公开(公告)号：US06555257B1

公开(公告)日：2003-04-29

申请号：US09177804

申请日：1998-10-23

申请人： Masao Nishioka ,  Naotaka Katoh ,  Shinji Kawasaki

发明人： Masao Nishioka ,  Naotaka Katoh ,  Shinji Kawasaki

IPC分类号： B32B900

CPC分类号： C04B41/009 ,  C04B41/5059 ,  C04B41/87 ,  C04B2111/94 ,  C23C16/325 ,  Y02E60/321 ,  Y10T428/24479 ,  Y10T428/24942 ,  C04B41/4531 ,  C04B35/00 ,  C04B35/565

摘要： This invention relates to a corrosion-resistant member comprising a ceramic substrate and a silicon carbide film formed through a chemical vapor deposition process and having a resistivity at room temperature of 20-500 &OHgr;·cm, and a method of manufacturing the same as well as an heating apparatus using the same.

摘要翻译： 本发明涉及一种耐腐蚀构件，其包括陶瓷基板和通过化学气相沉积方法形成的碳化硅膜，并且在室温下的电阻率为20-500欧米加/厘米3，其制造方法以及 使用该加热装置的加热装置。

公开(公告)号：US06265077B1

公开(公告)日：2001-07-24

申请号：US09260941

申请日：1999-03-02

申请人： Mitsuji Ikeda ,  Masao Nishioka ,  Naotaka Katoh

发明人： Mitsuji Ikeda ,  Masao Nishioka ,  Naotaka Katoh

IPC分类号： B32B904

CPC分类号： C04B41/5059 ,  C23C16/0236 ,  C23C16/325 ,  C23C16/4581 ,  Y10T428/1414 ,  Y10T428/1443

摘要： A ceramic article having a base made of an insulating ceramic material, the insulating ceramic material includes a metal element, and a conductive surface layer provided on the base, wherein the conductive surface layer includes carbon atoms as its main component, and wherein the conductive surface layer further includes silicon atoms and atoms of the metal element present in the insulating ceramic material.

摘要翻译： 一种陶瓷制品，其具有由绝缘陶瓷材料制成的基底，所述绝缘陶瓷材料包括金属元件和设置在所述基底上的导电表面层，其中所述导电表面层包括碳原子作为其主要成分，并且其中所述导电表面 层还包括存在于绝缘陶瓷材料中的金属元素的硅原子和原子。

公开(公告)号：US08498093B2

公开(公告)日：2013-07-30

申请号：US12877349

申请日：2010-09-08

申请人： Masao Nishioka

发明人： Masao Nishioka

IPC分类号： H01T23/00

CPC分类号： H01L21/6833 ,  C04B35/053 ,  C04B35/5607 ,  C04B35/5611 ,  C04B35/5626 ,  C04B35/62655 ,  C04B35/62695 ,  C04B35/645 ,  C04B2235/3206 ,  C04B2235/3277 ,  C04B2235/3839 ,  C04B2235/3843 ,  C04B2235/3847 ,  C04B2235/5436 ,  C04B2235/656 ,  C04B2235/6567 ,  C04B2235/72 ,  C04B2235/77 ,  C04B2235/963

摘要： An electrostatic chuck includes an electrostatic electrode embedded in a ceramic base having a wafer-supporting surface capable of holding a wafer, the electrostatic electrode being parallel to the wafer-supporting surface. The ceramic base is composed of a dense ceramic having a MgO content of 99% by weight or more. The electrostatic electrode is a disc-like electrode composed of, for example, at least one metal selected from the group consisting of Ni, Co, and Fe. The electrostatic electrode includes a conductive tablet connected to the center thereof. The tablet is exposed at the bottom of a counter-bored hole formed so as to reach the tablet from a back surface of the ceramic base, and is connected to a feeding terminal, composed of Ni, inserted into the counter-bored hole.

摘要翻译： 静电卡盘包括嵌入在具有能够保持晶片的晶片支撑表面的陶瓷基体中的静电电极，静电电极平行于晶片支撑表面。 陶瓷基体由MgO含量为99重量％以上的致密陶瓷构成。 静电电极是由例如由Ni，Co，Fe组成的组中的至少一种金属构成的盘状电极。 静电电极包括连接到其中心的导电片。 片剂暴露在形成为从陶瓷基底的后表面到达片剂的反钻孔的底部，并且连接到插入到钻孔中的由Ni构成的馈电端子。

公开(公告)号：US5138692A

公开(公告)日：1992-08-11

申请号：US672106

申请日：1991-03-19

申请人： Mitsuji Ikeda ,  Masayuki Nozaki ,  Masao Nishioka

发明人： Mitsuji Ikeda ,  Masayuki Nozaki ,  Masao Nishioka

IPC分类号： G02B6/46 ,  G02B6/44 ,  H01B17/00

CPC分类号： G02B6/4417 ,  G02B6/442

摘要： An excellent optical fiber built-in type composite insulator of reduced damage rate in the producing operation and the handling operation thereof, reduced loss of initial light signal transmission and in a desired temperature range, and reduced trouble rate after thermal shock test, is provided. The optical fiber built-in type composite insulator of the present invention having a penetration hole in the central axis portion of the insulator, an optical fiber extending in the penetration hole, and an inorganic glass arranged at both end portions of the penetration hole for sealing the optical fiber therein, comprises protective tubes each having a bore of an inner diameter of substantially equal to the outer diameter of coating portion of the optical fiber to allow insertion of the coating portion of the optical fiber therethrough, each arranged in the penetration hole at such a position that a portion of a coating portion of the optical fiber and a portion of the coating-stripped portion of the optical fiber exist in each bore of the protective tube to protect the portions of the coating portion and the coating-stripped portion of the optical fiber in the both end portions of the penetration hole.

公开(公告)号：US20070221662A1

公开(公告)日：2007-09-27

申请号：US11687900

申请日：2007-03-19

申请人： Masao Nishioka

发明人： Masao Nishioka

IPC分类号： H05B3/44

CPC分类号： H05B3/143 ,  H01L21/67103

摘要： A heating device includes a high-frequency electrode embedded substantially in parallel with a heating surface of a ceramics base in the vicinity of the heating surface. A conducting hole toward this high-frequency electrode is formed in a back face of the ceramics base. This high-frequency electrode has a trapezoidal cone-like concave section toward the conducting hole at a region opposed to the conducting hole.

摘要翻译： 加热装置包括与加热面附近的陶瓷基体的加热面大致平行地嵌入的高频电极。 朝向该高频电极的导电孔形成在陶瓷基体的背面。 该高频电极在与导电孔相对的区域处具有朝向导电孔的梯形锥形凹部。

公开(公告)号：US06387551B1

公开(公告)日：2002-05-14

申请号：US09407998

申请日：1999-09-29

申请人： Masao Nishioka ,  Naotaka Kato

发明人： Masao Nishioka ,  Naotaka Kato

IPC分类号： B32B1500

CPC分类号： H01L21/67103 ,  C04B41/009 ,  C04B41/52 ,  C04B41/89 ,  Y10T428/265 ,  C04B41/4531 ,  C04B41/4556 ,  C04B41/5066 ,  C04B41/5059 ,  C04B35/581

摘要： A structural body has an aluminum nitride sintered body, a silicon carbide film formed on a surface of the sintered body, and an intermediate layer generated between the sintered body and the silicon carbide film. The intermediate layer is mainly made of a silicon nitride. Preferably, the intermediate layer includes smaller than 5 wt % of carbon and smaller than 5 wt % of aluminum, and a thickness of the intermediate layer is greater than 0.2 &mgr;m.

摘要翻译： 结构体具有氮化铝烧结体，在烧结体的表面上形成的碳化硅膜和在烧结体和碳化硅膜之间产生的中间层。 中间层主要由氮化硅制成。 优选地，中间层包括小于5重量％的碳和小于5重量％的铝，并且中间层的厚度大于0.2μm。

公开(公告)号：US6117573A

公开(公告)日：2000-09-12

申请号：US172607

申请日：1998-10-15

申请人： Masao Nishioka ,  Keiichiro Watanabe

发明人： Masao Nishioka ,  Keiichiro Watanabe

IPC分类号： C23C16/42 ,  C04B41/50 ,  C04B41/87 ,  C23C16/32 ,  C23C16/56 ,  B32B18/00

CPC分类号： C04B41/009 ,  C04B41/5059 ,  C04B41/87 ,  C23C16/325 ,  C23C16/56 ,  C04B2111/20 ,  Y10T428/2495 ,  Y10T428/24992

摘要： A corrosion-resistant member includes a substrate made of a ceramic material and having a diameter of at least 200 mm, and a film of chemically vapor deposited silicon carbide having a thickness of not less than 0.5 mm and covering at least such a portion of the surface of the substrate that is to contact a corrosive material. A process is disclosed for producing such a corrosion-resistant member, which process includes thermally treating the film at a temperature higher, by not less than 50.degree. C. centigrade, than a film-forming temperature at which the film of silicon carbide is formed, after the formation of the silicon carbide film.

摘要翻译： 耐腐蚀构件包括由陶瓷材料制成并具有至少200mm直径的基板和厚度不小于0.5mm的化学气相沉积碳化硅膜，并覆盖至少一部分 要接触腐蚀性材料的基板的表面。 公开了一种用于制造这种耐腐蚀构件的方法，该方法包括在比形成碳化硅膜的成膜温度更高不低于50℃的温度下热处理该膜 ，形成碳化硅膜后。

公开(公告)号：US5127083A

公开(公告)日：1992-06-30

申请号：US669006

申请日：1991-03-13

申请人： Mitsuji Ikeda ,  Masayuki Nozaki ,  Masao Nishioka

发明人： Mitsuji Ikeda ,  Masayuki Nozaki ,  Masao Nishioka

IPC分类号： G02B6/46 ,  G02B6/00 ,  G02B6/44 ,  H01B17/00 ,  H01B19/00

CPC分类号： G02B6/442

摘要： An excellent optical fiber built-in type composite insulator is provided having a reliable and durable sealing portion in a central axis penetration hole of the insulator for sealing the optical fiber in a very quick, simple and economical way with reduced members, devices and production steps. The composite insulator includes a ceramic insulator having a penetration hole in its central axis portion, at least one optical fiber inserted in the penetration hole, and sealing portions made of inorganic glass arranged at both ends of the penetration hole for sealing the optical fiber therein, and comprises recessed portions of the ceramic insulator arranged around the ends of the penetration hole, and heat generating elements arranged in the recessed portions for heating and melting the inorganic glass to form the sealing portions at the both ends of the penetration hole. The present invention provides also a method of producing the composite insulator.

公开(公告)号：US07800029B2

公开(公告)日：2010-09-21

申请号：US11687900

申请日：2007-03-19

申请人： Masao Nishioka

发明人： Masao Nishioka

IPC分类号： H05B3/44 ,  C23F1/00

CPC分类号： H05B3/143 ,  H01L21/67103

摘要： A heating device includes a high-frequency electrode embedded substantially in parallel with a heating surface of a ceramics base in the vicinity of the heating surface. A conducting hole toward this high-frequency electrode is formed in a back face of the ceramics base. This high-frequency electrode has a trapezoidal cone-like concave section toward the conducting hole at a region opposed to the conducting hole.

摘要翻译： 加热装置包括与加热面附近的陶瓷基体的加热面大致平行地嵌入的高频电极。 朝向该高频电极的导电孔形成在陶瓷基体的背面。 该高频电极在与导电孔相对的区域处具有朝向导电孔的梯形锥形凹部。

公开(公告)号：US5897971A

公开(公告)日：1999-04-27

申请号：US773848

申请日：1996-12-27

申请人： Kiyoshi Araki ,  Masao Nishioka

发明人： Kiyoshi Araki ,  Masao Nishioka

IPC分类号： C04B35/622 ,  C04B35/01 ,  C04B35/634 ,  C04B35/636 ,  C04B38/06 ,  H01M4/86 ,  H01M4/88 ,  H01M8/12

CPC分类号： C04B35/63416 ,  C04B35/016 ,  C04B35/634 ,  C04B35/6365 ,  C04B38/0675 ,  H01M4/8885 ,  H01M4/9033 ,  C04B2111/00853

摘要： For the production of sintered lanthanum manganite bodies, such as tubes for solid oxide fuel cell air electrodes, there is used extrudable lanthanum manganite paste having a pH of not less than 8, of a dried unfired extruded lanthanum manganite body formed of material having a pH, measured by grinding the material and diluting with water, of at least 7.3. Providing alkalinity in such a paste or body reduces crack formation and increases productivity.

摘要翻译： 对于用于固体氧化物燃料电池空气电极的管的烧结镧亚锰矿体的制造，使用具有pH值的不溶于8的可膨胀的镧锰酸锂糊料，其由具有pH的材料形成的干燥的未烧结的镧镧锰酸盐体 通过研磨材料并用水稀释测定，至少为7.3。 在这种糊状物中提供碱度可以减少裂纹的形成并提高生产率。