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    MEMS Actuation System
    1.
    发明申请
    MEMS Actuation System 审中-公开

    公开(公告)号：US20200099317A1

    公开(公告)日：2020-03-26

    申请号：US16584471

    申请日：2019-09-26

    Applicant: MEMS Drive, Inc.

    Inventor： GUIQIN WANG ,  Xiaolei Liu

    IPC: H02N2/02 ,  H02N1/00 ,  G03B13/36 ,  G02B7/09 ,  G02B27/64 ,  G03B5/02 ,  G03B5/04

    Abstract: A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including: an in-plane MEMS actuator, and an out-of-plane MEMS actuator including a multi-morph piezoelectric actuator; an optoelectronic device coupled to the in-plane MEMS actuator; and a lens barrel assembly coupled to the out-of-plane MEMS actuator.

    MOVING IMAGE SENSOR PACKAGE
    3.
    发明申请
    MOVING IMAGE SENSOR PACKAGE 有权
    移动图像传感器包装

    公开(公告)号：US20150350500A1

    公开(公告)日：2015-12-03

    申请号：US14692662

    申请日：2015-04-21

    Applicant: MEMS Drive, Inc.

    Inventor： ROMAN GUTIERREZ ,  GUIQIN WANG ,  XIAOLEI LIU

    IPC: H04N5/225 ,  H05K3/28

    CPC classification number: H04N5/2253 ,  H05K1/182 ,  H05K2201/10083 ,  H05K2201/10121 ,  Y10T29/4913

    Abstract: A moving image sensor package is provided that may be used to provide optical image stabilization (OIS) in the same form factor as non-OIS enabled image sensors utilized in portable/mobile devices. The moving image sensor package includes an image sensor attached to a MEMS actuator mounted within a cutout in a circuit board, wherein the MEMS actuator has substantially the same thickness as the circuit board.

    Abstract translation: 提供了一种运动图像传感器封装，其可用于以与便携式/移动设备中使用的非OIS启用的图像传感器相同的形状因数提供光学图像稳定（OIS）。 运动图像传感器封装包括附接到安装在电路板中的切口内的MEMS致动器的图像传感器，其中MEMS致动器具有与电路板基本相同的厚度。

    MULTI-DIRECTIONAL ACTUATOR
    5.
    发明申请
    MULTI-DIRECTIONAL ACTUATOR 审中-公开
    多方向执行器

    公开(公告)号：US20170040909A1

    公开(公告)日：2017-02-09

    申请号：US14818086

    申请日：2015-08-04

    Applicant: MEMS DRIVE, INC.

    Inventor： XIAOLEI LIU ,  ROMAN GUTIERREZ ,  MATTHEW NG ,  GUIQIN WANG

    IPC: H02N1/00

    CPC classification number: H02N1/008

    Abstract: An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments.

    Abstract translation: 提供了一种装置。 该装置包括双向梳驱动致动器。 该装置还可以包括悬臂。 悬臂包括连接到双向梳状驱动致动器的第一端和连接到内框架的第二端。 此外，悬臂可以包括用于布置电信号的第一和第二导电层。 可以包括多维致动器的所公开的装置的实施例允许将更多数量的电信号路由到致动器。 此外，所公开的设备允许致动多个方向，这可以提供增加的控制，精确度和运动的灵活性。 因此，所公开的实施例提供了关于光学图像稳定和自动聚焦能力的显着益处，例如在尺寸和功率受限的环境中。

    ELECTRICAL BAR LATCHING FOR LOW STIFFNESS FLEXURE MEMS ACTUATOR
    6.
    发明申请
    ELECTRICAL BAR LATCHING FOR LOW STIFFNESS FLEXURE MEMS ACTUATOR 有权
    用于低刚度柔性MEMS致动器的电棒锁定器

    公开(公告)号：US20150341534A1

    公开(公告)日：2015-11-26

    申请号：US14819413

    申请日：2015-08-05

    Applicant: MEMS DRIVE, INC.

    Inventor： MATTHEW NG ,  ROMAN GUTIERREZ ,  GUIQIN WANG

    IPC: H04N5/225 ,  H04N5/335 ,  H02N1/00

    CPC classification number: H04N5/2328 ,  B81B3/0021 ,  B81B3/007 ,  B81B2203/0163 ,  B81B2207/07 ,  H02N1/008 ,  H04N5/225 ,  H04N5/2254 ,  H04N5/335 ,  Y10T29/49107

    Abstract: A MEMS actuator including buckled flexures and a method of assembling the actuator are described. The assembled MEMS actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. The flexures are buckled during assembly of the MEMS actuator by incorporating the electrical bar latching mechanism into the design of the outer frame of the MEMS actuator. In one implementation, the MEMS actuator is assembled by providing a MEMS actuator with unbuckled flexures coupling the outer frame of the MEMS actuator to an inner frame of the MEMS actuator, where the outer frame includes unlatched electrical bars, and latching the electrical bars of the outer frame, resulting in buckled flexures.

    Abstract translation: 描述了包括弯曲弯曲的MEMS致动器和组装致动器的方法。 组装的MEMS致动器包括内框架; 外框架包括锁定的电杆，其中第一闩锁杆包括固定到第二闩锁杆的相应闩锁槽的闩锁突起; 以及将内框架连接到外框架的弯曲弯曲。 通过将电杆闭锁机构并入MEMS致动器的外框架的设计中，挠性件在组装MEMS致动器期间被弯曲。 在一个实现中，通过向MEMS致动器提供具有将MEMS致动器的外框架耦合到MEMS致动器的内框架的未弯曲挠曲件的MEMS致动器来组装，其中外框架包括未锁定的电杆，并且锁定 外框，导致弯曲弯曲。

    LOW STIFFNESS FLEXURE
    7.
    发明申请
    LOW STIFFNESS FLEXURE 审中-公开
    低刚度挠度

    公开(公告)号：US20150321900A1

    公开(公告)日：2015-11-12

    申请号：US14677730

    申请日：2015-04-02

    Applicant: MEMS DRIVE, INC.

    Inventor： XIAOLEI LIU ,  ROMAN GUTIERREZ ,  GUIQIN WANG ,  BENSON MAI ,  MATTHEW NG

    IPC: B81B3/00

    CPC classification number: B81B3/0051 ,  B81B3/007 ,  B81B2203/0163 ,  Y10T74/20

    Abstract: A flexure includes a support first end connected to a first frame; a support second end connected to a second frame; and a buckled section connecting the first support end to the second support end. The length of the flexure is substantially greater than its width, and the width of the flexure is substantially greater than its thickness. During operation, the flexure is maintained in a buckled state where the flexure's stiffness is significantly less than in the unbuckled state. In one implementation, a stage includes a flexure array joining a first frame and a second frame, where: the first frame and the second frame are substantially on a plane; the flexure array is substantially on the plane prior to buckling by the flexures of the flexure array; and the flexure array is bent substantially out of the plane after buckling by the flexures.

    Abstract translation: 挠性件包括连接到第一框架的支撑件第一端; 连接到第二框架的支撑件第二端; 以及将第一支撑端连接到第二支撑端的弯曲部分。 挠曲的长度基本上大于其宽度，并且挠曲件的宽度基本上大于其厚度。 在操作过程中，挠曲保持在弯曲状态，其中挠曲刚度明显小于未弯曲状态。 在一个实施方案中，舞台包括接合第一框架和第二框架的挠曲阵列，其中：第一框架和第二框架基本上在平面上; 弯曲阵列在由弯曲阵列的挠曲弯曲之前基本上在平面上; 并且挠曲阵列在由弯曲部弯曲之后基本上被弯曲成平面。

    MEMS Actuation System
    8.
    发明申请
    MEMS Actuation System 审中-公开

    公开(公告)号：US20190227266A1

    公开(公告)日：2019-07-25

    申请号：US16256495

    申请日：2019-01-24

    Applicant: MEMS Drive, Inc.

    Inventor： GUIQIN WANG ,  Xiaolei Liu ,  Matthew Ng

    IPC: G02B13/00 ,  G02B7/09 ,  G03B13/32 ,  G03B17/00 ,  H01L41/09

    Abstract: A multi-axis MEMS assembly includes a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement. The micro-electrical-mechanical system (MEMS) actuator includes: an in-plane MEMS actuator, and an out-of-plane MEMS actuator. An optoelectronic device is coupled to the micro-electrical-mechanical system (MEMS) actuator. The out-of-plane MEMS actuator includes a multi-morph piezoelectric actuator.

    COMB DRIVE WITH NON-PARALLEL OVERLAPPING COMB FINGERS
    10.
    发明申请
    COMB DRIVE WITH NON-PARALLEL OVERLAPPING COMB FINGERS 审中-公开
    与非平行重叠组合手指组合驱动

    公开(公告)号：US20160268927A1

    公开(公告)日：2016-09-15

    申请号：US14656618

    申请日：2015-03-12

    Applicant: MEMS DRIVE, INC.

    Inventor： XIAOLEI LIU ,  GUIQIN WANG ,  ROMAN GUTIERREZ

    IPC: H02N1/00 ,  B81C1/00 ,  B81B3/00

    CPC classification number: H02N1/008 ,  B81B3/0086 ,  B81B2201/033 ,  B81B2203/0136 ,  B81B2203/019

    Abstract: A comb drive includes an inactive comb finger array and an opposing active comb finger array positioned to oppose the inactive comb finger array and configured to move in a non-linear path relative to the inactive comb finger array, wherein each comb finger array includes a comb spine and a plurality of comb fingers extending from its comb spine, and each comb finger on the active comb finger array is shaped to match a non-parallel profile. The non-parallel profile may be tapered, curved, or selected to linearize the capacitance in a gap between adjacent comb fingers from the inactive comb finger array when a comb finger from the active comb finger array moves through the gap.

    Abstract translation: 梳状驱动器包括不活动的梳状指状阵列和相对的有源梳状指阵列，定位成与非活性梳状指状阵列相对并配置为相对于非活性梳状指状阵列在非线性路径中移动，其中每个梳齿阵列包括梳子 脊和从其梳脊延伸的多个梳齿，并且活动梳指阵列上的每个梳指被成形为匹配非平行轮廓。 非平行轮廓可以是渐缩的，弯曲的或选择的，以便当来自主动梳齿阵列的梳齿移动穿过间隙时，使来自无源梳指阵列的相邻梳齿之间的间隙中的电容线性化。

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