公开(公告)号：US20060184301A1

公开(公告)日：2006-08-17

申请号：US11353169

申请日：2006-02-14

申请人： Nobuaki Konno ,  Takashi Tokunaga ,  Satoru Inoue

发明人： Nobuaki Konno ,  Takashi Tokunaga ,  Satoru Inoue

IPC分类号： G06F19/00

CPC分类号： B60R21/0132 ,  B60R16/0233 ,  B60R2021/0018 ,  B60R2021/01325 ,  B60R2021/01327 ,  G01P3/22 ,  G01P15/0888

摘要： A rollover sensing device includes a detecting unit that includes at least a pair of acceleration sensors which detect an acceleration in an vertical direction, the pair of acceleration sensors being disposed closer to each other on a same board in a lateral direction of a vehicle, an arithmetic processing unit that calculates an angular acceleration and an angular velocity of the vehicle on a basis of an output signal from the detecting unit, and a rollover determining unit that determines whether or not a rollover of the vehicle occurs on a basis of an arithmetic result obtained by the arithmetic processing unit.

摘要翻译： 翻转感测装置包括检测单元，该检测单元至少包括一对在垂直方向上检测加速度的加速度传感器，该一对加速度传感器在车辆的横向方向上彼此靠近彼此设置在同一板上， 算术处理单元，其基于来自检测单元的输出信号计算车辆的角加速度和角速度;以及翻转确定单元，其基于算术结果来确定车辆的翻转是否发生 由算术处理单元获得。

公开(公告)号：US06201284B1

公开(公告)日：2001-03-13

申请号：US09025247

申请日：1998-02-18

申请人： Yoshiaki Hirata ,  Masahiro Tsugai ,  Nobuaki Konno

发明人： Yoshiaki Hirata ,  Masahiro Tsugai ,  Nobuaki Konno

IPC分类号： H01L2982

CPC分类号： G01P15/18 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/082

摘要： A movable electrode structure is formed in a single sensor element, and this movable electrode structure can be displaced along two axes within a plane, and one axis outside the plane. A detecting fixed electrode is provided via a constant space with each of these detecting axes, and a change in capacitances between the movable electrodes and the fixed electrodes is detected. As a result, the acceleration components of the two axes, or the three axes are detected. The dynamic characteristic of the sensor is controlled based on the mass of the variable electrode, the structure and length of the beam for supporting the movable electrode, and also the ratio of the length to the section of this beam.

摘要翻译： 可移动电极结构形成在单个传感器元件中，并且该可动电极结构可以在平面内的两个轴线以及平面外的一个轴线上移位。 通过这些检测轴中的每一个经由恒定空间设置检测固定电极，并且检测可动电极和固定电极之间的电容的变化。 结果，检测到两个轴的加速度分量或三个轴。 传感器的动态特性基于可变电极的质量，用于支撑可动电极的光束的结构和长度以及长度与该光束的截面的比例来控制。

公开(公告)号：US08368387B2

公开(公告)日：2013-02-05

申请号：US12920682

申请日：2008-10-28

申请人： Nobuaki Konno

发明人： Nobuaki Konno

IPC分类号： G01P15/00 ,  G01P15/08

CPC分类号： G01P15/0802 ,  B81B7/0048 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01C19/5719 ,  G01P3/22 ,  G01P15/0888 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0831 ,  H01L29/84

摘要： An acceleration sensor includes a substrate, first and second torsion beams, first and second detection frames, first and second detection electrodes, first and second link beams, and an inertial mass body. The first and second torsion beams are distorted around the first and second torsion axes. The first and second detection frames are rotated about the first and second torsion axes. The first and second detection electrodes detect an angle formed between the substrate and each of the first and second detection frames. The first link beam is on a first axis located at a position shifted from a position of the first torsion axis to one end side of the first detection frame along a direction crossing the first torsion axis. The second link beam is on a second axis located at a position shifted from a position of the second torsion axis in a direction identical to the direction of shift from the position of the first torsion axis.

摘要翻译： 加速度传感器包括基板，第一和第二扭转梁，第一和第二检测框架，第一和第二检测电极，第一和第二连杆梁以及惯性质量体。 第一和第二扭转梁围绕第一和第二扭转轴线变形。 第一和第二检测框围绕第一和第二扭转轴线旋转。 第一和第二检测电极检测基板与第一和第二检测框架中的每一个之间形成的角度。 第一连杆梁位于沿着与第一扭转轴相交叉的方向位于从第一扭转轴位置到第一检测框架的一端侧的位置的第一轴上。 第二连杆梁位于从与第一扭转轴的位置相同的方向与第二扭转轴的位置偏移的位置的第二轴上。

公开(公告)号：US20110203373A1

公开(公告)日：2011-08-25

申请号：US13127172

申请日：2009-08-13

申请人： Nobuaki Konno

发明人： Nobuaki Konno

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P2015/0831 ,  G01P2015/0837

摘要： An acceleration sensor includes a substrate, and a plurality of acceleration detection units supported by the substrate. Each of the plurality of acceleration detection units has a torsion beam supported by the substrate and distorted about a torsion axis line; a detection frame supported by the torsion beam so as to be rotatable about the torsion axis line; a detection electrode formed on the substrate so as to face the detection frame; a link beam supported by the detection frame at a position on an axis line deviated from the torsion axis line when seen in plane; and an inertia mass body supported by the link beam so as to be displaceable in a thickness direction of the substrate. The plurality of acceleration detection units include first and second acceleration detection units. The first and second acceleration detection units are disposed side by side along a direction of the first torsion axis line. Thereby, a highly accurate acceleration sensor that suppresses a vibration with a high frequency and a high acceleration can be obtained.

摘要翻译： 加速度传感器包括基板和由基板支撑的多个加速度检测单元。 多个加速度检测单元中的每一个具有由基板支撑的扭转梁，并且围绕扭转轴线变形; 所述检测框架由所述扭转梁支撑，以便能够围绕所述扭转轴线旋转; 检测电极，形成在所述基板上以面对所述检测框架; 在平面内观察时，在与所述扭转轴线偏离的轴线上的位置处由所述检测框架支撑的连杆梁; 以及由所述连杆梁支撑以便能够在所述基板的厚度方向上移位的惯性质量体。 多个加速度检测单元包括第一和第二加速度检测单元。 第一和第二加速度检测单元沿着第一扭转轴线的方向并排布置。 因此，可以获得抑制高频和高加速度的振动的高精度的加速度传感器。

公开(公告)号：US20110031959A1

公开(公告)日：2011-02-10

申请号：US12920682

申请日：2008-10-28

申请人： Nobuaki Konno

发明人： Nobuaki Konno

IPC分类号： G01P15/00

CPC分类号： G01P15/0802 ,  B81B7/0048 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01C19/5719 ,  G01P3/22 ,  G01P15/0888 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0831 ,  H01L29/84

摘要： An acceleration sensor includes a substrate, first and second torsion beams, first and second detection frames, first and second detection electrodes, first and second link beams, and an inertial mass body. The first and second torsion beams are distorted around the first and second torsion axes. The first and second detection frames are rotated about the first and second torsion axes. The first and second detection electrodes detect an angle formed between the substrate and each of the first and second detection frames. The first link beam is on a first axis located at a position shifted from a position of the first torsion axis to one end side of the first detection frame along a direction crossing the first torsion axis. The second link beam is on a second axis located at a position shifted from a position of the second torsion axis in a direction identical to the direction of shift from the position of the first torsion axis.

摘要翻译： 加速度传感器包括基板，第一和第二扭转梁，第一和第二检测框架，第一和第二检测电极，第一和第二连杆梁以及惯性质量体。 第一和第二扭转梁围绕第一和第二扭转轴线变形。 第一和第二检测框围绕第一和第二扭转轴线旋转。 第一和第二检测电极检测基板与第一和第二检测框架中的每一个之间形成的角度。 第一连杆梁位于沿着与第一扭转轴相交叉的方向位于从第一扭转轴位置到第一检测框架的一端侧的位置的第一轴上。 第二连杆梁位于从与第一扭转轴的位置相同的方向与第二扭转轴的位置偏移的位置的第二轴上。

公开(公告)号：US06494094B1

公开(公告)日：2002-12-17

申请号：US09562288

申请日：2000-05-01

申请人： Masahiro Tsugai ,  Nobuaki Konno ,  Hiroyuki Fujita

发明人： Masahiro Tsugai ,  Nobuaki Konno ,  Hiroyuki Fujita

IPC分类号： G01P904

CPC分类号： G01C19/5719

摘要： A conventional angular rate sensor has a problem that the displacement amplitude of a drive gimbal frame is limited due to the Pulled-in phenomenon where the drive gimbal frame is attached to drive electrodes, thereby decreasing its sensor sensitivity. In an angular rate sensor, a drive frame and a driven frame are separately provided. A bending oscillation of the drive frame is transmitted to the driven frame through link beams, causing the rotational oscillation of the driven frame. The displacement amplitude of a rotational oscillation of the driven frame is not limited to provide high sensor sensitivity.

摘要翻译： 传统的角速度传感器存在由于驱动万向架结合到驱动电极上的拉入现象而导致驱动万向架的位移幅度受到限制的问题，从而降低了传感器灵敏度。 在角速率传感器中，分别提供驱动框架和从动框架。 驱动框架的弯曲振动通过连接梁传递到从动框架，导致从动框架的旋转振动。 驱动框架的旋转振荡的位移幅度不限于提供高传感器灵敏度。

公开(公告)号：US20060283245A1

公开(公告)日：2006-12-21

申请号：US11423281

申请日：2006-06-09

申请人： Nobuaki KONNO ,  Masahiro Tsugai ,  Jun Fujita

发明人： Nobuaki KONNO ,  Masahiro Tsugai ,  Jun Fujita

IPC分类号： G01P15/08

CPC分类号： G01C19/5719

摘要： According to one of the aspects of the present invention, a vibratory gyroscope includes a pair of proof masses having the same inertia mass, each of the proof masses having a first axis. The proof masses are arranged symmetrically in relation to a second axis. Also, the vibratory gyroscope includes a pair of drive elements, each of which has a driving axis extending in parallel to the second axis and supports respective one of the proof masses to allow oscillation thereof about the first axis. Further, the vibratory gyroscope includes a supporting element with an anchor element for supporting the drive elements to allow oscillation thereof about the driving axes. Finally, the vibratory gyroscope includes a main body having an inner space for receiving the supporting element, in which the main body is in contact with the anchor element of the supporting element and spaced away from the proof masses and the drive elements.

摘要翻译： 根据本发明的一个方面，振动陀螺仪包括具有相同惯性质量的一对校验块，每个校验块具有第一轴。 证明质量体相对于第二轴对称地布置。 此外，振动陀螺仪还包括一对驱动元件，每一个驱动元件具有平行于第二轴线延伸的驱动轴，并支撑相应的一个检验质量块，以允许围绕第一轴线的振荡。 此外，振动陀螺仪包括支撑元件，该支撑元件具有用于支撑驱动元件的锚定元件，以允许绕驱动轴线的摆动。 最后，振动陀螺仪包括主体，其具有用于接收支撑元件的内部空间，主体与支撑元件的锚定元件接触并与检测块和驱动元件隔开。

公开(公告)号：US06955086B2

公开(公告)日：2005-10-18

申请号：US10739069

申请日：2003-12-19

申请人： Eiji Yoshikawa ,  Masahiro Tsugai ,  Nobuaki Konno ,  Yoshiaki Hirata

发明人： Eiji Yoshikawa ,  Masahiro Tsugai ,  Nobuaki Konno ,  Yoshiaki Hirata

IPC分类号： G01P15/125

CPC分类号： G01P15/125

摘要： An acceleration sensor includes first and second fixed electrodes on a substrate, and a movable electrode located above the first and second fixed electrodes, with respect to the substrate, and facing them. The movable electrode is elastically supported on the substrate by a first elastic supporting body and is movable. A mass, which is elastically supported on the substrate by a second elastic supporting body, moves in response to an acceleration in a direction perpendicular to the substrate. A linking portion links the movable electrode and the mass at a position spaced from an axis of movement of the movable electrode by a distance. Acceleration is measured based on changes in a first capacitance between the first fixed electrode and the movable electrode and a second capacitance between the second fixed electrode and the movable electrode. Thus, a highly impact resistant and highly reliable acceleration sensor is obtained.

摘要翻译： 加速度传感器包括基板上的第一固定电极和第二固定电极以及相对于基板位于第一和第二固定电极上方并面向它们的可动电极。 可移动电极通过第一弹性支撑体弹性支撑在基板上并且可移动。 通过第二弹性支撑体弹性地支撑在基板上的质量响应于垂直于基板的方向的加速度而移动。 连接部分在与可移动电极的运动轴线间隔一定距离的位置处连接可移动电极和质量块。 基于第一固定电极和可动电极之间的第一电容的变化和第二固定电极与可动电极之间的第二电容来测量加速度。 因此，获得了高度耐冲击和高度可靠的加速度传感器。

公开(公告)号：US07624638B2

公开(公告)日：2009-12-01

申请号：US11933685

申请日：2007-11-01

申请人： Nobuaki Konno ,  Yoshiaki Hirata

发明人： Nobuaki Konno ,  Yoshiaki Hirata

IPC分类号： G01P15/125 ,  G01P15/08

CPC分类号： G01P15/125

摘要： First and second detection frames are supported by a substrate to be rotatable about first and second torsion axes. A first link beam is connected to the first detection frame on an axis located at a position moved from a position of the first torsion axis in a first direction crossing the first torsion axis and directed to one end side of the first detection frame. A second link beam is connected to the second detection frame on an axis located at a position shifted from a position of the second torsion axis in a second direction opposite to the first direction. An inertia mass body is displaceable in a thickness direction of the substrate by being linked with the first and second detection frames by the first and second link beams, respectively. This constitution makes it possible to obtain a highly precise acceleration sensor hardly influenced by disturbances.

摘要翻译： 第一和第二检测框架由基板支撑以能够围绕第一和第二扭转轴线旋转。 第一连接梁在位于从第一扭转轴的位置在与第一扭转轴相交的第一方向上移动并且指向第一检测框的一端侧的位置处的轴上连接到第一检测框。 第二连杆梁在位于从第二扭转轴的位置偏离与第一方向相反的第二方向的位置的轴上的第二检测框架上连接。 通过分别通过第一和第二连杆梁与第一和第二检测框架链接，惯性质量体可在基板的厚度方向上移动。 这种构造使得可以获得几乎不受扰动影响的高精度加速度传感器。

公开(公告)号：US20080110260A1

公开(公告)日：2008-05-15

申请号：US11933685

申请日：2007-11-01

申请人： Nobuaki KONNO ,  Yoshiaki Hirata

发明人： Nobuaki KONNO ,  Yoshiaki Hirata

IPC分类号： G01P15/125

CPC分类号： G01P15/125

摘要： First and second detection frames are supported by a substrate to be rotatable about first and second torsion axes. A first link beam is connected to the first detection frame on an axis located at a position moved from a position of the first torsion axis in a first direction crossing the first torsion axis and directed to one end side of the first detection frame. A second link beam is connected to the second detection frame on an axis located at a position shifted from a position of the second torsion axis in a second direction opposite to the first direction. An inertia mass body is displaceable in a thickness direction of the substrate by being linked with the first and second detection frames by the first and second link beams, respectively. This constitution makes it possible to obtain a highly precise acceleration sensor hardly influenced by disturbances.

摘要翻译： 第一和第二检测框架由基板支撑以能够围绕第一和第二扭转轴线旋转。 第一连接梁在位于从第一扭转轴的位置在与第一扭转轴相交的第一方向上移动并且指向第一检测框的一端侧的位置处的轴上连接到第一检测框。 第二连杆梁在位于从第二扭转轴的位置偏离与第一方向相反的第二方向的位置的轴上的第二检测框架上连接。 通过分别通过第一和第二连杆梁与第一和第二检测框架链接，惯性质量体可在基板的厚度方向上移动。 这种构造使得可以获得几乎不受扰动影响的高精度加速度传感器。