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公开(公告)号：US08113051B2
公开(公告)日：2012-02-14
申请号：US12389056
申请日：2009-02-19
IPC分类号： G01P3/44
CPC分类号： G01C19/56 , G01C19/5719 , G01C19/5726
摘要： An oscillator is oscillated at a predetermined oscillation frequency. A detecting unit exerts Coriolis force on the oscillator. A repetitive control system applies an external force to the oscillator so as to cancel out the Coriolis force to achieve an angular velocity measuring operation at a high sensitivity and a high S/N ratio.
摘要翻译： 振荡器以预定的振荡频率振荡。 检测单元对振荡器施加科里奥利力。 重复控制系统向振荡器施加外力，以抵消科里奥利力，以实现高灵敏度和高S / N比的角速度测量操作。
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公开(公告)号：US08746033B2
公开(公告)日：2014-06-10
申请号：US13126615
申请日：2009-10-21
申请人： Satoshi Asano , Masahiro Matsumoto , Yasushi Okada
发明人： Satoshi Asano , Masahiro Matsumoto , Yasushi Okada
IPC分类号： G01C19/56
CPC分类号： G01C19/5614 , G01C19/5776
摘要： Failures can be detected with high accuracy even the ambient temperature changes or background vibration is applied. An angular velocity sensor is composed of a vibrator which is elastically and displaceably supported on a substrate; a driving means which vibrates the vibrator in the drive axis direction horizontal to the substrate surface; a displacement detecting means in the detection axis direction, which detects a displacement of the vibrator in the detection axis direction horizontal to the substrate surface and perpendicular to the drive axis direction; an angular velocity detecting means which detects an angular velocity based on the displacement of the vibrator in the detection axis direction; a self-vibration detecting means that detects self-vibration of the vibrator, which is generated due to leakage in the detection axis direction of the vibration of the vibrator in the drive axis direction; a self-vibration feedback circuit which completely cancels the self-vibration of the vibrator; and an abnormality determining means which determines abnormality using an output from the self-vibration detecting means.
摘要翻译： 即使环境温度变化或背景振动也可以高精度地检测到故障。 角速度传感器由弹性位移地支撑在基板上的振动器构成; 驱动装置，其使所述振动器沿所述基板面的水平方向的驱动轴方向振动; 位于检测轴方向的位移检测单元，其检测振动体在检测轴方向上与基板表面水平并垂直于驱动轴方向的位移; 角速度检测装置，其基于振动器在检测轴方向上的位移检测角速度; 自动振动检测装置，其检测由于振动器在驱动轴方向的振动的检测轴方向上的泄漏而产生的振动器的自身振动; 自振反馈电路，完全抵消振动器的自振; 以及异常确定装置，其使用来自自动振动检测装置的输出来确定异常。
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公开(公告)号：US20100095769A1
公开(公告)日：2010-04-22
申请号：US12376244
申请日：2006-09-15
申请人： Masahiro Matsumoto , Yasushi Okada , Hisao Sonobe
发明人： Masahiro Matsumoto , Yasushi Okada , Hisao Sonobe
IPC分类号： G01C19/56
CPC分类号： G01C19/5726 , G01C19/5747
摘要： Disclosed herein is an angular velocity measuring device including: first and second oscillators elastically supported on a substrate; an elastic connecting beam elastically connecting the first and the second oscillator; and an oscillating means for oscillating the first and the second oscillator for differential oscillation, wherein a viscous force generating means for suppressing in-phase oscillation of the first and the second oscillator is incorporated into the elastic connecting beam.
摘要翻译： 本文公开了一种角速度测量装置，包括：弹性地支撑在基板上的第一和第二振荡器; 弹性连接梁弹性连接第一和第二振荡器; 以及用于振荡用于差动振荡的第一和第二振荡器的振荡装置，其中用于抑制第一和第二振荡器的同相振荡的粘性力产生装置并入弹性连接梁中。
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公开(公告)号：US20090049909A1
公开(公告)日：2009-02-26
申请号：US12191600
申请日：2008-08-14
申请人： Masahiro Matsumoto , Yasushi Okada , Hisao Sonobe , Heewon Jeong
发明人： Masahiro Matsumoto , Yasushi Okada , Hisao Sonobe , Heewon Jeong
IPC分类号： G01C19/00
CPC分类号： B60T8/3675 , G01C19/5719
摘要： A hydraulic controller including a cabinet, a hydraulic pipe block having a passage, a linearly driving actuator having a piston to open and close the passage in the hydraulic pipe block, a printed wiring board having a circuit for driving the linearly driving actuator, and a vibrating angular velocity sensor having two vibrators which can move in a Coriolis force detection direction orthogonal to vibration directions, wherein the vibrating angular velocity sensor is disposed on the printed wiring board in order that the vibration directions of the vibrators may be substantially parallel to a driving direction of the piston, and that the Coriolis force detection direction may be substantially orthogonal to the driving direction of the piston.
摘要翻译： 一种液压控制器，包括机壳，具有通道的液压管块，具有用于打开和关闭液压管块中的通道的活塞的线性驱动致动器，具有用于驱动线性驱动致动器的电路的印刷线路板，以及 具有两个振动器的振动角速度传感器，所述两个振动器能够以与振动方向正交的科里奥利力检测方向移动，其中振动角速度传感器设置在印刷线路板上，以使得振动器的振动方向可基本上平行于驱动 活塞的方向，科里奥利力检测方向可以与活塞的驱动方向基本正交。
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公开(公告)号：US08302476B2
公开(公告)日：2012-11-06
申请号：US12376244
申请日：2006-09-15
申请人： Masahiro Matsumoto , Yasushi Okada , Hisao Sonobe
发明人： Masahiro Matsumoto , Yasushi Okada , Hisao Sonobe
IPC分类号： G01C19/56
CPC分类号： G01C19/5726 , G01C19/5747
摘要： Disclosed herein is an angular velocity measuring device including: first and second oscillators elastically supported on a substrate; an elastic connecting beam elastically connecting the first and the second oscillator; and an oscillating means for oscillating the first and the second oscillator for differential oscillation, wherein a viscous force generating means for suppressing in-phase oscillation of the first and the second oscillator is incorporated into the elastic connecting beam.
摘要翻译： 本文公开了一种角速度测量装置，包括：弹性地支撑在基板上的第一和第二振荡器; 弹性连接梁弹性连接第一和第二振荡器; 以及用于振荡用于差动振荡的第一和第二振荡器的振荡装置，其中用于抑制第一和第二振荡器的同相振荡的粘性力产生装置并入弹性连接梁中。
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公开(公告)号：US20110252886A1
公开(公告)日：2011-10-20
申请号：US13126615
申请日：2009-10-21
申请人： Satoshi Asano , Masahiro Matsumoto , Yasushi Okada
发明人： Satoshi Asano , Masahiro Matsumoto , Yasushi Okada
IPC分类号： G01C19/56
CPC分类号： G01C19/5614 , G01C19/5776
摘要： Failures can be detected with high accuracy even the ambient temperature changes or background vibration is applied. An angular velocity sensor is composed of a vibrator which is elastically and displaceably supported on a substrate; a driving means which vibrates the vibrator in the drive axis direction horizontal to the substrate surface; a displacement detecting means in the detection axis direction, which detects a displacement of the vibrator in the detection axis direction horizontal to the substrate surface and perpendicular to the drive axis direction; an angular velocity detecting means which detects an angular velocity based on the displacement of the vibrator in the detection axis direction; a self-vibration detecting means that detects self-vibration of the vibrator, which is generated due to leakage in the detection axis direction of the vibration of the vibrator in the drive axis direction; a self-vibration feedback circuit which completely cancels the self-vibration of the vibrator; and an abnormality determining means which determines abnormality using an output from the self-vibration detecting means.
摘要翻译： 即使环境温度变化或背景振动也可以高精度地检测到故障。 角速度传感器由弹性位移地支撑在基板上的振动器构成; 驱动装置，其使所述振动器沿所述基板面的水平方向的驱动轴方向振动; 位于检测轴方向的位移检测单元，其检测振动体在检测轴方向上与基板表面水平并垂直于驱动轴方向的位移; 角速度检测装置，其基于振动器在检测轴方向上的位移检测角速度; 自动振动检测装置，其检测由于振动器在驱动轴方向的振动的检测轴方向上的泄漏而产生的振动器的自身振动; 自振反馈电路，完全抵消振动器的自振; 以及异常确定装置，其使用来自自动振动检测装置的输出来确定异常。
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7.发明授权Electrostatic capacitance type physical quantity sensor and angular velocity sensor 有权静电电容型物理量传感器和角速度传感器公开(公告)号：US08836348B2
公开(公告)日：2014-09-16
申请号：US13382395
申请日：2010-07-15
IPC分类号： G01R27/26 , G01P15/125 , G01P15/08 , G01D5/24 , G01D3/028 , G01C19/5726
CPC分类号： G01P15/125 , G01C19/5726 , G01D3/028 , G01D5/24 , G01P15/0802
摘要： The present invention provides a high-accuracy electrostatic capacitance type physical quantity sensor and angular velocity sensor configured so as to be capable of suppressing noise derived from internal noise while maintaining resistance to externally-incoming noise. A detection element 10 has a movable mass 18 supported displaceably by a physical quantity given from the outside, and a detection electrode Ef. A shield wire 16 is disposed around wirings connected to the input of a capacitance detection circuit 30 and is connected to a dc potential of low impedance. A value Cin of an input capacitance relative to a fixed potential of low impedance at a portion at which the detection element 10 is connected with the capacitance detection circuit 30 is set to fall within a range of 1.5 pF
摘要翻译： 本发明提供了一种高精度静电电容型物理量传感器和角速度传感器，其被配置为能够抑制由内部噪声产生的噪声，同时保持对外来噪声的抵抗。 检测元件10具有通过从外部给出的物理量可移动地支撑的可移动质量块18和检测电极Ef。 屏蔽线16设置在连接到电容检测电路30的输入端的布线周围，并连接到低阻抗的直流电位。 将检测元件10与电容检测电路30连接的部分处的输入电容相对于低阻抗的固定电位的值Cin设定为1.5pF
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公开(公告)号：US20110238363A1
公开(公告)日：2011-09-29
申请号：US13030079
申请日：2011-02-17
IPC分类号： G01C19/56
摘要： An apparatus for detecting angular velocity and acceleration having diagnosing units for diagnosing the function of detecting angular velocity; diagnosing units for diagnosing the function of detecting acceleration; a diagnosing unit for a DSP or a MPU; multiple ROMs storing the same data; a diagnosing unit for the ROMs; a diagnosing unit for a RAM; a unit for outputting the outputs of the angular velocity sensor, the acceleration sensor and the results of diagnoses all together in response to an output command from an external device; and a unit for sending error detection codes along with the sensor outputs and the result of diagnoses when the sensor outputs and the results of diagnoses are outputted together.
摘要翻译： 一种用于检测角速度和加速度的装置，具有用于诊断检测角速度的功能的诊断单元; 诊断加速度检测功能诊断单元; 用于DSP或MPU的诊断单元; 存储相同数据的多个ROM; ROM的诊断单元; 用于RAM的诊断单元; 响应于来自外部设备的输出命令，输出角速度传感器，加速度传感器的输出和所有诊断结果的单元; 以及用于发送错误检测码以及传感器输出以及传感器输出时的诊断结果和诊断结果一起输出的单元。
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公开(公告)号：US08456179B2
公开(公告)日：2013-06-04
申请号：US13129927
申请日：2009-11-24
CPC分类号： G01C19/5776
摘要： The present invention aims to provide an angular velocity detection device which is capable of reducing the effect of coupling between a drive electrode and a first displacement detection electrode by a floating capacity, and is low in cost. In the angular velocity detection device, an oscillating body 21 is displaceable in a first direction and a second direction which orthogonally intersect each other. The oscillating body 21 is oscillated in the first direction by an electrostatic force corresponding to a drive signal generated by a non-interference signal generator 1. A carrier signal generated by the non-interference signal generator 1 is applied to the oscillating body 21. A first displacement detection circuit 3 and a second displacement detection circuit 4 each detect a displacement of the oscillating body 21 as a displacement modulation signal indicative of a change in electrostatic capacity synchronized with the carrier signal to thereby detect an angular velocity. Here, the frequency of the drive signal and the frequency of the carrier signal are set so as to be generated at such a frequency ratio that a higher harmonic of the drive signal multiplied by an odd number does not the displacement modulation signal.
摘要翻译： 本发明的目的在于提供一种角速度检测装置，其能够通过浮动能力降低驱动电极与第一位移检测电极之间的耦合效果，成本低。 在角速度检测装置中，振动体21可以在彼此正交的第一方向和第二方向上移位。 振动体21通过与由无干扰信号发生器1产生的驱动信号相对应的静电力在第一方向上振荡。由非干扰信号发生器1产生的载波信号被施加到振荡体21.A 第一位移检测电路3和第二位移检测电路4各自检测振荡体21的位移，作为指示与载波信号同步的静电电容的变化的位移调制信号，从而检测角速度。 这里，驱动信号的频率和载波信号的频率被设定为以使得驱动信号乘以奇数的高次谐波不是位移调制信号的频率比来生成。
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公开(公告)号：US20110260740A1
公开(公告)日：2011-10-27
申请号：US13129927
申请日：2009-11-24
IPC分类号： G01R27/26
CPC分类号： G01C19/5776
摘要： The present invention aims to provide an angular velocity detection device which is capable of reducing the effect of coupling between a drive electrode and a first displacement detection electrode by a floating capacity, and is low in cost. In the angular velocity detection device, an oscillating body 21 is displaceable in a first direction and a second direction which orthogonally intersect each other. The oscillating body 21 is oscillated in the first direction by an electrostatic force corresponding to a drive signal generated by a non-interference signal generator 1. A carrier signal generated by the non-interference signal generator 1 is applied to the oscillating body 21. A first displacement detection circuit 3 and a second displacement detection circuit 4 each detect a displacement of the oscillating body 21 as a displacement modulation signal indicative of a change in electrostatic capacity synchronized with the carrier signal to thereby detect an angular velocity. Here, the frequency of the drive signal and the frequency of the carrier signal are set so as to be generated at such a frequency ratio that a higher harmonic of the drive signal multiplied by an odd number does not the displacement modulation signal.
摘要翻译： 本发明的目的在于提供一种角速度检测装置，其能够通过浮动能力降低驱动电极与第一位移检测电极之间的耦合效果，成本低廉。 在角速度检测装置中，振动体21可以在彼此正交的第一方向和第二方向上移位。 振动体21通过与由无干扰信号发生器1产生的驱动信号相对应的静电力在第一方向上振荡。由非干扰信号发生器1产生的载波信号被施加到振荡体21.A 第一位移检测电路3和第二位移检测电路4各自检测振荡体21的位移，作为指示与载波信号同步的静电电容的变化的位移调制信号，从而检测角速度。 这里，驱动信号的频率和载波信号的频率被设定为以使得驱动信号乘以奇数的高次谐波不是位移调制信号的频率比来生成。
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