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    Intermodulation distortion mitigation using electronic variable capacitor
    3.
    发明授权
    Intermodulation distortion mitigation using electronic variable capacitor 有权

    公开(公告)号：US11810762B2

    公开(公告)日：2023-11-07

    申请号：US17643866

    申请日：2021-12-13

    Applicant: MKS Instruments, Inc.

    Inventor： Jin Huh ,  Aaron T. Radomski ,  Duy Nguyen ,  Soohan Kim

    IPC: H01J37/32 ,  H05H1/46

    CPC classification number: H01J37/32183 ,  H05H1/46 ,  H05H2242/20

    Abstract: A matching network for a system having a non-linear load and powered by a first RF power supply operating at a first frequency and a second RF power supply operating at a second frequency. The matching network includes a first matching network section for providing an impedance match between the first power supply and the load. The matching network also includes a second matching network section for providing an impedance match between the second power supply and the load. The first matching network section includes a first variable reactance, and the variable reactance is controlled in accordance with IMD sensed in the signal applied to the load by the first RF power supply. The variable reactance is adjusted in accordance with the IMD to reduce the detected IMD.

    Adaptive periodic waveform controller
    4.
    发明授权
    Adaptive periodic waveform controller 有权

    公开(公告)号：US11367592B2

    公开(公告)日：2022-06-21

    申请号：US16905377

    申请日：2020-06-18

    Applicant: MKS Instruments, Inc.

    Inventor： Larry J. Fisk, II ,  Aaron T. Radomski ,  Jonathan W. Smyka

    IPC: H01J37/32

    Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.

    Adaptive periodic waveform controller
    5.
    发明授权
    Adaptive periodic waveform controller 有权

    公开(公告)号：US10727027B2

    公开(公告)日：2020-07-28

    申请号：US16273595

    申请日：2019-02-12

    Applicant: MKS Instruments, Inc.

    Inventor： Larry J. Fisk, II ,  Aaron T. Radomski ,  Jonathan W. Smyka

    IPC: H01J37/32

    Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.

    Adaptive pulse shaping with post match sensor
    6.
    发明授权
    Adaptive pulse shaping with post match sensor 有权

    公开(公告)号：US11715624B2

    公开(公告)日：2023-08-01

    申请号：US17396901

    申请日：2021-08-09

    Applicant: MKS Instruments, Inc.

    Inventor： Jonathan W. Smyka ,  Aaron T. Radomski ,  Peter Paul ,  Aaron M. Burry

    IPC: H01J37/32

    CPC classification number: H01J37/32183 ,  H01J37/32146 ,  H01J37/32155

    Abstract: A RF generator includes a RF power source and a RF control module coupled to the RF power source. The RF control module is configured to generate at least one control signal to vary a respective at least one of an RF output signal from the RF power source or an impedance between the RF power source and a load. The RF output signal includes a RF signal modulated by a pulse signal, and the RF control module is further configured to adjust the at least one control signal to vary at least one of an amplitude or a frequency of the RF output signal or the impedance between the RF power source and the load to control a shape of the pulse signal. The at least one of the amplitude, the frequency, or the impedance is adjusted in accordance with respective feedforward adjustments that vary in accordance with a respective sensed pulse parameter detected between a matching network and the load.

    Switched capacitor modulator
    7.
    发明授权
    Switched capacitor modulator 有权

    公开(公告)号：US11545943B2

    公开(公告)日：2023-01-03

    申请号：US17111700

    申请日：2020-12-04

    Applicant: MKS Instruments, Inc.

    Inventor： Duy Nguyen ,  Albert Kuramshin ,  Aaron T. Radomski ,  Alexander Jurkov ,  Hangon Kim ,  Kelvin Lee

    IPC: H02M3/335 ,  H03F3/24 ,  H03F1/56 ,  H03F3/00 ,  H03F3/195 ,  H03F1/02

    Abstract: A switched capacitor modulator (SCM) includes a RF power amplifier. The RF power amplifier receives a rectified voltage and a RF drive signal and modulates an input signal in accordance with the rectified voltage to generate a RF output signal to an output terminal. A reactance in parallel with the output terminal is configured to vary in response to a control signal to vary an equivalent reactance in parallel with the output terminal. A controller generates the control signal and a commanded phase. The commanded phase controls the RF drive signal. The reactance is at least one of a capacitance or an inductance, and the capacitance or the inductance varies in accordance with the control signal.

    Intermodulation distortion mitigation using electronic variable capacitor
    8.
    发明授权
    Intermodulation distortion mitigation using electronic variable capacitor 有权

    公开(公告)号：US11232931B2

    公开(公告)日：2022-01-25

    申请号：US17073709

    申请日：2020-10-19

    Applicant: MKS Instruments, Inc.

    Inventor： Jin Huh ,  Aaron T. Radomski ,  Duy Nguyen ,  Soohan Kim

    IPC: H01J37/32 ,  H05H1/46

    Abstract: A matching network for a system having a non-linear load and powered by a first RF power supply operating at a first frequency and a second RF power supply operating at a second frequency. The matching network includes a first matching network section for providing an impedance match between the first power supply and the load. The matching network also includes a second matching network section for providing an impedance match between the second power supply and the load. A the first matching network section includes a first variable reactance, and the variable reactance is controlled in accordance with IMD sensed in the signal applied to the load by the first RF power supply. The variable reactance is adjusted in accordance with the IMD to reduce the detected IMD.

    Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber
    9.
    发明授权
    Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber 有权

    公开(公告)号：US11011940B2

    公开(公告)日：2021-05-18

    申请号：US16506555

    申请日：2019-07-09

    Applicant: MKS Instruments, Inc.

    Inventor： Ky Luu ,  Aaron T. Radomski

    IPC: H02J50/20 ,  H02J50/80 ,  H04B5/00

    Abstract: A radio frequency power system is provided that includes bias modules, a switch, a matching network, and a control module. The bias modules are configured to generate respectively DC bias voltages. The switch is configured to (i) receive current from the bias modules, and (ii) control flow of the current from the bias modules to generate a radio frequency bias voltage signal. The matching network is configured to (i) receive the radio frequency bias voltage signal, and (ii) based on the radio frequency bias voltage signal, supply at least a portion of a radio frequency output voltage signal to an electrode of a substrate support in a processing chamber. The control module is connected to the switch and configured to control a state of the switch based on the radio frequency output voltage signal to shape a waveform of the radio frequency bias voltage signal.

    Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber
    10.
    发明授权
    Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber 有权

    公开(公告)号：US10396601B2

    公开(公告)日：2019-08-27

    申请号：US15605055

    申请日：2017-05-25

    Applicant: MKS Instruments, Inc.

    Inventor： Ky Luu ,  Aaron T. Radomski

    IPC: H02J50/20 ,  H02J50/80 ,  H04B5/00

    Abstract: A radio frequency power system is provided that includes bias modules, a switch, a matching network, and a control module. The bias modules are configured to generate respectively DC bias voltages. The switch is configured to (i) receive current from the bias modules, and (ii) control flow of the current from the bias modules to generate a radio frequency bias voltage signal. The matching network is configured to (i) receive the radio frequency bias voltage signal, and (ii) based on the radio frequency bias voltage signal, supply at least a portion of a radio frequency output voltage signal to an electrode of a substrate support in a processing chamber. The control module is connected to the switch and configured to control a state of the switch based on the radio frequency output voltage signal to shape a waveform of the radio frequency bias voltage signal.

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