Mesa type thyristor and its making method
    1.
    发明授权
    Mesa type thyristor and its making method 失效
    梅萨式晶闸管及其制作方法

    公开(公告)号:US3961354A

    公开(公告)日:1976-06-01

    申请号:US416799

    申请日:1973-11-19

    摘要: An improved method of manufacturing a mesa type thyristor includes the formation, onto at least one face of a semiconductor substrate of a prescribed conductivity type of a ring or rings, of a deeply diffused region of the same conductivity type or that of the substrate but of a higher impurity concentration. As a result, the ring or rings of the deeply diffused region, surrounding the essential part of the thyristor, are, subsequent to the process of mesa-etching, exposed along the peripheral surface linking both faces of the substrate. The high-doped ring serves to effectively prevent an undesirable inducing of an inversion layer (i.e. channel region) across both surfaces of the substrate.

    摘要翻译: 制造台面型晶闸管的改进方法包括在相同导电类型或基板的深度扩散区域的规定导电类型的环或环的半导体衬底的至少一个面上形成,但是 杂质浓度较高。 结果,围绕晶闸管的主要部分的深扩散区域的环或环是在台面蚀刻过程之后沿着连接基板的两个面的外周表面露出的。 高掺杂环用于有效地防止在衬底的两个表面上不希望地引起反转层(即,沟道区)。