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公开(公告)号：US20110238363A1
公开(公告)日：2011-09-29
申请号：US13030079
申请日：2011-02-17
IPC分类号： G01C19/56
摘要： An apparatus for detecting angular velocity and acceleration having diagnosing units for diagnosing the function of detecting angular velocity; diagnosing units for diagnosing the function of detecting acceleration; a diagnosing unit for a DSP or a MPU; multiple ROMs storing the same data; a diagnosing unit for the ROMs; a diagnosing unit for a RAM; a unit for outputting the outputs of the angular velocity sensor, the acceleration sensor and the results of diagnoses all together in response to an output command from an external device; and a unit for sending error detection codes along with the sensor outputs and the result of diagnoses when the sensor outputs and the results of diagnoses are outputted together.
摘要翻译： 一种用于检测角速度和加速度的装置，具有用于诊断检测角速度的功能的诊断单元; 诊断加速度检测功能诊断单元; 用于DSP或MPU的诊断单元; 存储相同数据的多个ROM; ROM的诊断单元; 用于RAM的诊断单元; 响应于来自外部设备的输出命令，输出角速度传感器，加速度传感器的输出和所有诊断结果的单元; 以及用于发送错误检测码以及传感器输出以及传感器输出时的诊断结果和诊断结果一起输出的单元。
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公开(公告)号：US20110056291A1
公开(公告)日：2011-03-10
申请号：US12830115
申请日：2010-07-02
IPC分类号： G01C19/56
CPC分类号： G01C19/5719
摘要： An angular-velocity detecting apparatus including a synchronous-detection unit for performing the synchronous detection of a displacement signal from a vibrator, a unit for changing a voltage value so that the output of the synchronous-detection unit always becomes equal to its maximum value, the voltage value being applied to a resonant-frequency adjusting electrode, and a unit for feeding back the output of the voltage-value changing unit to the resonant-frequency adjusting electrode in a detection-axis direction.
摘要翻译： 一种角速度检测装置，包括用于执行来自振动器的位移信号的同步检测的同步检测单元，用于改变电压值的单元，使得同步检测单元的输出总是等于其最大值， 施加到谐振频率调节电极的电压值和用于将检测轴方向上的电压值变更单元的输出反馈到谐振频率调节电极的单元。
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公开(公告)号：US08813556B2
公开(公告)日：2014-08-26
申请号：US13337398
申请日：2011-12-27
IPC分类号： G01F1/68
CPC分类号： G01K13/02 , G01F1/6842 , G01F5/00 , G01F15/185 , G01K1/16 , G01K2205/02
摘要： An intake temperature sensor capable of precisely detecting the temperature of intake at high speed even in a low air mass flow zone is provided. In an intake temperature sensor having a temperature detecting element 6 inserted in an opening provided in an intake pipe 3 to be disposed in the intake pipe, a temperature detecting element is mechanically joined with a heat sink 4 directly exposed to the flow of the intake flowing in the intake pipe, and the temperature of the intake is output based on an output obtained from the temperature detecting element. Thus, the thermal resistance of the temperature detecting element with respect to the intake flow can be reduced; therefore, the intake temperature sensor capable of precisely detecting the temperature of the intake at high speed even in the low air mass flow zone can be provided.
摘要翻译： 提供了即使在低空气质量流量区域也能够高精度地检测进气温度的进气温度传感器。 在具有插入到设置在进气管3内的进气管3中的开口中的温度检测元件6的进气温度传感器中，温度检测元件与直接暴露于进气流动的散热器4机械接合 在进气管中，并且基于从温度检测元件获得的输出来输出进气温度。 因此，可以降低温度检测元件相对于进气流的热阻; 因此，即使在低空气质量流量区域中也能够高精度地检测进气温度的进气温度传感器。
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公开(公告)号：US20140159174A1
公开(公告)日：2014-06-12
申请号：US14131125
申请日：2011-07-13
IPC分类号： G01F1/34
CPC分类号： G01F1/34 , G01F1/6845 , G01F1/692 , H01L2224/48247
摘要： A flowmeter that improves a corrosion resistance is provided.The flowmeter includes a silicon substrate having a diaphragm where a heater is formed, an aluminum pad formed on a silicon substrate, an organic protective film laminated on the silicon substrate, and a mold resin that covers the silicon substrate. The diaphragm has an exposed portion exposed from the organic protective film, an adhesion surface high in adhesion property to the mold resin is laminated on the silicon substrate, and an adhesion film of the mold resin to the adhesion film is provided between the exposed portion and the aluminum pad.
摘要翻译： 提供了提高耐腐蚀性的流量计。 流量计包括具有形成有加热器的隔膜的硅基板，形成在硅基板上的铝焊盘，层叠在硅基板上的有机保护膜，以及覆盖硅基板的模制树脂。 隔膜具有从有机保护膜露出的露出部分，将与模制树脂粘附性高的粘合表面层合在硅基板上，并且将模制树脂与粘合膜的粘合膜设置在暴露部分和 铝垫。
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公开(公告)号：US08746033B2
公开(公告)日：2014-06-10
申请号：US13126615
申请日：2009-10-21
申请人： Satoshi Asano , Masahiro Matsumoto , Yasushi Okada
发明人： Satoshi Asano , Masahiro Matsumoto , Yasushi Okada
IPC分类号： G01C19/56
CPC分类号： G01C19/5614 , G01C19/5776
摘要： Failures can be detected with high accuracy even the ambient temperature changes or background vibration is applied. An angular velocity sensor is composed of a vibrator which is elastically and displaceably supported on a substrate; a driving means which vibrates the vibrator in the drive axis direction horizontal to the substrate surface; a displacement detecting means in the detection axis direction, which detects a displacement of the vibrator in the detection axis direction horizontal to the substrate surface and perpendicular to the drive axis direction; an angular velocity detecting means which detects an angular velocity based on the displacement of the vibrator in the detection axis direction; a self-vibration detecting means that detects self-vibration of the vibrator, which is generated due to leakage in the detection axis direction of the vibration of the vibrator in the drive axis direction; a self-vibration feedback circuit which completely cancels the self-vibration of the vibrator; and an abnormality determining means which determines abnormality using an output from the self-vibration detecting means.
摘要翻译： 即使环境温度变化或背景振动也可以高精度地检测到故障。 角速度传感器由弹性位移地支撑在基板上的振动器构成; 驱动装置，其使所述振动器沿所述基板面的水平方向的驱动轴方向振动; 位于检测轴方向的位移检测单元，其检测振动体在检测轴方向上与基板表面水平并垂直于驱动轴方向的位移; 角速度检测装置，其基于振动器在检测轴方向上的位移检测角速度; 自动振动检测装置，其检测由于振动器在驱动轴方向的振动的检测轴方向上的泄漏而产生的振动器的自身振动; 自振反馈电路，完全抵消振动器的自振; 以及异常确定装置，其使用来自自动振动检测装置的输出来确定异常。
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公开(公告)号：US09772208B2
公开(公告)日：2017-09-26
申请号：US14359161
申请日：2012-01-18
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/696 , G01F5/00 , G01F15/00
摘要： Provided is a thermal type flowmeter in which contamination of a sensor element is reduced. The flowmeter includes a sensor element including a heating resistor formed in a thin film part, the thin film part being provided on a diaphragm formed on a substrate; a support member to locate the sensor element thereon; a secondary channel that includes part of the support member and takes in part of intake air flowing through an air intake pipeline; and a guide member provided on the support member or the sensor element that lies on a line L that extends along an air flow in the secondary channel and passing over the thin film part, the guide member allowing fine particles to be guided in a direction away from the line L, the fine particles coming together with an air flow along the surface of the support member or the sensor element.
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公开(公告)号：US20140167781A1
公开(公告)日：2014-06-19
申请号：US14235933
申请日：2011-08-03
CPC分类号： G01R1/18 , B81B3/0086 , G01D7/00
摘要： An objective of the present invention is to provide a sensor device with an increased accuracy. In order to achieve the objective, provided is a sensor device includes: an external terminal 2 to which an external device is connected; a ground terminal 3 connected to the ground; an internal circuit 4 that generates a sensor output signal; and a protection circuit 5 having a resistive element 6 and a capacitative element 7 between the external terminal and the internal circuit, in which the capacitative element is formed of a pair of electrodes having different conductivities from each other and a lower-conductive electrode 7a of the electrodes which has a smaller conductivity is connected to the external terminal and the internal circuit.
摘要翻译： 本发明的目的是提供一种具有更高精度的传感器装置。 为了实现该目的，提供了一种传感器装置，包括：连接有外部装置的外部端子2; 连接到地面的接地端子3; 产生传感器输出信号的内部电路4; 以及保护电路5，其在外部端子和内部电路之间具有电阻元件6和电容元件7，其中电容元件由彼此具有不同电导率的一对电极形成，并且电容元件7的下导电电极7a 具有较小导电性的电极连接到外部端子和内部电路。
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公开(公告)号：US20130199280A1
公开(公告)日：2013-08-08
申请号：US13813094
申请日：2011-07-28
IPC分类号： G01F1/692
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/699
摘要： An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element according to the present invention includes a semiconductor substrate, a cavity portion formed on the semiconductor substrate, a heating resistor formed on the cavity portion via an electrically insulating film, a heating temperature sensor for detecting heating temperature of the heating resistor, and a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor. The heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
摘要翻译： 本发明的目的是提供一种提供高灵敏度和改善的可靠性的热式流量传感器。 根据本发明的传感器元件包括半导体衬底，形成在半导体衬底上的空腔部分，通过电绝缘膜形成在空腔部分上的发热电阻器，用于检测加热电阻器的加热温度的加热温度传感器，以及 使用由加热温度传感器检测到的温度来控制加热电阻器的加热温度的驱动电路。 加热温度传感器包括具有根据温度变化的电阻值的温度敏感电阻器，并且设置在相对于加热电阻器的被测量流体的流动方向的上游和下游以及垂直于该方向的方向上下侧 要测量的流体相对于加热电阻器的流动。
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公开(公告)号：US09188470B2
公开(公告)日：2015-11-17
申请号：US13813094
申请日：2011-07-28
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/699
摘要： An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element according to the present invention includes a semiconductor substrate, a cavity portion formed on the semiconductor substrate, a heating resistor formed on the cavity portion via an electrically insulating film, a heating temperature sensor for detecting heating temperature of the heating resistor, and a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor. The heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
摘要翻译： 本发明的目的是提供一种提供高灵敏度和改善的可靠性的热式流量传感器。 根据本发明的传感器元件包括半导体衬底，形成在半导体衬底上的空腔部分，通过电绝缘膜形成在空腔部分上的发热电阻器，用于检测加热电阻器的加热温度的加热温度传感器，以及 使用由加热温度传感器检测到的温度来控制加热电阻器的加热温度的驱动电路。 加热温度传感器包括具有根据温度变化的电阻值的温度敏感电阻器，并且设置在相对于加热电阻器的被测量流体的流动方向的上游和下游以及垂直于该方向的方向上下侧 要测量的流体相对于加热电阻器的流动。
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公开(公告)号：US09038454B2
公开(公告)日：2015-05-26
申请号：US13814855
申请日：2011-09-06
CPC分类号： G01F1/69 , G01F1/6845 , G01F1/692
摘要： Measuring flow rate of gas based on amount of heat transfer from gas to temperature-sensing resistors, comprises: substrate having hollow space formed therethrough; an insulating film deposited on the substrate so as to cover the hollow space; a heat-generating resistor formed on the insulating film; temperature-sensing resistors arranged adjacent to the heat-generating resistor; electrodes arranged at an edge of the semiconductor substrate so electrodes are parallel to the edge; and wiring connecting the electrodes and heat-generating resistors. Thermal resistance of a first area is made almost equal to thermal resistance of a second area, first area is defined by the side of the heat-generating resistor closer to the electrodes and by the side of the hollow space closer to the electrodes, and the second area is defined by the opposite side of the heat-generating resistor and by the opposite side of the hollow space.
摘要翻译： 基于从气体到温度感测电阻器的传热量来测量气体的流量，包括：具有通过其形成的中空空间的衬底; 沉积在基板上以覆盖中空空间的绝缘膜; 形成在绝缘膜上的发热电阻器; 与发热电阻相邻设置的温度感测电阻器; 电极布置在半导体衬底的边缘处，使得电极平行于边缘; 以及连接电极和发热电阻器的布线。 第一区域的热阻几乎等于第二区域的热阻，第一区域由靠近电极的发热电阻器的侧面和靠近电极的中空空间的一侧限定，并且 第二区域由发热电阻器的相对侧和中空空间的相对侧限定。
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