SINGULATION OF OPTICAL WAVEGUIDE MATERIALS

    公开(公告)号:US20210191041A1

    公开(公告)日:2021-06-24

    申请号:US17126574

    申请日:2020-12-18

    申请人: Magic Leap, Inc.

    IPC分类号: G02B6/132 G02B6/138

    摘要: Methods for singulating an optical waveguide material at a contour include directing a first laser beam onto a first side of the optical waveguide material to generate a first group of perforations in the optical waveguide material. A second laser beam is directed onto a second side of the optical waveguide material to generate a second group of perforations in the optical waveguide material. The second side is opposite the first side. The first group of perforations and the second group of perforations define a perforation zone at the contour. A third laser beam is directed at the perforation zone to singulate the optical waveguide material at the perforation zone.