公开(公告)号：US20150022872A1

公开(公告)日：2015-01-22

申请号：US14382734

申请日：2013-02-21

Applicant: Lemoptix SA

Inventor： Faouzi Khechana ,  Nicolas Abele

IPC: G02B26/08 ,  B81C3/00

CPC classification number: G02B26/085 ,  B81B7/007 ,  B81B2201/042 ,  B81B2207/098 ,  B81C1/00214 ,  B81C1/00873 ,  B81C3/005 ,  B81C2203/054 ,  B81C2203/057 ,  G02B7/1821 ,  G02B26/0833 ,  G02B26/105 ,  G03B21/008 ,  H01L2224/48091 ,  H01L2924/1461 ,  H05K1/0269 ,  H05K1/0281 ,  H05K1/118 ,  H05K1/189 ,  H05K3/328 ,  H05K3/34 ,  H05K2201/083 ,  H05K2201/10083 ,  H05K2203/049 ,  Y10T29/4913 ,  H01L2924/00014 ,  H01L2924/00

Abstract: According to the present invention there is provided a method of manufacturing a MEMS micro mirror assembly (250), comprising the step of mounting a PCB board (205) on a metallic plate (206), mounting a MEMS device (240) on the PCB board (205), wherein the MEMS device (240) comprises a MEMS die (241) and a magnet (230).

Abstract translation: 根据本发明，提供了一种制造MEMS微镜组件（250）的方法，包括将PCB板（205）安装在金属板（206）上的步骤，将MEMS器件（240）安装在PCB上 板（205），其中MEMS器件（240）包括MEMS管芯（241）和磁体（230）。

公开(公告)号：US20130094003A1

公开(公告)日：2013-04-18

申请号：US13706142

申请日：2012-12-05

Applicant: Lemoptix SA

Inventor： Nicolas Abelè ,  Faouzi Khechana ,  Lucio Kilcher

IPC: G03B21/28 ,  G03B21/14 ,  G02B26/00

CPC classification number: G02B26/101 ,  G02B26/00 ,  G02B26/0833 ,  G03B21/14 ,  G03B21/2033 ,  G03B21/28 ,  H04N9/3129 ,  Y10T29/49

Abstract: A MEMS micro-minor device includes, a single package; a first mirror and second minor, wherein at least one of the minors is configured to oscillate along an oscillation axis; wherein both mirrors are located within the single package and are arranged such that as the at least one mirror oscillates, the light incident on the first micro-minor can be deflected to the second minor.

Abstract translation: MEMS微型次要器件包括单个封装; 第一镜和第二次镜，其中所述未成形件中的至少一个被配置为沿着振荡轴线振荡; 其中两个反射镜位于单个封装内，并且布置成使得当至少一个反射镜振荡时，入射在第一微型小灯上的光可以偏转到第二未成年人。

公开(公告)号：US20150288268A1

公开(公告)日：2015-10-08

申请号：US14438315

申请日：2012-10-25

Applicant: LEMOPTIX SA

Inventor： Julien Gamet ,  Faouzi Khechana ,  Nicolas Abele

IPC: H02K33/18 ,  H02K1/17 ,  G02B26/08 ,  H02K1/34

CPC classification number: H02K33/18 ,  G02B26/0833 ,  H02K1/17 ,  H02K1/34

Abstract: According to the present invention there is provided a device comprising a MEMS die and, a single magnet, wherein the MEMS die cooperates with the magnet, such that the MEMS die is submerged in a magnetic field provided by the magnet; wherein the magnet is a single multi-pole magnet

Abstract translation: 根据本发明，提供了一种包括MEMS管芯和单个磁体的器件，其中MEMS管芯与磁体配合，使得MEMS管芯浸没在由磁体提供的磁场中; 其中所述磁体是单个多极磁体

公开(公告)号：US20150009549A1

公开(公告)日：2015-01-08

申请号：US14382724

申请日：2013-02-11

Applicant: Lemoptix SA

Inventor： Faouzi Khechana ,  Nicolas Abele

IPC: G02B26/08 ,  G02B26/10 ,  G02B7/182

CPC classification number: G02B26/085 ,  B81B7/007 ,  B81B2201/042 ,  B81B2207/098 ,  B81C1/00214 ,  B81C1/00873 ,  B81C3/005 ,  B81C2203/054 ,  B81C2203/057 ,  G02B7/1821 ,  G02B26/0833 ,  G02B26/105 ,  G03B21/008 ,  H01L2224/48091 ,  H01L2924/1461 ,  H05K1/0269 ,  H05K1/0281 ,  H05K1/118 ,  H05K1/189 ,  H05K3/328 ,  H05K3/34 ,  H05K2201/083 ,  H05K2201/10083 ,  H05K2203/049 ,  Y10T29/4913 ,  H01L2924/00014 ,  H01L2924/00

Abstract: A MEMS micro-mirror assembly (250, 300, 270, 400) comprising, a MEMS device (240) which comprises a MEMS die (241) and a magnet (231); a flexible PCB board (205) to which the MEMS device (240) is mechanically, and electrically, connected; wherein the flexible PCB board (205) further comprises a first extension portion (205b) which comprises a least one electrical contact (259a,b) which is useable to electrically connect the MEMS micro-mirro rassembly (250, 300, 270, 400) to another electrical component). There is further provided a projection system comprising such a MEMS micro-mirror assembly (250, 300, 270, 400).

Abstract translation: 包括MEMS器件（240）的MEMS微反射镜组件（250,3300,270,400），其包括MEMS管芯（241）和磁体（231）; MEMS器件（240）机械地并电连接到的柔性PCB板（205）; 其中所述柔性PCB板还包括第一延伸部分（205b），所述第一延伸部分包括至少一个电触点（259a，b），所述至少一个电触头可用于电连接所述MEMS微镜组件（250,300,270,400） 到另一个电气部件）。 还提供了一种包括这种MEMS微镜组件（250,300,270,400）的投影系统。

公开(公告)号：US20140354085A1

公开(公告)日：2014-12-04

申请号：US14353746

申请日：2012-09-25

Applicant: Lemoptix SA

Inventor： Julien Gamet ,  Faouzi Khechana

IPC: H02K9/22 ,  H02K33/00 ,  G02B26/08

CPC classification number: H02K33/00 ,  B81B3/0072 ,  B81B2201/038 ,  B81B2201/042 ,  B81B2203/058 ,  G02B26/08 ,  G02B26/085 ,  H02K9/22 ,  H02K33/02 ,  H02K33/16

Abstract: According to the present invention there is provided an actuator comprising, a movable member, the movable member comprising a support frame which is configured such that it can oscillate about a first oscillation axis and a mirror which is fixed to the support frame such that oscillation of the support frame will effect oscillation of the mirror; an coil, which cooperates with the support frame; one or more boundary portions provided between the support frame and the mirror which reduce the influence of warp transmitted from an edge of the support frame to the mirror, as the support frame oscillates about the first oscillation axis; wherein the support frame further comprises one or more cut-out regions, wherein the one or more cut-out regions are configured to be parallel to at least a portion of the coil, to reduce stress on the coil as the support frame oscillates about the first oscillation axis and/or to reduce the temperature dependence of the properties of the actuator.

Abstract translation: 根据本发明，提供了一种致动器，其包括可动构件，所述可动构件包括支撑框架，所述支撑框架被构造成使得其可围绕第一摆动轴线摆动并且反射镜被固定到所述支撑框架， 支撑框架将影响镜子的振荡; 线圈，其与支撑框架配合; 一个或多个边界部分设置在所述支撑框架和所述反射镜之间，当所述支撑框架围绕所述第一振荡轴线摆动时，所述边界部分减小从所述支撑框架的边缘传递到所述反射镜的翘曲的影响; 其中所述支撑框架还包括一个或多个切除区域，其中所述一个或多个切除区域被配置为平行于所述线圈的至少一部分，以在所述支撑框架绕所述线圈摆动时减小所述线圈上的应力 第一振荡轴和/或降低致动器的性质的温度依赖性。

公开(公告)号：US20150168714A1

公开(公告)日：2015-06-18

申请号：US14406498

申请日：2012-06-13

Applicant: Lemoptix SA

Inventor： Nicolas Abele ,  Faouzi Khechana ,  Julien Gamet

IPC: G02B26/08 ,  G02B26/10 ,  B81B3/00

CPC classification number: G02B26/0833 ,  B81B3/0072 ,  B81B2201/042 ,  B81B2203/0154 ,  B81B2203/0181 ,  B81B2203/06 ,  G02B26/085 ,  G02B26/101 ,  G02B26/105

Abstract: According to the present invention there is provided a MEMS device comprising, a mirror which is connected to a fixed portion by means of a first and second torsional arm, each of the first and second torsional arms are configured such that they can twist about torsional axes so as to oscillate the mirror about a first oscillation axes, and wherein the first and second torsional arms are each configured to have two or more meanders and wherein the first and second torsional arms are arranged symmetrically relative to the first oscillation axis.

Abstract translation: 根据本发明，提供了一种MEMS装置，其包括：通过第一和第二扭转臂连接到固定部分的反射镜，第一和第二扭转臂中的每一个被构造成使得它们可绕扭转轴线 以使所述反射镜围绕第一振荡轴线振荡，并且其中所述第一和第二扭转臂各自构造成具有两个或多个曲折，并且其中所述第一和第二扭转臂相对于所述第一振荡轴对称地布置。