FOCUSING METHODS AND OPTICAL SYSTEMS AND ASSEMBLIES USING THE SAME
    2.
    发明申请
    FOCUSING METHODS AND OPTICAL SYSTEMS AND ASSEMBLIES USING THE SAME 有权
    聚焦方法和光学系统和使用它的组件

    公开(公告)号:US20110188053A1

    公开(公告)日:2011-08-04

    申请号:US12947367

    申请日:2010-11-16

    IPC分类号: G01B11/24 G01B11/14

    CPC分类号: G02B21/247 G02B21/245

    摘要: A method for controlling a focus of an optical system. The method includes providing a pair of incident light beams to a conjugate lens. The incident light beams are directed by the lens to converge toward a focal region. The method also includes reflecting the incident light beams with an object positioned proximate to the focal region. The reflected light beams return to and propagate through the lens. The method also includes determining relative separation measured between the reflected light beams and determining a degree-of-focus of the optical system with respect to the sample based upon the relative separation.

    摘要翻译: 一种用于控制光学系统的焦点的方法。 该方法包括将一对入射光束提供给共轭透镜。 入射光束被透镜引导以朝向焦点区域会聚。 该方法还包括用邻近聚焦区域定位的物体反射入射光束。 反射光束返回并传播通过透镜。 该方法还包括确定在反射光束之间测量的相对间隔,并基于相对间隔确定光学系统相对于样品的焦度。