Apparatus for detecting the oscillation amplitude of an oscillating object
    1.
    发明授权
    Apparatus for detecting the oscillation amplitude of an oscillating object 有权
    用于检测振荡物体的振荡幅度的装置

    公开(公告)号:US06827247B1

    公开(公告)日:2004-12-07

    申请号:US09913014

    申请日:2001-08-08

    IPC分类号: B23K520

    摘要: Apparatus for detecting the oscillation amplitude of an oscillating object (3) includes an optical radiation source (9) and a detector (10) including first and second optical radiation sensing areas (24A, 24B) adjacent each other. The detector (10) and the optical radiation source (9) are adapted to be located opposite each other with the oscillating object (3) located between the source (9) and the detector (10) so that the object (3) blocks a portion of the sensing areas (24A, 24B) from receiving optical radiation from the source (9). A processor (18) coupled to the detector (10) receives first and second output signals representing the magnitude of optical radiation sensed by the first and second optical radiation sensing areas (24A, 24B), respectively. The processor (18) processes the first and second output signals to obtain an indication of the amplitude of oscillation of the object (3).

    摘要翻译: 用于检测振荡物体(3)的振荡幅度的装置包括光辐射源(9)和包括彼此相邻的第一和第二光学辐射感测区域(24A,24B)的检测器(10)。 检测器(10)和光辐射源(9)适于彼此相对定位,其中振荡对象(3)位于源(9)和检测器(10)之间,使得物体(3)阻挡 感测区域(24A,24B)的一部分不接收来自源(9)的光辐射。 耦合到检测器(10)的处理器(18)分别接收表示由第一和第二光学辐射感测区域(24A,24B)感测的光辐射的大小的第一和第二输出信号。 处理器(18)处理第一和第二输出信号以获得对象(3)的振荡幅度的指示。

    Linear actuator comprising velocity sensor
    2.
    发明授权
    Linear actuator comprising velocity sensor 有权
    包括速度传感器的线性致动器

    公开(公告)号:US07327054B2

    公开(公告)日:2008-02-05

    申请号:US11089786

    申请日:2005-03-25

    IPC分类号: H02K41/00 H02K41/35 H02K7/00

    摘要: A linear actuator for a motion system is provided with a velocity sensor for monitoring a velocity of an actuation arm that it is driving. The linear actuator comprises a magnetic field, a first coil that is controllably movable within the magnetic field by adjusting a current flowing through the first coil whereby to drive the actuation arm and a second coil that is movable with the first coil and configured such that a voltage is inducible in the second coil that is proportional to its velocity. A controller device is connected to the second coil for receiving feedback indicating the voltage induced in the second coil whereby a velocity of the actuation arm is determinable, wherein the controller device is further connected to the first coil and is operative to adjust the current flowing in the first coil based upon said feedback for controllably driving the actuation arm.

    摘要翻译: 用于运动系统的线性致动器设置有用于监测其正在驱动的致动臂的速度的速度传感器。 线性致动器包括磁场,第一线圈,其可通过调节流过第一线圈的电流在磁场内可控地移动,从而驱动致动臂,以及可与第一线圈一起移动的第二线圈,并且构造成使得 第二线圈中的电压可以与其速度成比例。 控制器装置连接到第二线圈,用于接收指示在第二线圈中感应的电压的反馈,由此可以确定致动臂的速度,其中控制器装置还连接到第一线圈,并且可操作地调节流入 所述第一线圈基于所述反馈,用于可控制地驱动所述致动臂。

    PIEZOELECTRIC SENSOR AND A METHOD OF FABRICATING A PIEZOELECTRIC SENSOR
    3.
    发明申请
    PIEZOELECTRIC SENSOR AND A METHOD OF FABRICATING A PIEZOELECTRIC SENSOR 审中-公开
    压电传感器和制造压电传感器的方法

    公开(公告)号:US20120137787A1

    公开(公告)日:2012-06-07

    申请号:US13390515

    申请日:2010-08-13

    IPC分类号: G01L1/16 H01L41/04 H01L41/22

    摘要: A piezoelectric sensor comprising a piezoelectric film formed on a surface of an object to be monitored; a plurality of electrodes formed on a surface of the piezoelectric film; and wherein electrical polarization of the piezoelectric film is about coplanar with the surface of the piezoelectric film. A method of forming a piezoelectric sensor. The method comprises forming a piezoelectric film on a surface of an object to be monitored; forming electrodes on a surface of the piezoelectric film; and orientating electrical polarization in the piezoelectric film to be about coplanar with the surface of the piezoelectric film.

    摘要翻译: 一种压电传感器,包括形成在待监测对象的表面上的压电膜; 形成在所述压电膜的表面上的多个电极; 并且其中所述压电膜的电极化与所述压电膜的表面大致共面。 一种形成压电传感器的方法。 该方法包括在待监测对象的表面上形成压电膜; 在所述压电膜的表面上形成电极; 并且将压电膜中的电极化定向为与压电膜的表面大致共面。

    Bondhead alignment tool for a bonding apparatus
    4.
    发明授权
    Bondhead alignment tool for a bonding apparatus 有权
    用于粘合装置的粘合头对准工具

    公开(公告)号:US07849896B2

    公开(公告)日:2010-12-14

    申请号:US12037335

    申请日:2008-02-26

    IPC分类号: B32B41/00

    CPC分类号: H01L21/68 H01L21/67144

    摘要: An alignment tool for a bonding apparatus comprises a loading surface for receiving a pushing force from a surface of a device which is attached to the bonding apparatus, the loading surface being arranged and constructed to experience a tilting moment upon receiving an unequally distributed pushing force from a misaligned device acting on it. The loading surface transmits the tilting moment experienced by it to a sensing surface which is operatively connected to the loading surface through a columnar body, which has a smaller width than the loading surface and the sensing surface, and which connects the loading surface and the sensing surface. An array of piezoelectric elements communicates with the sensing surface and produces electrical signals in response to the tilting moment such that a computing unit operatively connected to the piezoelectric elements may detect a direction of tilt of the loading surface from the electrical signals produced by the piezoelectric elements.

    摘要翻译: 用于接合装置的对准工具包括用于从附接到接合装置的装置的表面接收推力的装载表面,所述装载表面被布置和构造成在接收到不均匀分布的推力时经历倾斜力矩 一个对准的装置。 装载表面将其经历的倾斜力矩传递到感测表面,该感测表面通过柱形体操作性地连接到装载表面,该柱状体具有比装载表面和感测表面更小的宽度,并且连接装载表面和感测 表面。 压电元件阵列与感测表面通信并且响应于倾斜力矩产生电信号,使得可操作地连接到压电元件的计算单元可以从由压电元件产生的电信号检测装载表面的倾斜方向 。

    Model-based active electronic damping for stepper motors
    5.
    发明授权
    Model-based active electronic damping for stepper motors 有权
    用于步进电机的基于模型的有源电子阻尼

    公开(公告)号:US07733051B2

    公开(公告)日:2010-06-08

    申请号:US11942325

    申请日:2007-11-19

    IPC分类号: G05B19/40

    CPC分类号: H02P8/32

    摘要: A method for damping vibrations in a stepper motor with micro-stepping control which comprises the steps of identifying the force amplitudes and phase shifts of multiple harmonic detent torques of the stepper motor, such as the first, second and fourth harmonic detent torques, and tuning the stepper motor with different current commands until minimum friction and resistive torque are obtained. Thereafter, a compensating harmonic current derived from said force amplitudes and phase shifts of the said multiple harmonic detent torques is injected into a current command during operation of the stepper motor to compensate for torque ripples.

    摘要翻译: 一种用于减轻步进电机中的振动的方法,其包括以下步骤:识别步进电动机的多次谐波抑制转矩的力幅度和相移,例如第一,第二和第四谐波定位转矩,以及调谐 获得具有不同电流指令的步进电机,直到获得最小摩擦和阻力矩。 此后,在步进电动机的操作期间,将来自所述多个谐波定子转矩的力幅度和相移的补偿谐波电流注入到电流指令中,以补偿转矩波动。

    Miniaturized piezoelectric accelerometers
    6.
    发明授权
    Miniaturized piezoelectric accelerometers 有权
    小型化压电加速度计

    公开(公告)号:US08833165B2

    公开(公告)日:2014-09-16

    申请号:US13202091

    申请日:2009-09-04

    IPC分类号: G01P15/09 G01P15/18 G01P15/08

    摘要: The miniaturized piezoelectric accelerometer includes a support frame (102) having a cavity (104) and a seismic mass (108) supported by a plurality of suspension beams (110) extending from the support frame (102). Each of the suspension beams (110) has a piezoelectric thin film coated on a top surface thereof, with a pair of inter-digital electrodes (114) deposited on an upper surface of each piezoelectric thin film. The presence of acceleration excites bending and thus strain in the piezoelectric thin film, which in turn causes electrical signals to be generated over terminals of the electrodes (114). To collect constructively the output of the electrodes (114), one terminal of each of the electrodes (114) is routed to and electrically connected at a top surface (308) of the seismic mass (108).

    摘要翻译: 小型压电加速度计包括具有空腔(104)的支撑框架(102)和由从支撑框架(102)延伸的多个悬挂梁(110)支撑的地震块体(108)。 每个悬架梁(110)具有涂覆在其顶表面上的压电薄膜,其中沉积在每个压电薄膜的上表面上的一对数字间电极(114)。 加速度的存在激发弯曲并因此在压电薄膜中变形,这又导致在电极(114)的端子上产生电信号。 为了积累地收集电极(114)的输出,每个电极(114)的一个端子被路由到电气连接在地震质量块(108)的顶表面(308)处。

    Apparatus for dispensing measured quantities of liquid
    7.
    发明授权
    Apparatus for dispensing measured quantities of liquid 有权
    用于分配测量量的液体的装置

    公开(公告)号:US08220661B2

    公开(公告)日:2012-07-17

    申请号:US12185391

    申请日:2008-08-04

    IPC分类号: B67D1/00 B65D83/00 B65D5/72

    CPC分类号: B05C17/00573

    摘要: A liquid dispensing apparatus is provided which has a syringe for storing and dispensing a liquid, and a connector passage connected to the syringe. A positive pressure passage is connected to an air source for supplying positive pressure to the syringe, and there is a pressure valve located along the positive pressure passage that is operative to control the flow of air along the positive pressure passage. A vacuum passage is connected to a vacuum generator for supplying vacuum pressure to the syringe, and there is a vacuum valve located along the vacuum passage that is operative to control the flow of air along the vacuum passage. The positive pressure passage and vacuum passage are connected to the connector passage. A pressure sensor is also provided to measure the pressure in the connector passage.

    摘要翻译: 提供一种液体分配装置,其具有用于储存和分配液体的注射器和连接到注射器的连接器通道。 正压通道连接到用于向注射器供给正压的空气源,并且存在沿着正压通道设置的压力阀,该压力阀用于控制沿着正压通道的空气流。 真空通道连接到真空发生器,用于向注射器提供真空压力,并且存在沿着真空通道设置的真空阀,其可操作用于控制沿着真空通道的空气流。 正压通道和真空通道连接到连接器通道。 还提供压力传感器来测量连接器通道中的压力。

    BONDHEAD ALIGNMENT TOOL FOR A BONDING APPARATUS
    9.
    发明申请
    BONDHEAD ALIGNMENT TOOL FOR A BONDING APPARATUS 有权
    BONDHEAD对准工具用于粘接装置

    公开(公告)号:US20090211709A1

    公开(公告)日:2009-08-27

    申请号:US12037335

    申请日:2008-02-26

    IPC分类号: G05G15/02

    CPC分类号: H01L21/68 H01L21/67144

    摘要: An alignment tool for a bonding apparatus comprises a loading surface for receiving a pushing force from a surface of a device which is attached to the bonding apparatus, the loading surface being arranged and constructed to experience a tilting moment upon receiving an unequally distributed pushing force from a misaligned device acting on it. The loading surface transmits the tilting moment experienced by it to a sensing surface which is operatively connected to the loading surface through a columnar body, which has a smaller width than the loading surface and the sensing surface, and which connects the loading surface and the sensing surface. An array of piezoelectric elements communicates with the sensing surface and produces electrical signals in response to the tilting moment such that a computing unit operatively connected to the piezoelectric elements may detect a direction of tilt of the loading surface from the electrical signals produced by the piezoelectric elements.

    摘要翻译: 用于接合装置的对准工具包括用于从附接到接合装置的装置的表面接收推力的装载表面,所述装载表面被布置和构造成在接收到不均匀分布的推力时经历倾斜力矩 一个对准的装置。 装载表面将其经历的倾斜力矩传递到感测表面,该感测表面通过柱形体操作性地连接到装载表面,该柱状体具有比装载表面和感测表面更小的宽度,并且连接装载表面和感测 表面。 压电元件阵列与感测表面通信并且响应于倾斜力矩产生电信号,使得可操作地连接到压电元件的计算单元可以从由压电元件产生的电信号检测装载表面的倾斜方向 。