公开(公告)号：US06259548B1

公开(公告)日：2001-07-10

申请号：US09401947

申请日：1999-09-23

申请人： Masahiro Tsugai ,  Nobuaki Konno ,  Hiroyuki Fujita ,  Makoto Mita ,  Hiroshi Toshiyoshi ,  Yoshio Mita

发明人： Masahiro Tsugai ,  Nobuaki Konno ,  Hiroyuki Fujita ,  Makoto Mita ,  Hiroshi Toshiyoshi ,  Yoshio Mita

IPC分类号： G02B2608

CPC分类号： B81B3/004 ,  B81B2201/042 ,  G02B26/0841

摘要： A micro-mirror device includes a mirror forming substrate on which a mirror is disposed. A pair of torsion beams are disposed on opposing sides of the mirror forming substrate. An anchor projects from a supporting substrate, supporting the ends of the torsion beams. A driving frame surrounds at least one side of the torsion beams and is connected to the mirror forming substrate through a link beam. A drive force generator drives the driving frame.

摘要翻译： 微镜装置包括其上配置有反射镜的反射镜形成基板。 一对扭转梁设置在反射镜形成基板的相对侧上。 锚固件从支撑基底突出，支撑扭转梁的端部。 驱动框架围绕扭转梁的至少一侧，并且通过连杆梁连接到反射镜形成基板。 驱动力发生器驱动驱动框架。

公开(公告)号：US20110086455A1

公开(公告)日：2011-04-14

申请号：US12904104

申请日：2010-10-13

申请人： Makoto Mita ,  Hirobumi Saito ,  Hiroshi Toshiyoshi

发明人： Makoto Mita ,  Hirobumi Saito ,  Hiroshi Toshiyoshi

IPC分类号： H01L21/3065

CPC分类号： G01C19/574 ,  Y10T74/1282

摘要： To provide a compact and high performance gyroscope.A gyroscope (10) comprises an outer frame (11); an inner frame (12) positioned inside the outer frame and supported to be movable in one reciprocating direction; a plurality of proof masses (15) positioned inside the inner frame and supported to be movable in the direction orthogonal to the one reciprocating direction; a plurality of outer support suspensions (13) which connect the outer frame and the inner frame; a plurality of inner support suspensions (14) which connect the inner frame and each of the proof masses; actuators (16) for accelerating each of the proof masses; and detectors (17) for detecting displacement of the inner frame against the outer frame. The actuators oscillate the plurality of proof masses in-phase, and wherein Coriolis forces induced on each of the proof masses are summed up in the inner frame.

摘要翻译： 提供一种紧凑，高性能的陀螺仪。 陀螺仪（10）包括外框架（11）; 内框架（12），其定位在所述外框架内并被支撑以能够在一个往复方向上移动; 多个检测质量块（15），其位于所述内框架的内部并且被支撑为能够沿与所述一个往复方向正交的方向移动; 连接外框架和内框架的多个外支撑悬架（13）; 多个内部支撑悬架（14），其连接所述内部框架和每个所述检验质量块; 致动器（16），用于加速每个检验质量块; 以及用于检测内框架相对于外框架的位移的检测器（17）。 执行器同步地振荡多个证明质量块，并且其中在每个检验质量上感应的科里奥利力在内框架中相加。

公开(公告)号：US20090090200A1

公开(公告)日：2009-04-09

申请号：US11914127

申请日：2005-05-24

申请人： Makoto Mita ,  Hirobumi Saito ,  Hiroshi Toshiyoshi

发明人： Makoto Mita ,  Hirobumi Saito ,  Hiroshi Toshiyoshi

IPC分类号： G01C19/56

CPC分类号： G01C19/574 ,  Y10T74/1282

摘要： A gyroscope (10) comprises an outer frame (11); an inner frame (12) positioned inside the outer frame and supported to be movable in one reciprocating direction; a plurality of proof masses (15) positioned inside the inner frame and supported to be movable in the direction orthogonal to the one reciprocating direction; a plurality of outer support suspensions (13) which connect the outer frame and the inner frame; a plurality of inner support suspensions (14) which connect the inner frame and each of the proof masses; actuators (16) for accelerating each of the proof masses; and detectors (17) for detecting displacement of the inner frame against the outer frame. The actuators oscillate the plurality of proof masses in-phase, and wherein Coriolis forces induced on each of the proof masses are summed up in the inner frame.

摘要翻译： 陀螺仪（10）包括外框架（11）; 内框架（12），其定位在所述外框架内并被支撑以能够在一个往复方向上移动; 多个检测质量块（15），其位于所述内框架的内部并且被支撑为能够沿与所述一个往复方向正交的方向移动; 连接外框架和内框架的多个外支撑悬架（13）; 多个内部支撑悬架（14），其连接所述内部框架和每个所述检验质量块; 致动器（16），用于加速每个检验质量块; 以及用于检测内框架相对于外框架的位移的检测器（17）。 执行器同步地振荡多个证明质量块，并且其中在每个检验质量上感应的科里奥利力在内框架中相加。

公开(公告)号：US07825755B2

公开(公告)日：2010-11-02

申请号：US11577965

申请日：2005-04-07

申请人： Hiroshi Toshiyoshi ,  Hiroyuki Fujita ,  Yuko Yamauchi ,  Akio Higo ,  Kuniyuki Kakushima

发明人： Hiroshi Toshiyoshi ,  Hiroyuki Fujita ,  Yuko Yamauchi ,  Akio Higo ,  Kuniyuki Kakushima

IPC分类号： H01H51/22

CPC分类号： G09G3/346 ,  G02B26/0841 ,  G09G3/2085 ,  G09G2300/088 ,  G09G2360/142

摘要： A semiconductor substrate; a cantilever which is formed on the semiconductor substrate so as to face the semiconductor substrate with an air layer therebetween, the cantilever being made from an electrically conductive material or a semiconductor material, and the cantilever being mechanically movable; a photodiode which is formed so as to be connected in parallel to a capacitance that is constituted from the cantilever and the semiconductor substrate, and the photodiode being formed between an anchor portion which is a portion of the cantilever and the semiconductor substrate; and a power source which supplies voltage via a resistance on a side of the cantilever which is a connection point of a parallel circuit including both the capacitance and the photodiode so as to be backward bias to the photodiode, are included.

摘要翻译： 半导体衬底; 悬臂，其形成在半导体基板上，以便在半导体基板之间具有空气层，所述悬臂由导电材料或半导体材料制成，所述悬臂可机械移动; 形成为与由悬臂和半导体衬底构成的电容并联连接的光电二极管，并且所述光电二极管形成在作为所述悬臂的一部分的锚固部与所述半导体衬底之间; 以及电源，其通过作为包括电容和光电二极管的并联电路的连接点的悬臂的一侧的电阻提供电压，以便向光电二极管反向偏置。

公开(公告)号：US20090256823A1

公开(公告)日：2009-10-15

申请号：US12085802

申请日：2006-11-28

申请人： Hiroyuki Fujita ,  Hiroshi Toshiyoshi ,  Akio Higo ,  Roi Shigematsu

发明人： Hiroyuki Fujita ,  Hiroshi Toshiyoshi ,  Akio Higo ,  Roi Shigematsu

IPC分类号： G06F3/042 ,  B32B27/36 ,  B32B9/00 ,  B32B27/18

CPC分类号： G02B26/001 ,  G02B5/0242 ,  Y10T428/31663 ,  Y10T428/31786 ,  Y10T428/32

摘要： A display device is provided with an optical waveguide, a transparent fixed electrode disposed in surface contact with the optical waveguide, and a transparent movable electrode disposed facing the transparent fixed electrode on a side opposite to the optical waveguide. When a driving voltage is applied, the transparent movable electrode is movable by an external force, between a first stable state in which it is kept apart from the transparent fixed electrode by elasticity, and a second stable state in which it makes insulated contact with the transparent fixed electrode by electrostatic force.There is no concern about contaminating the air or dirtying hands, and it is possible to write easily using a finger or a simple writing tool, and repeatedly erase.

摘要翻译： 显示装置设置有光波导，与光波导表面接触的透明固定电极，以及在与光波导相反的一侧面对透明固定电极的透明可动电极。 当施加驱动电压时，透明可动电极可通过外力在与弹性状态保持与透明固定电极分离的第一稳定状态之间移动，而第二稳定状态与第二稳定状态 透明固定电极通过静电力。 不用担心污染空气或弄脏手，可以用手指或简单的书写工具轻松书写，并反复擦除。

公开(公告)号：US20090102006A1

公开(公告)日：2009-04-23

申请号：US11577965

申请日：2005-04-07

申请人： Hiroshi Toshiyoshi ,  Hiroyuki Fujita ,  Yuko Yamauchi ,  Akio Higo ,  Kuniyuki Kakushima

发明人： Hiroshi Toshiyoshi ,  Hiroyuki Fujita ,  Yuko Yamauchi ,  Akio Higo ,  Kuniyuki Kakushima

IPC分类号： H01L31/08 ,  G05F1/10

CPC分类号： G09G3/346 ,  G02B26/0841 ,  G09G3/2085 ,  G09G2300/088 ,  G09G2360/142

摘要： A semiconductor substrate; a cantilever which is formed on the semiconductor substrate so as to face the semiconductor substrate with an air layer therebetween, the cantilever being made from an electrically conductive material or a semiconductor material, and the cantilever being mechanically movable; a photodiode which is formed so as to be connected in parallel to a capacitance that is constituted from the cantilever and the semiconductor substrate, and the photodiode being formed between an anchor portion which is a portion of the cantilever and the semiconductor substrate; and a power source which supplies voltage via a resistance on a side of the cantilever which is a connection point of a parallel circuit including both the capacitance and the photodiode so as to be backward bias to the photodiode, are included.

摘要翻译： 半导体衬底; 悬臂，其形成在半导体基板上，以便在半导体基板之间具有空气层，所述悬臂由导电材料或半导体材料制成，所述悬臂可机械移动; 形成为与由悬臂和半导体衬底构成的电容并联连接的光电二极管，并且所述光电二极管形成在作为所述悬臂的一部分的锚固部与所述半导体衬底之间; 以及电源，其通过作为包括电容和光电二极管的并联电路的连接点的悬臂的一侧的电阻提供电压，以便向光电二极管反向偏置。

公开(公告)号：US20090320167A1

公开(公告)日：2009-12-24

申请号：US11720881

申请日：2005-12-05

申请人： Dai Kobayashi ,  Hideki Kawakatsu ,  Hiroshi Toshiyoshi

发明人： Dai Kobayashi ,  Hideki Kawakatsu ,  Hiroshi Toshiyoshi

IPC分类号： G01N13/16 ,  G12B21/08

CPC分类号： G01Q60/38

摘要： A mechanical oscillator which defines a starting point of a cantilever at a front edge of a base and can determine the length of the cantilever without depending on an alignment accuracy and an etching amount, and a fabrication method of the mechanical oscillator. The mechanical oscillator, produced by processing a wafer, comprises a base (101) formed from a substrate supporting an SOI wafer and a structure to be a cantilever (102) which is formed from a silicon thin film of the SOI wafer and is horizontally protruding from the base (101), wherein a part of a buried oxide film (103) between the base (101) and the structure to be a cantilever (102) is removed, and a cantilever (104) starting from the front edge (105) of the base (101) is formed by directly jointing the structure to be a cantilever (102) to a part including at least the front edge (105) of the base (101) where the buried oxide film was removed.

摘要翻译： 一种机械振荡器，其限定了在基座的前边缘处的悬臂的起始点，并且可以在不依赖于对准精度和蚀刻量的情况下确定悬臂的长度，以及机械振荡器的制造方法。 通过处理晶片产生的机械振荡器包括由支撑SOI晶片的基板和作为由SOI晶片的硅薄膜形成的悬臂（102）的结构形成的基座（101），并且水平突出 从所述底座（101）开始，其中在所述基座（101）与所述悬臂结构（102）之间的一部分埋入氧化膜（103）被移除，并且从所述前边缘（105）开始的悬臂（104） （101）的结构直接连接到至少包括去除埋入氧化膜的基底（101）的前边缘（105）的部分的悬臂（102）上。

公开(公告)号：US07832271B2

公开(公告)日：2010-11-16

申请号：US11914127

申请日：2005-05-24

申请人： Makoko Mita ,  Hirobumi Saito ,  Hiroshi Toshiyoshi

发明人： Makoko Mita ,  Hirobumi Saito ,  Hiroshi Toshiyoshi

IPC分类号： G01P9/04

CPC分类号： G01C19/574 ,  Y10T74/1282

摘要： To provide a compact and high performance gyroscope.A gyroscope (10) comprises an outer frame (11); an inner frame (12) positioned inside the outer frame and supported to be movable in one reciprocating direction; a plurality of proof masses (15) positioned inside the inner frame and supported to be movable in the direction orthogonal to the one reciprocating direction; a plurality of outer support suspensions (13) which connect the outer frame and the inner frame; a plurality of inner support suspensions (14) which connect the inner frame and each of the proof masses; actuators (16) for accelerating each of the proof masses; and detectors (17) for detecting displacement of the inner frame against the outer frame. The actuators oscillate the plurality of proof masses in-phase, and wherein Coriolis forces induced on each of the proof masses are summed up in the inner frame.

摘要翻译： 提供一种紧凑，高性能的陀螺仪。 陀螺仪（10）包括外框架（11）; 内框架（12），其定位在所述外框架内并被支撑以能够在一个往复方向上移动; 多个检测质量块（15），其位于所述内框架的内部并且被支撑为能够沿与所述一个往复方向正交的方向移动; 连接外框架和内框架的多个外支撑悬架（13）; 多个内部支撑悬架（14），其连接所述内部框架和每个所述检验质量块; 致动器（16），用于加速每个检验质量块; 以及用于检测内框架相对于外框架的位移的检测器（17）。 执行器同步地振荡多个证明质量块，并且其中在每个检验质量上感应的科里奥利力在内框架中相加。

公开(公告)号：US20050162811A1

公开(公告)日：2005-07-28

申请号：US11042155

申请日：2005-01-26

申请人： Hiroshi Obi ,  Hiroshi Toshiyoshi

发明人： Hiroshi Obi ,  Hiroshi Toshiyoshi

IPC分类号： G02B6/35 ,  H05F1/00

CPC分类号： G02B6/3584 ,  G02B6/3552 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3594

摘要： A comb-shaped actuator comprising a substrate having an opening formed therein; a fixed electrode comprising a fixed electrode base portion provided along an inner side of the opening on the substrate and a plurality of fixed electrode finger groups arranged in parallel with each other in the shape of teeth of a comb throughout a predetermined length on the fixed electrode base portion; a movable electrode located in the opening of the substrate and comprising a movable electrode base portion and a plurality of movable electrode fingers arranged in parallel with each other in the shape of teeth of a comb facing the fixed electrode throughout a predetermined length, the movable electrode being movable by an attracting force generated between the fixed electrode finger and the movable electrode finger subject to a voltage or a magnetic field applied between the movable electrode and the fixed electrode upon arranging the movable electrode fingers and the fixed electrode fingers in an interdigital pattern with a gap between them; and a suspension supporting member connecting the movable electrode integrally with the substrate and suspending movably the movable electrode from the substrate. Both the fixed electrode and the movable electrode comprise a plurality of electrode finger units containing two fixed electrode fingers next to each other and the movable electrode finger interposed between the two fixed electrode fingers, at least two of the electrode finger units comprising off-centered electrode finger units having the movable electrode finger being off-centered with respect to a central position between the two fixed electrode fingers, the off-centered electrode finger units being located on both sides of a central line dividing the fixed electrode and the movable electrode along the opening into two parts, and directions of off-centering of the both sides being inverse to each other.

摘要翻译： 一种梳形致动器，包括其中形成有开口的基板; 固定电极，其包括沿着基板上的开口的内侧设置的固定电极基部和在固定电极上的整个预定长度上以梳齿形状彼此平行布置的多个固定电极指组 基部; 位于所述基板的开口中的可动电极，包括可动电极基部和多个可移动电极指，所述可动电极基部和多个可动电极指彼此平行布置成具有与所述固定电极整齐的预定长度的梳齿形状，所述可动电极 通过在固定电极指和可动电极指之间产生的吸引力，通过施加在可动电极和固定电极之间的电压或磁场，在可移动电极指和固定电极指以交叉形式布置时，可以移动， 他们之间的差距; 以及悬挂支撑构件，其将所述可动电极与所述基板一体地连接并将所述可动电极从所述基板可移动地悬挂。 固定电极和可动电极都包括彼此相邻的两个固定电极指的多个电极指单元和插在两个固定电极指之间的可动电极指，至少两个电极指单元包括偏心电极 具有可动电极指的相对于两个固定电极指之间的中心位置偏心的手指单元，偏心电极指单元位于沿固定电极和可动电极分开的中心线的两侧 开口两部分，两侧的偏心方向彼此相反。

公开(公告)号：US06611178B1

公开(公告)日：2003-08-26

申请号：US10009560

申请日：2001-12-14

申请人： Hideki Kawakatsu ,  Hiroshi Toshiyoshi

发明人： Hideki Kawakatsu ,  Hiroshi Toshiyoshi

IPC分类号： B81B300

CPC分类号： G01P15/00 ,  G01P15/08 ,  G01P15/097 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q60/32 ,  G01Q60/38 ,  G01Q70/06 ,  G11B9/1418 ,  H03H9/02244

摘要： There are provided a stable and highly sensitive nanometric mechanical oscillator having a considerably high detection resolution that enables detection of variation in force or mass on the nanometer order, as well as a method of fabricating the same, and a measurement apparatus using the same. A nanometric mechanical oscillator (10) includes a base (11), a tetrahedral oscillator mass (13); and an elastic neck portion (12) for connecting the base (11) and the tetrahedral oscillator mass (13). The oscillator (10) assumes a mushroom-like shape and has a nanometric size. The oscillator mass (13) assumes a tetrahedral shape and is suitable to be used as a probe of a scanning forth microscope in which the oscillator mass (13) serving as a probe is caused to approach to an arbitrary sample surface in order to observe the surface state.

摘要翻译： 提供了具有相当高的检测分辨率的稳定且高度敏感的纳米机械振荡器，其能够检测纳米级的力或质量的变化，以及其制造方法，以及使用该方法的测量装置。 纳米机械振荡器（10）包括基座（11），四面体振子质量块（13）; 以及用于连接基座（11）和四面体振子块（13）的弹性颈部（12）。 振荡器（10）呈现蘑菇状形状并具有纳米尺寸。 振荡器质量（13）呈现四面体形状，并且适合用作扫描显微镜的探针，其中用作探针的振荡器质量（13）接近任意的样品表面，以观察 表面状态。