底载体的向上延伸臂。 包括向上延伸的臂的衬底载体在加工和卸载处理室期间保持衬底与诸如基座的平台间隔开。 平台限定了臂延伸通过的孔。 臂可以相对于平台垂直移动穿过孔，并且在衬底的边缘处或者从边缘向内接合衬底。
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