公开(公告)号：US20020025450A1

公开(公告)日：2002-02-28

申请号：US09974850

申请日：2001-10-12

Applicant: MINEBEA CO., LTD.

Inventor： Mitsuteru Inoue ,  Toshitaka Fujii ,  Akio Takayama ,  Atsushi Kitamura ,  Shigeyuki Adachi ,  Hideki Kato

IPC: G11B005/105

CPC classification number: H01F10/245 ,  G02F1/0036 ,  G11B11/10582 ,  G11B11/10584 ,  G11B11/10586 ,  H01F10/28 ,  H01F41/186 ,  H01F41/22

Abstract: This invention provides a magnetic optical member that can obtain a large magneto-optical effect using a rare-earth-iron-garnet-based material and a method of producing the same. According to the present invention, a BiYIG thin film (207) is formed on a (SiO2/Ta2O5)n layer (210), and heat-treatment for crystallization of the BiYIG thin film (207) is carried out with infrared rays while cooling a non-heat-resisting substrate (203) and the (SiO2/Ta2O5)n layer (210) through a substrate holder (201). Since the non-heat-resisting substrate (203) is cooled and the deformation thereof is prevented, heat treatment to crystallize the BiYIG thin film (207) can be carried out. By the crystallization of the BiYIG thin film (207) a large magneto-optical effect can be obtained. The non-heat-resisting substrate (203) is cooled, and can be made of a thermoplastic resin or can be formed in a tape shape, film shape or sheet shape. Thus, easy handling of the substrate and downsizing can be realized. Further, it is not necessary to make the substrate of glass, making it easy to form a groove. By the cooling of the (SiO2/Ta2O5)n layer (210) the interdiffusion of Ta2O5 and SiO2 is prevented and heat treatment for crystallization can be performed.

Abstract translation: 本发明提供一种使用稀土 - 铁 - 石榴石材料获得大的磁光效应的磁性光学元件及其制造方法。 根据本发明，在（SiO 2 / Ta 2 O 5）n层（210）上形成BiYIG薄膜（207），并且在冷却时用红外线进行BiYIG薄膜（207）的结晶热处理 通过衬底保持器（201）的非耐热衬底（203）和（SiO 2 / Ta 2 O 5）n层（210）。 由于非耐热基板（203）被冷却并且其变形被阻止，所以可以进行热处理以使BiYIG薄膜（207）结晶。 通过BiYIG薄膜（207）的结晶，可以获得大的磁光效应。 非耐热衬底（203）被冷却，并且可以由热塑性树脂制成，或者可以形成为带状，膜形或片状。 因此，可以实现基板的容易处理和小型化。 此外，不需要制造玻璃基板，从而容易形成凹槽。 通过（SiO 2 / Ta 2 O 5）n层（210）的冷却，可以防止Ta2O5和SiO2的相互扩散，并且可以进行结晶热处理。

公开(公告)号：US20020149832A1

公开(公告)日：2002-10-17

申请号：US10118227

申请日：2002-04-09

Applicant: MINEBEA CO., LTD.

Inventor： Takeshi Matsushita ,  Mitsuteru Inoue ,  Hideki Kato ,  Akio Takayama

IPC: G02F001/09

CPC classification number: G02F1/09 ,  G02F2201/17 ,  G02F2203/02

Abstract: A Faraday rotator of multilayer film type is provided in which satisfactory optical characteristics are obtained with a small number of layers. In the Faraday rotator, a first periodic dielectric multilayer film made of silicon dioxide SiO2 and tantalum pentaoxide Ta2O5 is formed on a substrate, then a magneto-optical thin film, and a second periodic dielectric multilayer film made of tantalum pentaoxide Ta2O5 and silicon dioxide SiO2 are formed sequentially. The first and second periodic dielectric multilayer films sandwich the magneto-optical thin film such that their respective higher refractive dielectric thin films are in contact with the magneto-optical thin film. The number of layers of the first periodic dielectric multilayer film is larger than that of the second periodic dielectric multilayer film.

Abstract translation: 提供了一种多层膜法拉第旋转器，其中获得了令人满意的光学特性，具有少量层。 在法拉第旋转器中，在衬底上形成由二氧化硅SiO 2和五氧化钽Ta 2 O 5制成的第一周期性电介质多层膜，然后形成磁光薄膜和由五氧化钽Ta 2 O 5和二氧化硅SiO 2制成的第二周期性电介质多层膜 顺序地形成。 第一和第二周期性电介质多层膜夹着磁光薄膜使它们各自的高折射率电介质薄膜与磁光薄膜接触。 第一周期性电介质多层膜的层数大于第二周期性电介质多层膜的层数。

公开(公告)号：US20020063941A1

公开(公告)日：2002-05-30

申请号：US09948688

申请日：2001-09-10

Applicant: MINEBEA CO., LTD.

Inventor： Takeshi Matsushita ,  Mitsuteru Inoue ,  Hideki Kato ,  Akio Takayama

IPC: G02F001/09

CPC classification number: G02F1/093

Abstract: The present invention provides a magneto-optical member capable of ensuring an excellent light transmittance and an optical isolator using the same. A first one-dimensional magnetic photonic crystal having a magneto-optical thin film, and a second one-dimensional magnetic photonic crystal having another magneto-optical thin film are laminated so as to sandwich a dielectric thin film with a small refractive index having an optical length of null/4nullmnull/2 where null is a wavelength of light and m is 0 or a positive integer. Since a plurality of magneto-optical thin films are present as magnetic thin films and hence the total thickness of the magnetic thin films is increased, the Faraday rotation angle is increased. Also, a large light transmittance can be obtained because of the presence of the dielectric thin film with a small refractive index having (null/4nullmnull/2) thickness where the first and second one-dimensional magnetic photonic crystals are laminated.

Abstract translation: 本发明提供一种能够确保优异的透光率的磁光部件和使用该磁光部件的光隔离器。 具有磁光薄膜的第一一维磁光子晶体和具有另一磁光薄膜的第二一维磁光子晶体被层压以夹着具有光学折射率的小折射率的电介质薄膜 lambd / 4 + mlambd / 2的长度，其中lambd是光的波长，m是0或正整数。 由于存在多个磁光薄膜作为磁性薄膜，因此磁性薄膜的总厚度增加，所以法拉第旋转角度增加。 此外，由于存在层叠有第一和第二一维磁性光子晶体的具有（lambd / 4 + mlambd / 2）厚度的小折射率的电介质薄膜，因此可以获得大的透光率。

公开(公告)号：US20020018913A1

公开(公告)日：2002-02-14

申请号：US09918439

申请日：2001-08-01

Applicant: Minebea Co., Ltd.

Inventor： Hideki Kato ,  Mitsuteru Inoue ,  Akio Takayama

IPC: B32B015/00 ,  B32B009/00 ,  B32B019/00

CPC classification number: B32B18/00 ,  C04B2235/6562 ,  C04B2237/34 ,  C04B2237/341 ,  C04B2237/345 ,  C04B2237/363 ,  C04B2237/565 ,  C04B2237/704 ,  G02F1/093 ,  Y10T428/12674

Abstract: A magneto-optical body with a reduced manufacturing cost and an improved yield and an optical isolator using the same are provided. The magneto-optical body includes two dielectric multilayered films each consisting of a Si thin film having a refractive index (Ms) of 3.11 and a SiO2 thin film having a refractive index (Mt) of 1.415 and provided at both sides of a magnetic thin film. By using the dielectric multilayered films each comprising two types of dielectric thin films having a refractive index largely different from each other, light is intensely localized at the center. A great magneto-optical effect may be obtained and a large Faraday rotation angle may be obtained with a reduced number of layers of the dielectric thin films. A manufacturing cost is reduced, and process control also is relaxed, thereby improving a manufacturing yield.

Abstract translation: 提供了具有降低的制造成本和提高的产量的磁光体，以及使用其的光隔离器。 磁光体包括两个电介质多层膜，每个由折射率（Ms）为3.11的Si薄膜和折射率（Mt）为1.415的SiO 2薄膜组成，并且设置在磁性薄膜的两侧 。 通过使用各自包含折射率彼此很大不同的两种类型的电介质薄膜的电介质多层膜，光在中心强烈地定位。 可以获得很大的磁光效应，并且可以通过减少数量的电介质薄膜获得大的法拉第旋转角度。 制造成本降低，过程控制也松弛，从而提高制造成品率。

公开(公告)号：US20020182324A1

公开(公告)日：2002-12-05

申请号：US10102976

申请日：2002-03-22

Applicant: Minebea Co., Ltd.

Inventor： Shoji Kaneko ,  Akio Takayama

IPC: B05D003/02 ,  B05D001/02

CPC classification number: C23C18/1258 ,  C23C4/123 ,  C23C18/1216 ,  C23C18/1291 ,  H01F10/20 ,  H01F41/20

Abstract: A raw material mixed solution containing nitrate or alkoxide of metal that constitutes a ferrite is sprayed from an atomizer by means of a carrier gas such as compressed air onto a substrate mounted on a hot plate and heated to a predetermined temperature. The method enables a thin film having a desired thickness to be formed by a simple apparatus in a short time without sacrificing good soft magnetism of a ferrite, thereby greatly contributing to downsizing and weight reduction of electronic devices.

Abstract translation: 将含有构成铁素体的金属的硝酸盐或醇盐的原料混合溶液从雾化器借助于诸如压缩空气的载气喷射到安装在热板上的基板上并加热到预定温度。 该方法能够在短时间内通过简单的装置形成具有所需厚度的薄膜，而不会牺牲铁氧体的良好的软磁性，从而极大地有助于电子设备的小型化和重量减轻。

公开(公告)号：US20020149833A1

公开(公告)日：2002-10-17

申请号：US10123230

申请日：2002-04-17

Applicant: MINEBEA CO., LTD.

Inventor： Takeshi Matsushita ,  Mitsuteru Inoue ,  Hideki Kato ,  Akio Takayama

IPC: G02F001/09

CPC classification number: G02F1/093 ,  G02F2201/17

Abstract: A reflection type Faraday rotator includes first to sixth reflection type sub-rotators. Light is made incident on the first to sixth sub-rotators while repeating reflecting thereat. A Faraday rotation occurs at a sub-rotator having a center wavelength equal to the wavelength of the light The sub-rotators are of reflection-type, have a larger bandwidth of outgoing light compared to a transmission type, and have center wavelengths (wavelength characteristics) different from one another. Thus, the effective wavelength range (the wavelength bandwidth) is increased. Expensive optical devices conventionally required for increasing the wavelength bandwidth are not needed. Accordingly, the cost can be reduced.

Abstract translation: 反射型法拉第旋转器包括第一至第六反射型次旋转器。 在第一至第六副转子上发生光，同时重复反射。 法拉第旋转发生在具有等于光的波长的中心波长的子旋转体上。副旋转体是反射型的，与透射型相比具有更大的出射带宽，并且具有中心波长（波长特性 ）不同。 因此，有效波长范围（波长带宽）增加。 传统上增加波长带宽所需的昂贵的光学装置是不需要的。 因此，可以降低成本。

公开(公告)号：US20020149831A1

公开(公告)日：2002-10-17

申请号：US10112711

申请日：2002-04-02

Applicant: MINEBEA CO., LTD.

Inventor： Takeshi Matsushita ,  Mitsuteru Inoue ,  Hideki Kato ,  Akio Takayama

IPC: G02F001/09

CPC classification number: G02F1/09 ,  G02F2201/17 ,  G02F2203/02

Abstract: A Faraday rotator is provided which obtains excellent optical characteristics with a small number of layers. In the Faraday rotator, a metal reflective film is formed on a substrate, then a first periodic dielectric multilayer film made of silicon dioxide SiO2 and tantalum pentaoxide Ta2O5, a magneto-optical thin film, and a second periodic dielectric multilayer film made of tantalum pentaoxide Ta2O5 and silicon dioxide SiO2 are formed sequentially. The number of layers of the first periodic dielectric multilayer film is larger than that of the second periodic dielectric multilayer film. Incident light from a polarizer passes through the periodic dielectric multilayer films, is reflected at the metal reflective film, returns through the periodic dielectric multilayer films, and passes through an analyzer to exit out.

Abstract translation: 提供法拉第旋转器，其获得具有少量层的优异的光学特性。 在法拉第旋转器中，在基板上形成金属反射膜，然后形成由二氧化硅SiO 2和五氧化钽Ta 2 O 5制成的第一周期性电介质多层膜，磁光薄膜，以及由五氧化二钽制成的第二周期性电介质多层膜 依次形成Ta2O5和二氧化硅SiO2。 第一周期性电介质多层膜的层数大于第二周期性电介质多层膜的层数。 来自偏振片的入射光通过周期性电介质多层膜，在金属反射膜处反射，通过周期性电介质多层膜返回，并通过分析仪退出。

公开(公告)号：US20020139974A1

公开(公告)日：2002-10-03

申请号：US10105438

申请日：2002-03-26

Applicant: Minebea Co., Ltd.

Inventor： Takeshi Matsushita ,  Mitsuteru Inoue ,  Hideki Kato ,  Akio Takayama

IPC: H01L029/06

CPC classification number: G02F1/093 ,  G02F2201/34 ,  G02F2203/02

Abstract: A Faraday rotator of multilayer film type is provided which can achieve excellent optical characteristics with a reduced number of layers. In the Faraday rotator, a metal reflection film, a periodic dielectric multilayer film made of silicon dioxide SiO2 and tantalum pentoxide Ta2O5, a magneto-optical thin film, and another periodic dielectric multilayer film made of tantalum pentoxide Ta2O5 and silicon dioxide SiO2 is formed sequentially. Light incident on a polarizer goes therethrough, is reflected at the metal reflection film while traveling trough the periodic dielectric multilayer films, and goes through an analyzer to exit out.

Abstract translation: 提供了一种多层薄膜型法拉第旋转器，可以实现优异的光学特性并减少层数。 在法拉第旋转器中，顺序地形成金属反射膜，由二氧化硅SiO 2和五氧化二钽Ta 2 O 5制成的周期性电介质多层膜，磁光薄膜和由五氧化钽Ta 2 O 5和二氧化硅SiO 2制成的另外的周期性电介质多层膜 。 偏振片入射的光通过，在金属反射膜上反射，同时在周期性电介质多层膜上行进，并通过分析仪退出。