公开(公告)号：US20080210379A1

公开(公告)日：2008-09-04

申请号：US12016607

申请日：2008-01-18

申请人： Masaaki MIYAGAWA ,  Eiichi Nishimura

发明人： Masaaki MIYAGAWA ,  Eiichi Nishimura

IPC分类号： H01L21/3065

CPC分类号： H01J37/32642 ,  H01J37/32623

摘要： A substrate processing apparatus that can reliably improve the efficiency of heat transfer between a focus ring and a mounting stage. A housing chamber with the interior thereof evacuated houses a substrate. The substrate is mounted on a mounting stage that is disposed in the housing chamber. An annular focus ring is mounted on the mounting stage such as to surround a peripheral portion of the mounted substrate. A heat transfer film is formed on a surface of the focus ring which contacts the mounting stage by printing processing.

摘要翻译： 一种能够可靠地提高聚焦环和安装台之间的热传递效率的基板处理装置。 其内部抽真空的容纳室容纳衬底。 基板安装在设置在壳体室中的安装台上。 环形聚焦环安装在安装台上，以便围绕安装的基板的周边部分。 在通过打印处理接触安装台的聚焦环的表面上形成传热膜。

公开(公告)号：US20080236746A1

公开(公告)日：2008-10-02

申请号：US12057827

申请日：2008-03-28

申请人： Jun OYABU ,  Masaaki MIYAGAWA

发明人： Jun OYABU ,  Masaaki MIYAGAWA

IPC分类号： H01L21/306

CPC分类号： H01J37/32642 ,  H01J37/32623

摘要： A substrate processing apparatus that can prevent a heat transfer sheet from becoming attached to a focus ring mounting surface of a substrate mounting stage. The substrate mounting stage is disposed in a housing chamber of the substrate processing apparatus, and a substrate is mounted on the substrate mounting stage. A focus ring that surrounds a peripheral portion of the mounted substrate is mounted on the focus ring mounting surface. The heat transfer sheet is interposed between the focus ring and the focus ring mounting surface, and a fluorine coating is formed on the focus ring mounting surface.

摘要翻译： 一种能够防止热转印片附着到基板安装台的聚焦环安装面的基板处理装置。 基板安装台设置在基板处理装置的收容室中，基板安装在基板安装台上。 围绕安装的基板的周边部分的聚焦环安装在聚焦环安装表面上。 传热片介于聚焦环和聚焦环安装面之间，在聚焦环安装面上形成氟涂层。

公开(公告)号：US20080239691A1

公开(公告)日：2008-10-02

申请号：US12055633

申请日：2008-03-26

申请人： Masaaki MIYAGAWA ,  Akihiro YOSHIMURA

发明人： Masaaki MIYAGAWA ,  Akihiro YOSHIMURA

IPC分类号： H05K7/02 ,  F28F7/00

CPC分类号： H01L21/67103 ,  H01J37/32091 ,  H01J37/32642 ,  H01J2237/2001 ,  H01L21/67005 ,  H01L21/67069 ,  H01L21/68735

摘要： A thermally conductive sheet is used between a mounting table for mounting thereon a target substrate and an annular focus ring mounted on the mounting table to surround a circumferential peripheral portion of the target substrate. Further, the mounting table includes therein a cooling unit and is disposed in a depressurized accommodating chamber for accommodating therein the target substrate. The thermally conductive sheet has a non-adhesive layer on each of one or more surfaces thereof.

摘要翻译： 在用于安装目标基板的安装台和安装在安装台上的环形聚焦环之间使用导热片以包围目标基板的圆周周边部分。 此外，安装台包括冷却单元，并且设置在减压容纳室中，用于容纳目标基板。 导热片在其一个或多个表面中的每一个上具有非粘性层。

公开(公告)号：US20080166894A1

公开(公告)日：2008-07-10

申请号：US11970612

申请日：2008-01-08

申请人： Masaaki MIYAGAWA ,  Akihiro Yoshimura

发明人： Masaaki MIYAGAWA ,  Akihiro Yoshimura

IPC分类号： H01L21/00

CPC分类号： H01L21/6831 ,  H01L21/67103

摘要： A focus ring heat transfer method improves heat transfer of a focus ring arranged in an outer peripheral portion of a mounting surface of a mounting table adapted to mount a target substrate in a chamber. The method includes steps of: disposing a heat transfer sheet between the focus ring and the mounting table; and vacuum-evacuating the chamber prior to processing the target substrate and then restoring the pressure the inside of the chamber to an atmospheric pressure or a light vacuum pressure. Therefore, air present in a fine gap between the heat transfer sheet and the mounting surface is removed to allow the heat transfer sheet to adhere to the mounting surface.

摘要翻译： 聚焦环传热方法改善了布置在适于将目标基板安装在室中的安装台的安装表面的外周部分中的聚焦环的热传递。 该方法包括以下步骤：在聚焦环和安装台之间设置传热片; 并且在处理目标基板之前对腔室进行真空抽真空，然后将腔室内部的压力恢复到大气压力或轻的真空压力。 因此，除去传热片与安装面之间的微细间隙的空气，使传热片粘附在安装面上。