Acoustic consumption monitor
    6.
    发明授权
    Acoustic consumption monitor 有权
    消声器

    公开(公告)号:US06482649B1

    公开(公告)日:2002-11-19

    申请号:US09404136

    申请日:1999-09-23

    IPC分类号: G01N3300

    摘要: A method of determining the reaction efficiency of a CVD process reactor by which a reactive gas combination entering the reactor deposits a solid reaction product as a thin film onto a substrate. The composition of the reactive gas combination is measured by an acoustic cell which is disposed downstream from the outlet port of the reactor to determine the reactor's efficiency. Determination of the reactor's efficiency allows the growth rate of the thin film to be determined as well as associated rates of the products which have been exhausted from the reactor.

    摘要翻译: 确定进入反应器的反应气体组合的CVD工艺反应器的反应效率的方法将作为薄膜的固体反应产物沉积在基材上。 反应气体组合的组成通过设置在反应器的出口下游的声学单元来测量,以确定反应器的效率。 确定反应器的效率允许确定薄膜的生长速率以及从反应器中排出的产物的相关速率。