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公开(公告)号：US20100068054A1
公开(公告)日：2010-03-18
申请号：US12311233
申请日：2007-07-27
IPC分类号： F04D29/046
CPC分类号： F04D17/168
摘要： A vacuum pump comprises a housing, a drive shaft supported by a beating arrangement for rotation relative to the housing about an axis, and a pumping mechanism comprising a stator component mounted on the housing and a disk-shaped rotor component mounted on the drive shaft axially proximate the stator component. The bearing arrangement comprises a bearing supported in both radial and axial directions by a resilient support, comprising inner and outer annular portions connected by a plurality of flexible members, so that there is a fixed relation between the inner race of the bearing and the outer portion of the resilient support to determine the axial clearance between the rotor and stator components of the pumping mechanism.
摘要翻译： 真空泵包括壳体，由轴承装置支撑的驱动轴，用于围绕轴线相对于壳体旋转;以及泵送机构，其包括安装在壳体上的定子部件和轴向安装在驱动轴上的盘形转子部件 靠近定子部件。 轴承装置包括通过弹性支撑件在径向和轴向方向上支撑的轴承，包括通过多个柔性构件连接的内部和外部环形部分，使得在轴承的内圈与外部部分之间存在固定的关系 以确定泵送机构的转子和定子部件之间的轴向间隙。
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公开(公告)号：US08851829B2
公开(公告)日：2014-10-07
申请号：US12522317
申请日：2008-01-09
IPC分类号： F04D29/059 , F04D19/04 , F16C27/04 , F16C19/16 , F04D29/66
CPC分类号： F16C27/04 , F04D19/042 , F04D29/0462 , F04D29/049 , F04D29/059 , F04D29/601 , F04D29/668 , F16C19/06 , F16C19/163 , F16C2360/45 , Y10T29/49245
摘要： A pump insert (50) for supporting a rotor (14) of a pump comprises an annular resilient support (52) for engaging the body (26) of the pump, the support (52) extending about a rolling bearing (10) having an inner race (12) for engaging the rotor (14), an axially preloaded outer race (16) fixed to the support (52), and a plurality of rolling elements (18) located between the races. During assembly, the rolling bearing (10) can be accurately positioned within the support (52) so that there is a very low tolerance stack-up when the insert (50) is fitted to the rotor (14). Consequently, the position of the rotor (14) will hardly change, if at all, when the rolling bearing (10) is replaced during servicing of the pump.
摘要翻译： 用于支撑泵的转子（14）的泵插入件（50）包括用于接合泵的主体（26）的环形弹性支撑件（52），所述支撑件（52）围绕滚动轴承（10）延伸，所述滚动轴承 用于接合转子（14）的内座圈（12），固定到支撑件（52）的轴向预加载的外座圈（16）和位于座圈之间的多个滚动元件（18）。 在组装期间，滚动轴承（10）可以精确地定位在支撑件（52）内，使得当插入件（50）装配到转子（14）时存在非常低的公差叠加。 因此，当在维修泵期间更换滚动轴承（10）时，转子（14）的位置几乎不会改变。
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公开(公告)号：US08662841B2
公开(公告)日：2014-03-04
申请号：US12311233
申请日：2007-07-27
IPC分类号： F01D25/16
CPC分类号： F04D17/168
摘要： A vacuum pump comprises a housing, a drive shaft supported by a beating arrangement for rotation relative to the housing about an axis, and a pumping mechanism comprising a stator component mounted on the housing and a disk-shaped rotor component mounted on the drive shaft axially proximate the stator component. The bearing arrangement comprises a bearing supported in both radial and axial directions by a resilient support, comprising inner and outer annular portions connected by a plurality of flexible members, so that there is a fixed relation between the inner race of the bearing and the outer portion of the resilient support to determine the axial clearance between the rotor and stator components of the pumping mechanism.
摘要翻译： 真空泵包括壳体，由轴承装置支撑的驱动轴，用于围绕轴线相对于壳体旋转;以及泵送机构，其包括安装在壳体上的定子部件和轴向安装在驱动轴上的盘形转子部件 靠近定子部件。 轴承装置包括通过弹性支撑件在径向和轴向方向上支撑的轴承，包括通过多个柔性构件连接的内部和外部环形部分，使得在轴承的内圈与外部部分之间存在固定的关系 以确定泵送机构的转子和定子部件之间的轴向间隙。
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公开(公告)号：US20120201696A1
公开(公告)日：2012-08-09
申请号：US13500210
申请日：2010-09-09
申请人： Martin Ernst Tollner
发明人： Martin Ernst Tollner
IPC分类号： F04B23/08
CPC分类号： F04D19/042 , F04D17/168 , F04D19/044 , F04D19/046
摘要： The present invention provides a vacuum pump (10) which comprises a turbo-molecular pumping mechanism (12) in series with a Siegbahn pumping mechanism (14). A first pump inlet (16) is provided through which gas can pass through both the turbo-molecular pumping mechanism and the Siegbahn pumping mechanism. Additionally, an inter-stage (inlet 18) is provided through which gas can enter the pump at a location between the turbo-molecular pumping mechanism and the Siegbahn pumping mechanism and pass only through the Siegbahn pumping mechanism. There are flow channels (52, 62) in a first plurality of stages (32, 34) of the Siegbahn pumping mechanism which are in fluid communication with the inter-stage inlet (18) and gas entering the pump through the inter-stage inlet is pumped in parallel along said flow channels.
摘要翻译： 本发明提供一种真空泵（10），其包括与Siegbahn泵送机构（14）串联的涡轮分子泵送机构（12）。 提供了第一泵入口（16），气体可以通过该第一泵入口通过涡轮分子泵送机构和Siegbahn泵送机构。 此外，提供了一个级间（入口18），气体可以在涡轮分子泵送机构和Siegbahn泵送机构之间的位置进入泵，并且仅通过Siegbahn泵送机构。 在Siegbahn泵送机构的第一多个级（32,34）中存在与级间入口（18）流体连通的流动通道（52,62），并且通过级间入口进入泵的气体 沿着所述流动通道并联泵送。
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公开(公告)号：US08070459B2
公开(公告)日：2011-12-06
申请号：US10586200
申请日：2005-01-14
申请人： Martin Ernst Tollner
发明人： Martin Ernst Tollner
CPC分类号： G05D16/208
摘要： The present invention relates to a method of setting the pressure in a chamber of a vacuum system to a required pressure, the system comprising a pressure control system including a pump for evacuating gas from the chamber and a flow controller for allowing the flow of gas into the chamber, the method comprising setting an initial flow into and/or out of the chamber for achieving a pressure above the required pressure so as to increase the rate of pressure increase, the initial flow occurring over a transient period which does not allow the pressure to exceed the required pressure, and setting a preset flow into and/or out of the chamber after the transient period has elapsed for achieving and maintaining the required pressure.
摘要翻译： 本发明涉及将真空系统的腔室中的压力设定为所需压力的方法，该系统包括压力控制系统，该压力控制系统包括用于从腔室排出气体的泵和用于允许气体流入的流量控制器 该方法包括将初始流量设定到和/或离开室以获得高于所需压力的压力，以便增加压力增加率，在不允许压力的过渡期间发生初始流量 超过所需的压力，并且在经过了用于实现和保持所需压力的过渡时间之后，将预设流量设置到和/或离开室。
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6.发明授权Apparatus for controlling the pressure in a process chamber and method of operating same 有权用于控制处理室中的压力的装置及其操作方法公开(公告)号：US07814922B2
公开(公告)日：2010-10-19
申请号：US10503280
申请日：2003-06-20
申请人： Martin Ernst Tollner
发明人： Martin Ernst Tollner
CPC分类号： G05D16/2073 , F04C18/0207 , F04C23/005 , F04C25/02 , F04C2220/12 , F04C2220/30 , F04D19/04 , F04D27/0253 , Y10T137/0379 , Y10T137/0396 , Y10T137/86083 , Y10T137/86139
摘要： A method of operating apparatus for controlling the pressure in a process chamber (10), the apparatus comprising a first pump unit (14) having an inlet in fluid connection with an outlet of said process chamber, and a second pump unit (16) having an inlet in fluid connection with an outlet of the first pump unit via a flow control unit (18) comprising a variable flow control device (20; 28) having variable conductance for controlling outlet fluid pressure at the outlet of the first pump unit, the method comprises controlling speed of the first pump unit to increase the range of chamber pressures over which control of the outlet fluid pressure produces changes in said chamber pressure without exceeding the thermal limit and/or motor stall limit of the first pump unit.
摘要翻译： 一种用于控制处理室（10）中的压力的操作装置的方法，所述装置包括具有与所述处理室的出口流体连通的入口的第一泵单元（14）和具有与所述处理室的出口流体连接的第一泵单元（16） 经由流量控制单元（18）与第一泵单元的出口流体连接的入口包括具有可变电导的可变流量控制装置（20; 28），用于控制第一泵单元出口处的出口流体压力， 方法包括控制第一泵单元的速度以增加室压力的范围，在该范围内，出口流体压力的控制产生所述室压力的变化，而不超过第一泵单元的热限制和/或电动机失速极限。
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公开(公告)号：US20100135784A1
公开(公告)日：2010-06-03
申请号：US12522317
申请日：2008-01-09
IPC分类号： F04D29/049 , F16C27/04 , B23P11/00
CPC分类号： F16C27/04 , F04D19/042 , F04D29/0462 , F04D29/049 , F04D29/059 , F04D29/601 , F04D29/668 , F16C19/06 , F16C19/163 , F16C2360/45 , Y10T29/49245
摘要： A pump insert (50) for supporting a rotor (14) of a pump comprises an annular resilient support (52) for engaging the body (26) of the pump, the support (52) extending about a rolling bearing (10) having an inner race (12) for engaging the rotor (14), an axially preloaded outer race (16) fixed to the support (52), and a plurality of rolling elements (18) located between the races. During assembly, the rolling bearing (10) can be accurately positioned within the support (52) so that there is a very low tolerance stack-up when the insert (50) is fitted to the rotor (14). Consequently, the position of the rotor (14) will hardly change, if at all, when the rolling bearing (10) is replaced during servicing of the pump.
摘要翻译： 用于支撑泵的转子（14）的泵插入件（50）包括用于接合泵的主体（26）的环形弹性支撑件（52），所述支撑件（52）围绕具有 用于接合转子（14）的内座圈（12），固定到支撑件（52）的轴向预加载的外座圈（16）和位于座圈之间的多个滚动元件（18）。 在组装期间，滚动轴承（10）可以精确地定位在支撑件（52）内，使得当插入件（50）装配到转子（14）时存在非常低的公差叠加。 因此，当在维修泵期间更换滚动轴承（10）时，转子（14）的位置几乎不会改变。
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公开(公告)号：US09309892B2
公开(公告)日：2016-04-12
申请号：US13500210
申请日：2010-09-09
申请人： Martin Ernst Tollner
发明人： Martin Ernst Tollner
IPC分类号： F04D19/04
CPC分类号： F04D19/042 , F04D17/168 , F04D19/044 , F04D19/046
摘要： The present invention provides a vacuum pump (10) which comprises a turbo-molecular pumping mechanism (12) in series with a Siegbahn pumping mechanism (14). A first pump inlet (16) is provided through which gas can pass through both the turbo-molecular pumping mechanism and the Siegbahn pumping mechanism. Additionally, an inter-stage (inlet 18) is provided through which gas can enter the pump at a location between the turbo-molecular pumping mechanism and the Siegbahn pumping mechanism and pass only through the Siegbahn pumping mechanism. There are flow channels (52, 62) in a first plurality of stages (32, 34) of the Siegbahn pumping mechanism which are in fluid communication with the inter-stage inlet (18) and gas entering the pump through the inter-stage inlet is pumped in parallel along said flow channels.
摘要翻译： 本发明提供了一种真空泵（10），其包括与Siegbahn泵送机构（14）串联的涡轮分子泵送机构（12）。 提供了第一泵入口（16），气体可以通过该第一泵入口通过涡轮分子泵送机构和Siegbahn泵送机构。 此外，提供了一个级间（入口18），气体可以在涡轮分子泵送机构和Siegbahn泵送机构之间的位置进入泵，并且仅通过Siegbahn泵送机构。 在Siegbahn泵送机构的第一多个级（32,34）中存在与级间入口（18）流体连通的流动通道（52,62），并且通过级间入口进入泵的气体 沿着所述流动通道并联泵送。
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公开(公告)号：US20100104428A1
公开(公告)日：2010-04-29
申请号：US12311225
申请日：2007-07-25
CPC分类号： F04D17/168
摘要： A vacuum pump comprises a drive shaft and a Siegbahn pumping mechanism. The Siegbahn pumping mechanism comprises a rotor element located on the drive shaft and an annular stator element located about the drive shaft and proximate the rotor element, the stator element comprising a plurality of walls extending towards the rotor element and defining a plurality of spiral channels. The stator element comprises a plurality of sections, with means such as a resilient member being located about the sections to urge the sections together, and thereby inhibit gas leakage between the sections of the stator element. The resilient member can also form a seal between the stator sections and a casing located about the pumping mechanism.
摘要翻译： 真空泵包括驱动轴和Siegbahn泵送机构。 Siegbahn泵送机构包括位于驱动轴上的转子元件和围绕驱动轴并且靠近转子元件定位的环形定子元件，定子元件包括朝向转子元件延伸并限定多个螺旋通道的多个壁。 定子元件包括多个部分，其中诸如弹性部件的装置围绕部分定位以将部分推动在一起，从而阻止定子元件的部分之间的气体泄漏。 弹性构件还可以在定子部分和围绕泵送机构的壳体之间形成密封。
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