公开(公告)号：US20170359003A1

公开(公告)日：2017-12-14

申请号：US15182389

申请日：2016-06-14

Applicant: MEMS DRIVE, INC.

Inventor： XIAOLEI LIU ,  KEGANG HUANG ,  GUIQIN WANG ,  MATTHEW NG ,  BENSON MAI ,  CHANGGENG LIU

IPC: H02N2/02 ,  H01L41/09

CPC classification number: B81B3/0062 ,  B81B2203/0109 ,  B81B2203/0163 ,  B81B2203/019 ,  B81B2203/053 ,  H01L41/0993 ,  H02N2/028

Abstract: Electric connection flexures for moving stages of microelectromechanical systems (MEMS) devices are disclosed. The disclosed flexures may provide an electrical and mechanical connection between a fixed frame and a moving frame, and are flexible in the moving frame's plane of motion. In implementations, the flexures are formed using a process that embeds the two ends of each flexure in the fixed frame and moving frame, respectively.