公开(公告)号：US20130113448A1

公开(公告)日：2013-05-09

申请号：US13289071

申请日：2011-11-04

申请人： MICHAEL J. SHAPIRO ,  GARY D. CARPENTER ,  ALAN J. DRAKE ,  RACHEL GORDIN ,  EDMUND J. SPROGIS

发明人： MICHAEL J. SHAPIRO ,  GARY D. CARPENTER ,  ALAN J. DRAKE ,  RACHEL GORDIN ,  EDMUND J. SPROGIS

IPC分类号： G05F1/10 ,  H01L21/02 ,  H01F5/00 ,  H01L27/06

CPC分类号： H01L23/49822 ,  H01F17/0013 ,  H01F41/005 ,  H01F2017/0086 ,  H01L23/5227 ,  H01L23/645 ,  H01L28/10 ,  H01L2224/16225 ,  H01L2224/32225 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2924/01322 ,  H01L2924/15311 ,  H01L2924/30107 ,  H01L2924/00

摘要： A coil inductor and buck voltage regulator incorporating the coil inductor are provided which can be fabricated on a microelectronic element such as a semiconductor chip, or on an interconnection element such as a semiconductor, glass or ceramic interposer element. When energized, the coil inductor has magnetic flux extending in a direction parallel to first and second opposed surfaces of the microelectronic or interconnection element, and whose peak magnetic flux is disposed between the first and second surfaces. In one example, the coil inductor can be formed by first conductive lines extending along the first surface of the microelectronic or interconnection element, second conductive lines extending along the second surface of the microelectronic or interconnection element, and a plurality of conductive vias, e.g., through silicon vias, extending in direction of a thickness of the microelectronic or interconnection element. A method of making the coil inductor is also provided.

摘要翻译： 提供了一种结合线圈电感器的线圈电感器和降压稳压器，其可以制造在诸如半导体芯片的微电子元件上，或者在诸如半导体，玻璃或陶瓷插入元件的互连元件上。 当通电时，线圈电感器具有沿平行于微电子或互连元件的第一和第二相对表面的方向延伸的磁通量，并且其峰值磁通量设置在第一和第二表面之间。 在一个示例中，线圈电感器可以由沿着微电子或互连元件的第一表面延伸的第一导线形成，沿着微电子或互连元件的第二表面延伸的第二导电线，以及多个导电通孔， 通过硅通孔，在微电子或互连元件的厚度方向上延伸。 还提供了制造线圈电感器的方法。