Method of forming a pressure switch thin film device
    5.
    发明授权
    Method of forming a pressure switch thin film device 有权
    形成压力开关薄膜装置的方法

    公开(公告)号:US07795062B2

    公开(公告)日:2010-09-14

    申请号:US11696079

    申请日:2007-04-03

    IPC分类号: H01L21/00

    摘要: This invention provides a method of forming at least one pressure switch thin film device. The method includes providing a substrate and depositing a plurality of thin film device layers as a stack upon the substrate. An imprinted 3D template structure is provided upon the plurality of thin film device layers. The plurality of thin film device layers and the 3D template structure are then etched and at least one thin film device layer is undercut to provide a plurality of aligned electrical contact pairs and adjacent spacer posts. A flexible membrane providing a plurality of separate electrical contacts is deposited upon the spacer posts, the separate electrical contacts overlapping the contact pairs. The spacer posts provide a gap between the electrical contacts and the contact pairs.

    摘要翻译: 本发明提供一种形成至少一个压力开关薄膜器件的方法。 该方法包括提供衬底并将多个薄膜器件层作为堆叠沉积在衬底上。 在多个薄膜器件层上提供印模的3D模板结构。 然后蚀刻多个薄膜器件层和3D模板结构,并且至少一个薄膜器件层被切削以提供多个对准的电接触对和相邻的间隔柱。 提供多个单独的电触点的柔性膜沉积在间隔柱上,分开的电触点与触点对重叠。 间隔柱在电触点和触点对之间提供间隙。

    METHOD OF FORMING A PRESSURE SWITCH THIN FILM DEVICE
    6.
    发明申请
    METHOD OF FORMING A PRESSURE SWITCH THIN FILM DEVICE 有权
    形成压力开关薄膜装置的方法

    公开(公告)号:US20080248605A1

    公开(公告)日:2008-10-09

    申请号:US11696079

    申请日:2007-04-03

    IPC分类号: H01L21/00 H01L29/84

    摘要: This invention provides a method of forming at least one pressure switch thin film device. The method includes providing a substrate and depositing a plurality of thin film device layers as a stack upon the substrate. An imprinted 3D template structure is provided upon the plurality of thin film device layers. The plurality of thin film device layers and the 3D template structure are then etched and at least one thin film device layer is undercut to provide a plurality of aligned electrical contact pairs and adjacent spacer posts. A flexible membrane providing a plurality of separate electrical contacts is deposited upon the spacer posts, the separate electrical contacts overlapping the contact pairs. The spacer posts provide a gap between the electrical contacts and the contact pairs.

    摘要翻译: 本发明提供一种形成至少一个压力开关薄膜器件的方法。 该方法包括提供衬底并将多个薄膜器件层作为堆叠沉积在衬底上。 在多个薄膜器件层上提供印模的3D模板结构。 然后蚀刻多个薄膜器件层和3D模板结构,并且至少一个薄膜器件层被切削以提供多个对准的电接触对和相邻的间隔柱。 提供多个单独的电触点的柔性膜沉积在间隔柱上,分开的电触点与触点对重叠。 间隔柱在电触点和触点对之间提供间隙。

    Thin film transistor logic
    10.
    发明授权
    Thin film transistor logic 失效
    薄膜晶体管逻辑

    公开(公告)号:US08013633B2

    公开(公告)日:2011-09-06

    申请号:US11821068

    申请日:2007-06-20

    IPC分类号: H03K19/0175

    CPC分类号: H03K19/09441

    摘要: A thin-film logic circuit, which can be fabricated entirely of TFTs of the same conductivity type, includes a logic stage connected to a supply voltage and a level shifter connected to a wider voltage range provided by the supply voltage and ground. The logic circuit produces output signals with full rail-to-rail signal range from ground to the supply voltage and can implement or include a basic logic component such as an inverter, a NAND gate, or a NOR gate or more complicated circuits in which many basic logic components are cascaded together. Such logic circuits can be fabricated directly on flexible structures or large areas such as in flat panel displays.

    摘要翻译: 可以完全由相同导电类型的TFT制造的薄膜逻辑电路包括连接到电源电压的逻辑级和连接到由电源电压和接地提供的较宽电压范围的电平转换器。 逻辑电路产生具有从地到电源电压的完整轨到轨信号范围的输出信号,并且可以实现或包括诸如逆变器,NAND门或NOR门的基本逻辑组件或更复杂的电路,其中许多 基本逻辑元件级联在一起。 这样的逻辑电路可以直接在柔性结构或大面积上制造,例如在平板显示器中。