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公开(公告)号：US4725730A
公开(公告)日：1988-02-16
申请号：US770244
申请日：1985-08-28
摘要： A stereoscopic measuring method and system for measuring the sectional shape of a step formed object such as a semiconductor element carrying a resist and wiring on a wafer. The method and system comprises the steps of means for detecting the images of the step formed object from at least two directions so as to form pictures corresponding to the images detected from different directions, determining the distances D between the upper and lower edges of a step in respective pictures; determining the angles .theta. of inclination of the edge lines with respect to the axis of the pictures, determining the angles of inclination of the standard plane fixed to the step formed object with respect to the viewing directions, and determining, as significant factors of the shape to be determined, the height H and width W of the step formed object.
摘要翻译： 一种立体测量方法和系统，用于测量诸如在晶片上携带抗蚀剂和布线的半导体元件的阶梯形成物体的截面形状。 该方法和系统包括以下步骤：用于从至少两个方向检测阶梯形成物体的图像的装置，以便形成与从不同方向检测到的图像相对应的图像，确定步骤的上边缘和下边缘之间的距离D 在各自的图片; 确定边缘线相对于图像的轴线的倾斜角θ，确定相对于观察方向固定到台阶形成物体的标准平面的倾斜角度，以及确定形状的重要因素 要确定台阶形成物体的高度H和宽度W.
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公开(公告)号：US4733074A
公开(公告)日：1988-03-22
申请号：US852741
申请日：1986-04-16
申请人： Makoto Kato , Tetsuo Yokoyama , Jyuntaro Arima , Shimbu Yamagata , Mikihiko Oi , Toshihiro Furuya
发明人： Makoto Kato , Tetsuo Yokoyama , Jyuntaro Arima , Shimbu Yamagata , Mikihiko Oi , Toshihiro Furuya
摘要： A sample surface structure measuring method using a scanning type electron microscope featured by scanning the sample surface by an electron beam incident from above the sample surface; measuring the amount of the secondary electrons discharged according to the three-dimensional structure of the sample surface by the scanning; and determining the three-dimensional structure of the sample surface from the amount of the secondary electrons measured based on a relation existing between the predetermined three-dimensional structure and the amount of the secondary electrons discharged.
摘要翻译： 使用扫描型电子显微镜的样品表面结构测量方法，其特征在于通过从样品表面上方入射的电子束扫描样品表面; 通过扫描测量根据样品表面的三维结构排出的二次电子的量; 以及根据存在于预定三维结构和二次电子排出量之间的关系测量的二次电子量来确定样品表面的三维结构。
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3.发明授权Apparatus for improving the signal-to-noise ratio of image signals in a scan-type imaging system 失效用于提高扫描型成像系统中的图像信号的信噪比的装置
公开(公告)号：US4912328A
公开(公告)日：1990-03-27
申请号：US241341
申请日：1988-09-07
申请人： Makoto Kato , Tetsuo Yokoyama , Juntaro Arima , Toshihiro Furuya
发明人： Makoto Kato , Tetsuo Yokoyama , Juntaro Arima , Toshihiro Furuya
摘要： An apparatus for improving the signal-to-noise ratio of a scan-type imaging system, in which an image portion which appears virtually periodically or regularly on contiguous scanning lines and a scanning line for which the improvement of signal-to-noise ratio is intended are specified using cursors, the positional differences on the image signal waveforms between the specified scanning line and scanning lines in the specified image portion are detected, and the image signal waveforms in the specified image portion are added by being shifted by the amount of detected positional differences, so that the signal-to-noise ratio of the image signal waveform of the specified scanning line is improved.
摘要翻译： 一种用于提高扫描型成像系统的信噪比的装置，其中在邻近扫描线上实际上周期性地或规则地出现的图像部分和信噪比的改善的扫描线是 使用光标指定的目的，检测指定的图像部分中指定的扫描线和扫描线之间的图像信号波形的位置差异，并且通过移动检测的量来添加指定图像部分中的图像信号波形 位置差异，使得指定扫描线的图像信号波形的信噪比得以改善。
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公开(公告)号：US4835385A
公开(公告)日：1989-05-30
申请号：US76216
申请日：1987-07-22
申请人： Makoto Kato , Tetsuo Yokoyama , Toshihiro Furuya
发明人： Makoto Kato , Tetsuo Yokoyama , Toshihiro Furuya
CPC分类号： G01B15/04
摘要： A method and system for measuring sectional shape to system the sectional shape of a subject on a plane that includes a direction that couples light sources or detectors, relying upon intensities of the same subject taken or irradiated from one direction wherein a calculation is carried out using a function that is not affected by the change of surface material of the subject in order to find a gradient component of a surface element in the direction which couples the light sources or the detectors, and the sectional shape of the subject on a plane that includes the direction coupling the light sources and the surface element, is determined relying upon the gradient component, making it possible to correctly obtain the sectional shape even when there exist different materials on the subject. Distortion in the measured result caused by the shadow of the surface topography is corrected by repeating the procedure; i.e., (1) estimating the shadow produced by the calculated sectional shape, (2) estimating the signals of when the shadow is removed, and (3) calculating the sectional shape from the signals from which effect of the shadow has been removed. Therefore, the sectional shape is obtained correctly even when there exists great unevenness on the surface of the subject.
摘要翻译： 一种用于测量截面形状的方法和系统，以在包括将光源或检测器耦合的方向的平面上依赖于从一个方向拍摄或照射的相同被摄体的强度的平面的系统截面形状，其中使用 不影响被检体的表面材料的变化的功能，以便在耦合光源或检测器的方向上找到表面元件的梯度分量，以及主体的截面形状在包括 根据梯度分量来确定耦合光源和表面元件的方向，使得即使当在对象上存在不同的材料时也可以正确地获得截面形状。 通过重复该过程来校正由表面形貌的阴影引起的测量结果的失真; 即，（1）估计由计算出的截面形状产生的阴影，（2）估计阴影被去除时的信号，以及（3）从已经去除了影子的影响的信号计算截面形状。 因此，即使在被检体的表面上存在大的不均匀性，也能够正确地获得截面形状。
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公开(公告)号：US4817178A
公开(公告)日：1989-03-28
申请号：US852312
申请日：1986-04-15
申请人： Kaoru Momose , Makoto Kato , Tetsuo Yokoyama , Toshihiro Furuya
发明人： Kaoru Momose , Makoto Kato , Tetsuo Yokoyama , Toshihiro Furuya
CPC分类号： G09G5/08 , G06F3/04812 , G06T7/60 , G06T2207/30148
摘要： To measure a line width of a linear portion of a digital image maintaining a precision finer than a picture element, a digital linear cursor pattern represented by digital picture elements is generated, the pattern is inclined with respect to the horizontal direction by an angle which maximizes the measuring precision, and the pattern is fitted to a linear portion to be measured, to thereby measure the width of a line.
摘要翻译： 为了测量数字图像的线性部分的线宽，保持比图像元素更精细的精度，产生由数字图像元素表示的数字线性光标图案，该图案相对于水平方向倾斜一个最大化的角度 测量精度和图案被拟合到待测量的直线部分，从而测量线的宽度。
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公开(公告)号：US4755047A
公开(公告)日：1988-07-05
申请号：US916703
申请日：1986-10-08
申请人： Makoto Kato , Tetsuo Yokoyama , Kaoru Momose , Toshihiro Furuya
发明人： Makoto Kato , Tetsuo Yokoyama , Kaoru Momose , Toshihiro Furuya
IPC分类号： G01B15/00 , G01B11/25 , G01C11/00 , G01Q30/02 , G01Q30/04 , H01J37/22 , H01J37/28 , H04N13/00 , G01B11/00
CPC分类号： G06T7/0057 , G01B11/2545 , H04N13/0207 , H04N13/0253
摘要： Method of determining stereoscopic geometry of an object through photometric stereoscopic measurement with high accuracy. Three or more images of the object picked up in a same fixed direction by varying the state of light sources are derived. Relationships among the images are corrected so that an evaluation function determined by making use of redundancy of the images assumes a minimum value, to thereby prepare a reflectance map to be used in determining orientations of surface elements of the object. Through integration of the orientations, the surface shape of the object is determined. The method is applicable to the image processing in a scanning electron microscope.
摘要翻译： 通过高精度的光度立体测量确定物体的立体几何形状的方法。 导出通过改变光源的状态在相同的固定方向上拾取的对象的三个或更多个图像。 校正图像之间的关系，使得通过利用图像的冗余度确定的评估函数呈现最小值，从而制备用于确定对象的表面元素的取向的反射率图。 通过方向的整合，确定物体的表面形状。 该方法适用于扫描电子显微镜中的图像处理。
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7.发明授权Method of measuring surface topography by using scanning electron microscope, and apparatus therefor 失效使用扫描电子显微镜测量表面形貌的方法及其装置
公开(公告)号：US4912313A
公开(公告)日：1990-03-27
申请号：US275069
申请日：1988-11-22
申请人： Makoto Kato , Koichi Homma , Fuminobu Komura , Toshihiro Furuya
发明人： Makoto Kato , Koichi Homma , Fuminobu Komura , Toshihiro Furuya
摘要： Disclosed is a method and apparatus for measurement of surface topography of a sample by using a scanning electron microscope, in which: secondary electrons released from the sample are detected by detectors which are four or an integral multiple of four in number and which are disposed above the sample to surround the sample; differential coefficients in two directions perpendicularly intersecting each other at the scanning point are obtained from the detected signals; the differential coefficients are successively summing-integrated along the two directions thereby obtaining surface topography of the sample; and at the same time the calculation expression for calculating the surface topography is corrected with the sample table inclined.
摘要翻译： 公开了一种使用扫描电子显微镜测量样品的表面形貌的方法和装置，其中：从样品释放的二次电子被检测器检测，该检测器是四个或四个的整数倍，并且被设置在上面 样品围绕样品; 从检测信号中获得在扫描点处彼此垂直相交的两个方向上的微分系数; 差分系数沿着两个方向连续相加积分，从而获得样品的表面形貌; 并且同时用样本表倾斜来校正用于计算表面形貌的计算表达式。
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公开(公告)号：US4803358A
公开(公告)日：1989-02-07
申请号：US169599
申请日：1988-03-17
申请人： Makoto Kato , Koichi Homma , Fuminobu Komura , Toshihiro Furuya
发明人： Makoto Kato , Koichi Homma , Fuminobu Komura , Toshihiro Furuya
摘要： A scanning electron microscope for scanning the surface of a specimen with an electron beam to detect secondary electrons, backscattered electrons, or X-rays emitted from the specimen, thereby forming an image of the surface of the specimen, is provided with a specimen table capable of making a horizontal movement, a vertical movement a rotating operation and a tilting operation, an arithmetic unit for converting the output of a detector for detecting the secondary electrons, backscattered electrons or X-ray into a digital signal to store the digital signal, and for calculating the amount of each of the horizontal movement, vertical movement, rotating operation and tilting operation of the specimen table, on the basis of the stored information, an indication given from the outside, and others, and a controller for controlling the specimen table on the basis of a calculated value from the arithmetic unit.
摘要翻译： 一种扫描电子显微镜，用于用电子束扫描样品的表面以检测从试样发射的二次电子，背散射电子或X射线，从而形成试样的表面的图像，其具有能够 水平移动的垂直运动，旋转操作和倾斜操作的垂直运动，用于将用于检测二次电子的检测器的输出，反向散射电子或X射线转换成数字信号以存储数字信号的运算单元，以及 用于根据存储的信息，从外部给出的指示等来计算样本台的水平移动，垂直移动，旋转操作和倾斜操作中的每一个的量，以及用于控制样本表的控制器 基于来自算术单元的计算值。
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公开(公告)号：US5001344A
公开(公告)日：1991-03-19
申请号：US390731
申请日：1989-08-08
申请人： Makoto Kato , Koichi Homma , Fuminobu Komura , Toshihiro Furuya , Shinobu Otsuka
发明人： Makoto Kato , Koichi Homma , Fuminobu Komura , Toshihiro Furuya , Shinobu Otsuka
CPC分类号： H01J37/28
摘要： An image generated by the detected signals of a scanning electron microscope is divided, for example, into a plurality of rectangular small areas with the boundaries parallel to the y-axis. The relative height in the boundary is obtained by conducting one dimensional integration for respectively boundaries. Thereafter, the relative height difference between the boundaries is determined by conducting one dimensional integration for each area in the direction perpendicular to the boundary. Thereby, the surface three dimensional topography having less distortion can be measured, even in case errors are included in the normal distribution which indicates the surface topography of the specimen, by adjusting and determining the height in the area by the interporating operation.
摘要翻译： 由扫描电子显微镜的检测信号产生的图像被划分为多个具有与y轴平行的矩形小区域。 通过对边界进行一维积分获得边界中的相对高度。 此后，通过对垂直于边界的方向上的每个区域进行一维积分来确定边界之间的相对高度差。 因此，即使在表示样本的表面形貌的正态分布中包含错误的情况下，也可以通过调整和确定通过交错操作确定该区域的高度，来测量具有较小失真的表面三维形貌。
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公开(公告)号：US09447237B2
公开(公告)日：2016-09-20
申请号：US14123296
申请日：2012-05-21
申请人： Makoto Kato , Toru Ido , Shizuka Hachiken
发明人： Makoto Kato , Toru Ido , Shizuka Hachiken
CPC分类号： C08G65/08 , C08G65/10 , C08G65/12 , C08G65/266 , C08G65/269 , Y10T428/2982
摘要： The present invention relates to a production method of polyalkylene oxide particles including a step of forming the polyalkylene oxide particles by polymerization of an alkylene oxide in a polymerization solution containing a polymerization solvent and a catalyst dispersed in the polymerization solvent. The average particle diameter of the catalyst is 25 μm or less.
摘要翻译： 本发明涉及聚环氧烷颗粒的制造方法，其包括通过在聚合溶剂和分散在聚合溶剂中的催化剂的聚合溶液中聚合烯化氧来形成聚环氧烷颗粒的步骤。 催化剂的平均粒径为25μm以下。
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