公开(公告)号：US11346860B2

公开(公告)日：2022-05-31

申请号：US16990612

申请日：2020-08-11

Applicant: MPI CORPORATION

Inventor： Chin-Tien Yang ,  Hui-Pin Yang ,  Shang-Jung Hsieh ,  Tsung-Yi Chen ,  Yu-Hao Chen ,  Jhin-Ying Lyu

IPC: G01R1/067 ,  G01R1/073

Abstract: A probe head includes a probe seat having upper, middle and lower dies, an electrically conductive layer inside the probe seat, a first spring probe penetrating through the probe seat, and at least two shorter second spring probes penetrating through the lower die in a way that top ends of the second spring probes are located inside the probe seat and abutted against the electrically conductive layer. Another probe head includes the aforesaid probe seat, an electrically conductive layer partially inside the probe seat and partially outside the probe seat, a first spring probe penetrating through the probe seat, and a shorter second spring probe penetrating through the lower die in a way that a top end of the second spring probe is located inside the probe seat and abutted against the electrically conductive layer. As such, fine pitch requirement and different high frequency testing requirements are fulfilled.

公开(公告)号：US20240077519A1

公开(公告)日：2024-03-07

申请号：US18242586

申请日：2023-09-06

Applicant: MPI CORPORATION

Inventor： Yang-Hung Cheng ,  Yu-Hao Chen ,  Jhin-Ying Lyu ,  Hao Wei

IPC: G01R1/073 ,  G01R1/067 ,  G01R31/28

CPC classification number: G01R1/07342 ,  G01R1/06772 ,  G01R31/2886

Abstract: A probe card, a method for designing the probe card, a method for producing a tested semiconductor device, a method for testing an unpackaged semiconductor by the probe card, a device under test, and a probe system are provided. The probe card includes a wiring substrate, a connection carrier board, and a probe device. At least two probes form a differential pair electrically connected to a loopback line of the connection carrier board to form a test signal loopback path. The probe device has a probe device impedance on the test signal loopback path. The loopback line has a loopback line impedance on the test signal loopback path. A difference between the probe device impedance on the test signal loopback path and the loopback line impedance on the test signal loopback path is in an impedance range.