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公开(公告)号：US20110055983A1
公开(公告)日：2011-03-03
申请号：US12990070
申请日：2009-04-08
申请人： Hideki Kawakatsu , Dai Kobayashi
发明人： Hideki Kawakatsu , Dai Kobayashi
IPC分类号： G01Q20/00
CPC分类号： G01Q60/34
摘要： There is provided a dynamic mode AFM apparatus that configures an automatic control system which can automatically obtain a probe-sample distance, and allows high-speed identification of atoms of the sample surface.The dynamic mode AFM apparatus comprises: a scanner 3 for performing three-dimensional relative scanning of a cantilever 2 and a sample 1; a means 8 for generating an AC signal of a resonance frequency in a mode with flexural vibration of the cantilever 2; a means 9 for exciting the flexural vibration of the cantilever 2 with the resonance frequency; a means 10 for generating an AC signal of a second frequency which is lower than the frequency of the flexural vibration; a means 11 for modulating a probe 2A-sample 1 distance of the cantilever 2 with the second frequency; a means 5 for detecting fluctuation of the resonance frequency; a means 4 for detecting vibration of the cantilever; and a means 6 for detecting a fluctuation component which is contained in a detected signal by the means 5 for detecting the resonance frequency fluctuation and synchronized with a modulation signal of the probe 2A-sample 1 distance, wherein an inclination of the resonance frequency against the probe 2A-sample 1 distance is obtained from the strength and polarity of the fluctuation component.
摘要翻译： 提供了一种动态模式AFM装置，其配置自动控制系统，其可以自动获得探针样本距离，并允许高速识别样品表面的原子。 动态模式AFM装置包括：用于执行悬臂2和样本1的三维相对扫描的扫描器3; 用于产生具有悬臂2的弯曲振动的模式的共振频率的AC信号的装置8; 用于以共振频率激发悬臂2的弯曲振动的装置9; 用于产生低于弯曲振动频率的第二频率的交流信号的装置10; 用于以第二频率调制悬臂2的探针2A-样本1距离的装置11; 用于检测谐振频率的波动的装置5; 用于检测悬臂的振动的装置4; 以及用于通过用于检测谐振频率波动的装置5检测包含在检测信号中的波动分量并与探头2A-样本1距离的调制信号同步的装置6，其中谐振频率相对于 从波动分量的强度和极性获得探针2A-样本1的距离。
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公开(公告)号：US20090224850A1
公开(公告)日：2009-09-10
申请号：US11569883
申请日：2005-07-22
CPC分类号： H03H3/0076 , H03H9/02259 , H03H9/02433 , H03H9/2463 , H03H2009/02519
摘要： A torsional resonator for suppressing unnecessary flexural vibration and providing excellent resonance characteristic is provided.A vibrator is a beam structure or a paddle-like projection structure added onto a beam structure and an electrostatic force produced due to the potential difference between an electrode and the vibrator adds a moment with the axis of the beam of the vibrator as the center axis, but does not add a force for producing flexure to the beam. As one method, the same AC signal and DC bias voltages different in polarity are applied to an electrode pair of the electrode brought away from the vibrator and the electrode brought close to the vibrator with torsional vibration of the vibrator, so that only torsional vibration can be excited.
摘要翻译： 提供用于抑制不必要的弯曲振动并提供优异的谐振特性的扭转谐振器。 振动器是加在梁结构上的梁结构或桨状突起结构，由于电极和振子之间的电位差而产生的静电力与振动器的梁的轴线作为中心轴 ，但不会增加用于产生挠曲梁的力。 作为一种方法，将不同极性的相同AC信号和DC偏置电压施加到远离振动器的电极的电极对上，并且电极靠近振动器带来振动器的扭转振动，使得只有扭转振动可以 兴奋。
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3.发明授权Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers 失效悬臂阵列及其制造方法，扫描探针显微镜，引导旋转机构的滑动装置，传感器，零差激光干涉仪，具有激发样品的光学激发功能的激光多普勒干涉仪，各自使用，以及用于激发悬臂的方法公开(公告)号：US07411189B2
公开(公告)日：2008-08-12
申请号：US11454987
申请日：2006-06-19
申请人： Hideki Kawakatsu
发明人： Hideki Kawakatsu
CPC分类号： G01B9/02045 , G01B9/02002 , G01H9/004 , G01Q20/02 , G01Q70/06 , G01Q70/12
摘要： A cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers. The cantilever array includes a large number of compliant cantilevers sliding on a surface of a sample.
摘要翻译： 具有简单结构并能够可靠地检测样品表面的悬臂阵列，其制造方法，扫描探针显微镜，引导和旋转机构的滑动装置，传感器，零差激光干涉仪， 具有用于激发样品的光学激发功能的激光多普勒干涉仪，各自使用它们以及用于激发悬臂的方法。 悬臂阵列包括在样品表面上滑动的大量柔顺悬臂。
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公开(公告)号：US20080088205A1
公开(公告)日：2008-04-17
申请号：US11596757
申请日：2005-05-20
申请人： Hideki Kawakatsu
发明人： Hideki Kawakatsu
摘要： A precise and high load resistance moving method and device is provided, in which a piezoelectric element which generates a shear deformation and a wedge, or, a piezoelectric element which generates a shear deformation, a piezoelectric element which generates a vertical deformation, and a wedge are combined, and a moving body can be precisely moved in a perpendicular direction even when large force is applied to a sliding surface. A precise and high load resistance moving method and device is provided, in which by layering piezoelectric elements which generate shear deformations so that their shear directions differ, and by combining with a wedge, a moving body can be precisely moved in a perpendicular direction even when large force is applied to a sliding surface. A wedge-shaped moving element 23 arranged on a surface in a horizontal direction of a fixed body, and to which a piezoelectric element 24A which generates a shear deformation is fixed, a pulse source 30 for rapidly deforming and driving the piezoelectric element 24A, and a moving body 25 which contacts a wall surface 22 of the fixed body in the perpendicular direction by a drive of the wedge-shaped moving element 23 and moves in the perpendicular direction are provided, and by striking or extracting the wedge-shaped moving element 23 to/from the moving body 25, a movement positioning of the moving body 25 is performed.
摘要翻译： 提供了一种精确且高负载电阻的移动方法和装置，其中产生剪切变形的压电元件和楔形体，或产生剪切变形的压电元件，产生垂直变形的压电元件和楔形 并且即使当大的力施加到滑动表面时，移动体也可以在垂直方向上精确地移动。 提供了一种精确且高负载电阻的移动方法和装置，其中通过分层产生剪切变形的压电元件使其剪切方向不同，并且通过与楔形结合，移动体可以精确地沿垂直方向移动，即使当 大的力被施加到滑动表面。 布置在固定体的水平方向的表面上并且固定有产生剪切变形的压电元件24A的楔形移动元件23，用于使压电元件24A快速变形和驱动的脉冲源30 以及通过楔形运动元件23的驱动而在垂直方向上与固定体的壁面22接触并沿垂直方向移动的移动体25，并且通过敲击或提取楔形移动 元件23移动到移动体25，进行移动体25的移动定位。
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5.发明申请Nanogap series substance capturing, detecting and identifying method and device 审中-公开Nanogap系列物质捕获，检测和识别方法及装置公开(公告)号：US20070140905A1
公开(公告)日：2007-06-21
申请号：US10594514
申请日：2005-03-29
申请人： Hideki Kawakatsu
发明人： Hideki Kawakatsu
IPC分类号： G01N33/48
摘要： A nanogap array method and device are provided which can trap, detect, and identify a substance with high sensitivity even if the substance to be detected is molecules contained in liquid. This device includes a cantilever array (3) including cantilevers (4) each having a probe (5), and a substrate (1) disposed below the cantilever array (3) and having modified surfaced (2) arranged so as to correspond to the probe (5) of each cantilever (4). Nanometer-sized gaps are defined between the modified surfaces (2) of the substrate (1) and tips of the probes (5) of the cantilevers (4) to trap, detect, and identify at least one unknown substance (6) set on the modified surfaces (2).
摘要翻译： 提供了一种能够捕获，检测和识别具有高灵敏度的物质的纳米晶阵列方法和装置，即使待检测的物质是液体中包含的分子。 该装置包括悬臂阵列（3），其包括各自具有探针（5）的悬臂（4）和布置在悬臂阵列（3）下方并且具有改进的表面（2）的基底（1），其布置成对应于 每个悬臂（4）的探头（5）。 在衬底（1）的改性表面（2）和悬臂（4）的探针（5）的尖端之间限定纳米尺寸的间隙，以捕获，检测和识别至少一个未设定的物质（6） 改性表面（2）。
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6.发明申请Three-dimensional structure composed of silicon fine wires, method for producing the same, and device including the same 审中-公开由硅细丝构成的三维结构体及其制造方法及其制造方法公开(公告)号：US20060273445A1
公开(公告)日：2006-12-07
申请号：US11504715
申请日：2006-08-16
申请人： Hideki Kawakatsu , Dai Kobayashi
发明人： Hideki Kawakatsu , Dai Kobayashi
CPC分类号： G01Q70/06 , G01Q60/38 , Y10S438/947
摘要： A three-dimensional structure composed of highly-reliable silicon ultrafine wires, a method for producing the three-dimensional structure, and a device including the same are provided. The three-dimensional structure composed of silicon fine wires includes wires (2) on the order of nanometers to micrometers formed by wet etching utilizing the crystallinity of a single-crystal material.
摘要翻译： 提供了由高可靠性的硅超细线组成的三维结构，三维结构的制造方法和包括该三维结构的装置。 由硅细丝组成的三维结构包括使用单晶材料的结晶度通过湿法蚀刻形成的数毫米至数微米的线（2）。
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公开(公告)号：US07834519B2
公开(公告)日：2010-11-16
申请号：US12556384
申请日：2009-09-09
申请人： Hideki Kawakatsu
发明人： Hideki Kawakatsu
IPC分类号： H01L41/00
摘要： A precise and high load resistance moving method to perform fine movement positioning of the moving body, by fixing a piezoelectric element which generates a shear deformation, to a bottom surface of a wedge-shaped moving element placed on a base, and deforming the piezoelectric element by driving the piezoelectric element with drive pulses to move the wedge-shaped moving element along a first axis in which the wedge-shaped moving element drives into or away from a moving body to move the moving body along a second axis in upward and downward direction relative to the base. Also, a precise and high load resistance moving device including a wedge-shaped moving element, a pulse source, and a moving body vertically movable in upward or downward direction relative to the base.
摘要翻译： 一种精确且高负载电阻的移动方法，通过将产生剪切变形的压电元件固定到放置在基座上的楔形移动元件的底表面，并且使压电元件 通过用驱动脉冲驱动压电元件，以使楔形移动元件沿楔形移动元件驱动到移动体中或远离移动体的第一轴线移动，以沿着第二轴线向上和向下移动移动体 相对于基地。 而且，具有楔形运动元件，脉冲源以及相对于基座可向上或向下垂直移动的移动体的精确且高负载的移动装置。
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公开(公告)号：US07719663B2
公开(公告)日：2010-05-18
申请号：US11817357
申请日：2006-03-02
申请人： Hideki Kawakatsu
发明人： Hideki Kawakatsu
IPC分类号： G01P3/36
摘要： A heterodyne laser having a first optical path for guiding excitation light and a second optical path for guiding measurement light. The heterodyne laser includes an optical probe body for optically coupling and structurally combining the first optical path and the second optical path, and includes a reflection mirror, a beam splitter, a focal lens and a ¼ wavelength plate. The excitation light from the first optical path is introduced through the reflection mirror, the beam splitter and the focal lens into a measurement object.
摘要翻译： 具有用于引导激发光的第一光路和用于引导测量光的第二光路的外差激光器。 外差激光器包括用于光学耦合并结构地组合第一光路和第二光路的光学探针体，并且包括反射镜，分束器，聚焦透镜和1/4波长板。 来自第一光路的激发光通过反射镜，分束器和聚焦透镜引入测量对象。
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公开(公告)号：US20100060105A1
公开(公告)日：2010-03-11
申请号：US12556384
申请日：2009-09-09
申请人： Hideki KAWAKATSU
发明人： Hideki KAWAKATSU
IPC分类号： H02N2/04
摘要： A precise and high load resistance moving method to perform fine movement positioning of the moving body, by fixing a piezoelectric element which generates a shear deformation, to a bottom surface of a wedge-shaped moving element placed on a base, and deforming the piezoelectric element by driving the piezoelectric element with drive pulses to move the wedge-shaped moving element along a first axis in which the wedge-shaped moving element drives into or away from a moving body to move the moving body along a second axis in upward and downward direction relative to the base. Also, a precise and high load resistance moving device including a wedge-shaped moving element, a pulse source, and a moving body vertically movable in upward or downward direction relative to the base.
摘要翻译： 一种精确且高负载电阻的移动方法，通过将产生剪切变形的压电元件固定到放置在基座上的楔形移动元件的底表面，并且使压电元件 通过用驱动脉冲驱动压电元件，以使楔形移动元件沿楔形移动元件驱动到移动体中或远离移动体的第一轴线移动，以沿着第二轴线向上和向下移动移动体 相对于基地。 而且，具有楔形运动元件，脉冲源以及相对于底座可向上或向下垂直移动的移动体的精确且高负载的移动装置。
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10.发明授权公开(公告)号：US07545508B2
公开(公告)日：2009-06-09
申请号：US11454986
申请日：2006-06-19
申请人： Hideki Kawakatsu
发明人： Hideki Kawakatsu
CPC分类号： G01B9/02045 , G01B9/02002 , G01H9/004 , G01Q20/02 , G01Q70/06 , G01Q70/12
摘要： A cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers. The cantilever array includes a large number of compliant cantilevers sliding on a surface of a sample.
摘要翻译： 具有简单结构并能够可靠地检测样品表面的悬臂阵列，其制造方法，扫描探针显微镜，引导和旋转机构的滑动装置，传感器，零差激光干涉仪， 具有用于激发样品的光学激发功能的激光多普勒干涉仪，各自使用它们以及用于激发悬臂的方法。 悬臂阵列包括在样品表面上滑动的大量柔顺悬臂。
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