公开(公告)号：US06827247B1

公开(公告)日：2004-12-07

申请号：US09913014

申请日：2001-08-08

申请人： Liming Fan ,  Hon Yu Peter Ng ,  Xianbin Zhu ,  Yam Mo Wong ,  Keng Yew Song

发明人： Liming Fan ,  Hon Yu Peter Ng ,  Xianbin Zhu ,  Yam Mo Wong ,  Keng Yew Song

IPC分类号： B23K520

CPC分类号： H01L24/78 ,  B23K20/10 ,  H01L2224/78 ,  H01L2224/78301 ,  H01L2924/00014 ,  H01L2924/01023 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/12043 ,  H01L2224/48 ,  H01L2224/45099 ,  H01L2224/05599 ,  H01L2924/00

摘要： Apparatus for detecting the oscillation amplitude of an oscillating object (3) includes an optical radiation source (9) and a detector (10) including first and second optical radiation sensing areas (24A, 24B) adjacent each other. The detector (10) and the optical radiation source (9) are adapted to be located opposite each other with the oscillating object (3) located between the source (9) and the detector (10) so that the object (3) blocks a portion of the sensing areas (24A, 24B) from receiving optical radiation from the source (9). A processor (18) coupled to the detector (10) receives first and second output signals representing the magnitude of optical radiation sensed by the first and second optical radiation sensing areas (24A, 24B), respectively. The processor (18) processes the first and second output signals to obtain an indication of the amplitude of oscillation of the object (3).

摘要翻译： 用于检测振荡物体（3）的振荡幅度的装置包括光辐射源（9）和包括彼此相邻的第一和第二光学辐射感测区域（24A，24B）的检测器（10）。 检测器（10）和光辐射源（9）适于彼此相对定位，其中振荡对象（3）位于源（9）和检测器（10）之间，使得物体（3）阻挡 感测区域（24A，24B）的一部分不接收来自源（9）的光辐射。 耦合到检测器（10）的处理器（18）分别接收表示由第一和第二光学辐射感测区域（24A，24B）感测的光辐射的大小的第一和第二输出信号。 处理器（18）处理第一和第二输出信号以获得对象（3）的振荡幅度的指示。