公开(公告)号：US09032990B2

公开(公告)日：2015-05-19

申请号：US13441371

申请日：2012-04-06

申请人： Marcel E. Josephson ,  David K. Carlson ,  Steve Jumper ,  Errol Antonio C. Sanchez

发明人： Marcel E. Josephson ,  David K. Carlson ,  Steve Jumper ,  Errol Antonio C. Sanchez

IPC分类号： F16L35/00 ,  G05D7/06

CPC分类号： G05D7/0641 ,  Y10T137/4259 ,  Y10T137/6416 ,  Y10T137/7043 ,  Y10T137/8593

摘要： Embodiments of chemical delivery systems disclosed herein may include an enclosure; a first compartment disposed within the enclosure and having a plurality of first conduits to carry a first set of chemical species, the first compartment further having a first draw opening and a first exhaust opening to facilitate flow of a purge gas through the first compartment; and a second compartment disposed within the enclosure and having a plurality of second conduits to carry a second set of chemical species, the second compartment further having a second draw opening and a second exhaust opening to facilitate flow of the purge gas through the second compartment, wherein the first set of chemical species is different than the second set of chemical species, and wherein a draw velocity of the purge gas through the second compartment is higher than the draw velocity of the purge gas through the first compartment.

摘要翻译： 本文公开的化学品递送系统的实施例可以包括外壳; 设置在所述外壳内并具有多个第一导管以承载第一组化学物质的第一隔室，所述第一隔室还具有第一抽吸开口和第一排气口，以促进吹扫气体流过所述第一隔室; 以及设置在所述外壳内并且具有多个第二导管以携带第二组化学物质的第二隔室，所述第二隔室还具有第二牵引开口和第二排气口，以促进所述吹扫气体流过所述第二隔室， 其中所述第一组化学物质不同于所述第二组化学物质，并且其中通过所述第二隔室的吹扫气体的抽吸速度高于通过所述第一隔室的吹扫气体的抽吸速度。

公开(公告)号：US20080063798A1

公开(公告)日：2008-03-13

申请号：US11847158

申请日：2007-08-29

申请人： Shreyas Kher ,  Son Nguyen ,  Pravin Narwankar ,  Sanjeev Tandon ,  Steve Jumper ,  Vincent Sermona

发明人： Shreyas Kher ,  Son Nguyen ,  Pravin Narwankar ,  Sanjeev Tandon ,  Steve Jumper ,  Vincent Sermona

IPC分类号： C23C16/22

CPC分类号： C23C16/4404 ,  C23C16/34 ,  C23C16/405 ,  C23C16/45544 ,  C23C16/45553 ,  C23C16/45561 ,  C23C16/45582

摘要： The present invention generally comprises an apparatus for depositing high k dielectric or metal gate materials in which toxic, flammable, or pyrophoric precursors may be used. Exhaust conduits may be placed on the liquid precursor or solid precursor delivery cabinet, the gas panel, and the water vapor generator area. The exhaust conduits permit a technician to access the apparatus without undue exposure to toxic, pyrophoric, or flammable gases that may collect within the liquid deliver cabinet, gas panel, and water vapor generator area.

摘要翻译： 本发明通常包括用于沉积高k电介质或金属栅极材料的装置，其中可以使用有毒的，易燃的或发火的前体。 排气管可以放置在液体前体或固体前体输送柜，气体面板和水蒸气发生器区域上。 排气管道允许技术人员访问设备，而不会过度暴露于可能在液体输送柜，气体面板和水蒸汽发生器区域内收集的有毒，自燃或可燃气体。