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    PLASMA PROCESSING APPARATUS
    1.
    发明申请
    PLASMA PROCESSING APPARATUS 审中-公开
    等离子体加工设备

    公开(公告)号：US20090282817A1

    公开(公告)日：2009-11-19

    申请号：US12435086

    申请日：2009-05-04

    申请人： Masaaki Masuda ,  Yukio Miyairi ,  Michio Takahashi

    发明人： Masaaki Masuda ,  Yukio Miyairi ,  Michio Takahashi

    IPC分类号： F01N3/20 ,  F01N3/28

    CPC分类号： F01N3/0892 ,  B01D53/32 ,  B01D53/925 ,  B01D2259/818 ,  F01N3/2828 ,  F01N13/0097 ,  F01N2340/00 ,  F01N2340/02 ,  H01J37/32541 ,  H01J37/32825 ,  H05H1/48 ,  H05H2001/483 ,  H05H2245/1215

    摘要： A plasma processing apparatus includes a main body that has an inlet for a purification target gas and an outlet for a purified gas, an insulator honeycomb that includes a plurality of cells that are partitioned by a partition wall and serve as gas passages, a conductor honeycomb that is disposed to be able to transmit heat to the insulator honeycomb, a discharge electrode that is disposed opposite to the conductor honeycomb and forms a pair of electrodes with the conductor honeycomb, and a pulse power supply that applies a pulse voltage between the pair of electrodes, the insulator honeycomb, the conductor honeycomb, and the discharge electrode being disposed in an inner space of the main body. The plasma processing apparatus generates plasma by applying a pulse voltage to promote purification of the purification target gas in the insulator honeycomb by utilizing heat generated by plasma.

    摘要翻译： 一种等离子体处理装置，包括：具有净化对象气体的入口和净化气体的出口的主体;绝缘体蜂窝体，具有由分隔壁分隔并作为气体通路的多个单元，导体蜂窝体 被配置为能够将热量传递到绝缘体蜂窝体，放电电极，其与导体蜂窝体相对设置并与导体蜂窝体形成一对电极;以及脉冲电源，其在一对 电极，绝缘体蜂窝，导体蜂窝，放电电极设置在主体的内部空间中。 等离子体处理装置通过施加脉冲电压来产生等离子体，以通过利用由等离子体产生的热促进净化目标气体在绝缘蜂窝中的净化。

    Plasma generating electrode and plasma reactor
    2.
    发明授权
    Plasma generating electrode and plasma reactor 失效
    等离子发生电极和等离子体反应器

    公开(公告)号：US07727488B2

    公开(公告)日：2010-06-01

    申请号：US10562467

    申请日：2004-07-07

    申请人： Yukio Miyairi ,  Yasumasa Fujioka ,  Masaaki Masuda ,  Takeshi Sakuma

    发明人： Yukio Miyairi ,  Yasumasa Fujioka ,  Masaaki Masuda ,  Takeshi Sakuma

    IPC分类号： B01J19/08

    CPC分类号： B01D53/92 ,  B01D53/56 ,  B01D53/62 ,  B01J19/088 ,  B01J2219/0813 ,  B01J2219/0835 ,  B01J2219/0843 ,  B01J2219/0875 ,  F01N3/0892

    摘要： A plasma generating electrode 1 of the present invention includes two or more electrodes 2 disposed to face each other, and holding members 3 for holding electrodes 2 at a predetermined interval, and can generate plasma by applying voltage between electrodes 2. At least one of electrodes facing each other 2 has a plate-shaped ceramic body 6 serving as a dielectric body, and a conductive film 7 disposed inside the body 6, and the holding members 3 fix the opposite side end portions 5 (fixed end portions 5a) of electrodes facing each other 2 in the state of a cantilever in such a condition that electrodes 2 are held by holding members in the state of cantilevers of the different directions alternately at a predetermined interval as a whole. This relaxes the thermal stress and effectively prevents distortion and breakage of electrodes caused by to a temperature change.

    摘要翻译： 本发明的等离子体发生电极1包括彼此相对设置的两个或更多个电极2和用于以预定间隔保持电极2的保持构件3，并且可以通过在电极2之间施加电压来产生等离子体。至少一个电极 彼此相对的是具有作为电介质体的板状陶瓷体6和配置在主体6内部的导电膜7，保持部件3将电极的相对侧端部5（固定端部5a） 彼此以悬臂的状态彼此2，在这样的状态下，电极2由整体上以预定间隔交替地以不同方向的悬臂状态的保持构件保持。 这样放松了热应力，并有效地防止了由温度变化引起的电极的变形和断裂。

    Apparatus and method of treating exhaust gas
    3.
    发明授权
    Apparatus and method of treating exhaust gas 失效
    废气处理设备及方法

    公开(公告)号：US07700051B2

    公开(公告)日：2010-04-20

    申请号：US10562597

    申请日：2004-06-25

    申请人： Yukio Miyairi ,  Yasumasa Fujioka ,  Masaaki Masuda ,  Tatsuhiko Hatano ,  Takeshi Sakuma ,  Yuuichiro Imanishi ,  Keizo Iwama ,  Kenji Dosaka

    发明人： Yukio Miyairi ,  Yasumasa Fujioka ,  Masaaki Masuda ,  Tatsuhiko Hatano ,  Takeshi Sakuma ,  Yuuichiro Imanishi ,  Keizo Iwama ,  Kenji Dosaka

    IPC分类号： B01J19/08

    CPC分类号： B01D53/32 ,  B01D53/92 ,  B01D2259/818 ,  B01J19/088 ,  B01J2219/0813 ,  B01J2219/0826 ,  B01J2219/0835 ,  B01J2219/0843 ,  B01J2219/0883 ,  B01J2219/0892 ,  B01J2219/0898 ,  F01N3/0892

    摘要： An exhaust gas treating apparatus 1 includes; a case body 2 and a plasma producing means 3 capable of producing plasma inside the case body 2 and treats the substances to be treated contained in the exhaust gas by the plasma producing means 3. The plasma producing means 3 has one or more each of a pulse electrode 4 and a ground electrode 5 that are oppositely disposed in the case body 2 and has a pulse power source 6 capable of feeding a pulse current to the pulse electrode 4 by switching frequency and/or voltage for different values at predetermined time intervals. The substances to be treated contained in the exhaust gas can selectively be treated by switching frequency and/or voltage value for different values at predetermined time intervals so that plasma of a kind adequate for the substances to be treated contained in an exhaust gas is produced between the pulse electrode 4 and the ground electrode 5.

    摘要翻译： 废气处理装置1包括： 壳体2和等离子体产生装置3，其能够在壳体2内产生等离子体，并且通过等离子体产生装置3处理废气中包含的待处理物质。等离子体产生装置3具有一个或多个 脉冲电极4和接地电极5，其相对地设置在壳体2中，并且具有脉冲电源6，能够以预定的时间间隔切换不同值的频率和/或电压，脉冲电源6向脉冲电极4供给脉冲电流。 可以通过以预定的时间间隔切换不同值的频率和/或电压值来选择性地处理废气中包含的待处理物质，使得在废气中包含的待处理物质的等离子体在 脉冲电极4和接地电极5。

    Plasma generating electrode, plasma generation device, and exhaust gas purifying device
    4.
    发明授权
    Plasma generating electrode, plasma generation device, and exhaust gas purifying device 失效
    等离子体发生电极，等离子体产生装置和废气净化装置

    公开(公告)号：US07638103B2

    公开(公告)日：2009-12-29

    申请号：US10560858

    申请日：2004-06-18

    申请人： Masanobu Miki ,  Kenji Dosaka ,  Yukio Miyairi ,  Yasumasa Fujioka ,  Masaaki Masuda ,  Tatsuhiko Hatano ,  Takeshi Sakuma ,  Yuuichiro Imanishi

    发明人： Masanobu Miki ,  Kenji Dosaka ,  Yukio Miyairi ,  Yasumasa Fujioka ,  Masaaki Masuda ,  Tatsuhiko Hatano ,  Takeshi Sakuma ,  Yuuichiro Imanishi

    IPC分类号： B01J19/08

    CPC分类号： H01J37/3244 ,  F01N3/0892 ,  F01N13/009 ,  F01N2240/28 ,  H01J37/32844 ,  H05H1/2406 ,  H05H2001/2418 ,  Y02C20/30

    摘要： A plasma generating electrode 1 of the invention includes at least a pair of electrodes 5, at least one electrode 5a of the pair of electrodes 5 including a plate-like ceramic body 2 as a dielectric and a plurality of conductive films 3 disposed in the ceramic body 2 and each having a plurality of through-holes 4 formed through the conductive film 3 in its thickness direction in a predetermined arrangement pattern, the through-holes 4 having a cross-sectional shape including an arc shape along a plane perpendicular to the thickness direction, an arrangement pattern of the through-holes 4a formed in at least one conductive film 3a being different from an arrangement pattern of the through-holes 4b formed in the other conductive film 3b. The plasma generating electrode 1 is capable of simultaneously generating different states of plasma upon application of voltage between the pair of electrodes 5 due to the different arrangement patterns of the through-holes 4 in the conductive films 3.

    摘要翻译： 本发明的等离子体发生电极1至少包括一对电极5，一对电极5的至少一个电极5a包括作为电介质的板状陶瓷体2和设置在陶瓷中的多个导电膜3 主体2，并且每个具有以预定布置图案在其厚度方向上穿过导电膜3形成的多个通孔4，所述通孔4具有沿垂直于厚度的平面的包括弧形的横截面形状 形成在至少一个导电膜3a中的通孔4a的布置图形与形成在另一个导电膜3b中的通孔4b的布置图案不同。 等离子体产生电极1由于导电膜3中的通孔4的不同布置图案而能够在施加一对电极5之间的电压的同时产生不同的等离子体状态。

    Plasma generating electrode and plasma reactor
    10.
    发明授权
    Plasma generating electrode and plasma reactor 失效
    等离子发生电极和等离子体反应器

    公开(公告)号：US07771673B2

    公开(公告)日：2010-08-10

    申请号：US10561841

    申请日：2004-06-25

    申请人： Yukio Miyairi ,  Yasumasa Fujioka ,  Masaaki Masuda ,  Takeshi Sakuma ,  Tatsuhiko Hatano ,  Yoshihiro Sato ,  Junichi Suzuki

    发明人： Yukio Miyairi ,  Yasumasa Fujioka ,  Masaaki Masuda ,  Takeshi Sakuma ,  Tatsuhiko Hatano ,  Yoshihiro Sato ,  Junichi Suzuki

    IPC分类号： B01J19/08

    CPC分类号： F01N3/0892 ,  B01D53/32 ,  B01D2259/818 ,  B01J19/088 ,  B01J2219/0809 ,  B01J2219/0835 ,  B01J2219/0875 ,  B01J2219/0894 ,  B01J2219/2453 ,  B01J2219/2487 ,  H05H1/2406 ,  H05H2001/2418 ,  H05H2001/2437

    摘要： A plasma generating electrode of the present invention includes a pair of unit electrodes 2, each of the pair of unit electrodes 2 including a plate-like ceramic body 19 and a conductive film 12 disposed inside the ceramic body 19 and including a plurality of protrusions 13 on a front surface, the pair of unit electrodes 2 constituting a basic unit 1 by being hierarchically layered at intervals corresponding to thickness of the protrusion 13 in a state that a plurality of spaces which are open on each end in the arrangement direction of the protrusion are formed, the basic units 1 constituting an electrode unit in which the basic units 1 are hierarchically layered at intervals corresponding to the thickness of the protrusion 13, and the plasma generating electrode being capable of generating plasma in the three-dimensionally arranged spaces V upon application of voltage between the unit electrodes 2 constituting the electrode unit. Therefore, the plasma generating electrode is capable of generating uniform and stable plasma and exhibiting excellent heat resistance.

    摘要翻译： 本发明的等离子体产生电极包括一对单位电极2，每对单元电极2包括板状陶瓷体19和布置在陶瓷体19内部的导电膜12，并且包括多个突起13 在前表面上，构成基本单元1的一对单元电极2通过以与突起13的厚度相对应的间隔对应于在突起的排列方向上的每个端部开口的多个空间的状态而分层地层叠 构成电极单元的基本单元1，其中基本单元1以对应于突起13的厚度的间隔分层地层叠，并且等离子体产生电极能够在三维布置的空间V中产生等离子体 在构成电极单元的单位电极2之间施加电压。 因此，等离子体产生电极能够产生均匀且稳定的等离子体并且表现出优异的耐热性。