DEVICE AND PROCESS OF FORMING DEVICE WITH PRE-PATTERNED TRENCH AND GRAPHENE-BASED DEVICE STRUCTURE FORMED THEREIN
    10.
    发明申请
    DEVICE AND PROCESS OF FORMING DEVICE WITH PRE-PATTERNED TRENCH AND GRAPHENE-BASED DEVICE STRUCTURE FORMED THEREIN 有权
    具有预先形成的TRENCH和基于石墨的器件结构形成器件的器件和工艺

    公开(公告)号:US20100051960A1

    公开(公告)日:2010-03-04

    申请号:US12201851

    申请日:2008-08-29

    IPC分类号: H01L29/16 H01L21/04

    摘要: A graphene-based device is formed with a trench in one or more layers of material, a graphene layer within the trench, and a device structure on the graphene layer and within the trench. Fabrication techniques includes forming a trench defined by one or more layers of material, forming a graphene layer within the trench, and forming a device structure on the graphene layer and within the trench.

    摘要翻译: 基于石墨烯的器件形成有一层或多层材料中的沟槽,沟槽内的石墨烯层,以及石墨烯层和沟槽内的器件结构。 制造技术包括形成由一层或多层材料限定的沟槽,在沟槽内形成石墨烯层,并在石墨烯层和沟槽内形成器件结构。