LIQUID DISCHARGE HEAD AND METHOD OF MANUFACTURING THE LIQUID DISCHARGE HEAD
    1.
    发明申请
    LIQUID DISCHARGE HEAD AND METHOD OF MANUFACTURING THE LIQUID DISCHARGE HEAD 有权
    液体放电头及液体放电头制造方法

    公开(公告)号:US20100156990A1

    公开(公告)日:2010-06-24

    申请号:US12629238

    申请日:2009-12-02

    IPC分类号: B41J2/14 B23P17/00

    摘要: A liquid discharge head includes an Si substrate which is provided with an element for generating energy used in discharging a liquid and a liquid supply port which is provided to pass through the Si substrate from first surface to rear surface so as to supply a liquid to the element. A method of manufacturing the substrate includes: forming a plurality of concave portions on the rear surface of the Si substrate of which a plane orientation is {100}, the concave portions facing the first surface and aligned in rows along a direction the first surface; and forming a plurality of the supply ports by carrying out a crystal axis anisotropic etching on the Si substrate through the concave portions using an etching liquid of which an etching rate of the {100} plane of the Si substrate is slower than that of the {110} plane of the Si substrate.

    摘要翻译: 液体排出头包括:Si基板,其设置有用于产生用于排出液体的能量的元件和液体供给口,所述液体供给口被设置成从第一表面到后表面穿过Si基板,从而将液体供应到 元件。 一种制造基板的方法包括:在Si基板的背面上形成多个凹部,其中平面取向为{100},凹面朝向第一表面并且沿着<100>方向排成一列 第一表面 并且通过使用其中Si衬底的{100}面的蚀刻速率比{D“的{100}面的蚀刻速度慢的蚀刻液,通过凹部对Si衬底进行晶轴各向异性蚀刻来形成多个供给口, 110}面。

    Liquid discharge head and method of manufacturing a substrate for the liquid discharge head
    2.
    发明授权
    Liquid discharge head and method of manufacturing a substrate for the liquid discharge head 有权
    液体排出头及液体排出头用基板的制造方法

    公开(公告)号:US08366951B2

    公开(公告)日:2013-02-05

    申请号:US12629238

    申请日:2009-12-02

    IPC分类号: G01D15/00

    摘要: A liquid discharge head includes an Si substrate which is provided with an element for generating energy used in discharging a liquid and a liquid supply port which is provided to pass through the Si substrate from a first surface to a rear surface so as to supply a liquid to the element. A method of manufacturing the substrate includes: forming a plurality of concave portions on the rear surface of the Si substrate of which a plane orientation is {100}, the concave portions facing the first surface and aligned in rows along a direction of the Si substrate; and forming a plurality of the liquid supply ports by carrying out a crystal axis anisotropic etching on the Si substrate through the concave portions using an etching liquid of which an etching rate of the {100} plane of the Si substrate is slower than that of the {110} plane of the Si substrate.

    摘要翻译: 液体排出头包括:Si基板,其设置有用于产生用于排出液体的能量的元件;以及液体供给口,其被设置成从第一表面到后表面穿过Si基板,以便供应液体 到元素 制造基板的方法包括:在Si基板的后表面上形成多个凹部,其平面取向为{100},所述凹部面向第一表面并沿着<100> Si衬底; 并且通过使用其中Si衬底的{100}面的蚀刻速率慢于所述Si衬底的蚀刻速率的蚀刻液,通过所述凹部对所述Si衬底进行晶轴各向异性蚀刻来形成多个所述液体供给口 {110}面的Si衬底。

    Ink jet head and method of manufacturing the same
    7.
    发明授权
    Ink jet head and method of manufacturing the same 有权
    喷墨头及其制造方法

    公开(公告)号:US08398212B2

    公开(公告)日:2013-03-19

    申请号:US12635948

    申请日:2009-12-11

    IPC分类号: B41J2/05

    摘要: An ink jet head includes a Si substrate with a surface having a {100} orientation; a passage holding ink on the Si substrate; an ink discharge port which is communicatively connected to the passage and through which ink is ejected; and a supply port which extends through the Si substrate, which is communicatively connected to the passage, and which supplies ink to the passage. The supply port has walls having two {111} planes facing each other.

    摘要翻译: 喷墨头包括具有{100}取向的表面的Si衬底; 在Si衬底上保持油墨的通道; 墨水排出口,其连通地连接到通道并通过其喷射墨水; 以及供应端口,其延伸穿过Si衬底,其通信地连接到通道,并且向通道供应墨水。 供应端口具有彼此面对的两个{111}平面的壁。

    INK JET HEAD AND METHOD OF MANUFACTURING THE SAME
    8.
    发明申请
    INK JET HEAD AND METHOD OF MANUFACTURING THE SAME 有权
    喷墨头及其制造方法

    公开(公告)号:US20100149260A1

    公开(公告)日:2010-06-17

    申请号:US12635948

    申请日:2009-12-11

    IPC分类号: B41J2/135 G11B5/127

    摘要: An ink jet head includes a Si substrate with a surface having a {100} orientation; a passage holding ink on the Si substrate; an ink discharge port which is communicatively connected to the passage and through which ink is ejected; and a supply port which extends through the Si substrate, which is communicatively connected to the passage, and which supplies ink to the passage. The supply port has walls having two {111} planes facing each other.

    摘要翻译: 喷墨头包括具有{100}取向的表面的Si衬底; 在Si衬底上保持油墨的通道; 墨水排出口,其连通地连接到通道并通过其喷射墨水; 以及供应端口,其延伸穿过Si衬底,其通信地连接到通道,并且向通道供应墨水。 供应端口具有彼此面对的两个{111}平面的壁。

    Liquid discharge head manufacturing method, and liquid discharge head obtained using this method
    9.
    发明授权
    Liquid discharge head manufacturing method, and liquid discharge head obtained using this method 失效
    液体排出头的制造方法以及使用该方法得到的排液头

    公开(公告)号:US07629111B2

    公开(公告)日:2009-12-08

    申请号:US10576249

    申请日:2005-06-27

    IPC分类号: B41J2/16

    摘要: A method for manufacturing a liquid discharge head includes the steps of depositing a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid, forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer, forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer formed on the solid layer, and removing the solid layer to form a flow path that communicates with the energy element and the discharge port, whereby a material used for the coating layer contains a cationically polymerizable chemical compound, a cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and whereby a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic anhydride and methacrylate ester.

    摘要翻译: 一种制造液体排出头的方法包括以下步骤:在其上布置能量产生元件的衬底上沉积用于形成流路的固体层,以产生用于排出液体的能量,在衬底上形成固体 层,用于涂覆固体层的涂层,在固体层上形成的涂层中,通过光刻工艺形成用于排出液体的排出口,并除去固体层,形成连通的流路 能量元件和排出口,由此用于涂层的材料含有可阳离子聚合的化合物,阳离子光聚合引发剂和阳离子光聚合抑制剂,由此形成与部分的边界的固体层的材料 其中形成涂层的排出口包含甲基丙烯酸酐和甲基丙烯酸酯的共聚物。