公开(公告)号：US06478883B1

公开(公告)日：2002-11-12

申请号：US09529661

申请日：2000-04-18

申请人： Masaro Tamatsuka ,  Ken Aihara ,  Katsuhiko Miki ,  Hiroshi Takeno ,  Yoshinori Hayamizu

发明人： Masaro Tamatsuka ,  Ken Aihara ,  Katsuhiko Miki ,  Hiroshi Takeno ,  Yoshinori Hayamizu

IPC分类号： H01L2930

CPC分类号： C30B29/06 ,  C30B15/00 ,  H01L21/3225

摘要： A silicon wafer for epitaxial growth consisting of a highly boron-doped silicon single crystal wafer, an antimony-doped silicon single crystal wafer or a phosphorus-doped silicon single crystal wafer, which allows easy oxygen precipitation and exhibits high gettering ability in spite of its suppressed oxygen concentration, and an epitaxial silicon wafer in which an epitaxial layer grown by using the aforementioned wafer as a substrate wafer has an extremely low heavy metal impurity concentration are produced with high productivity and supplied. The present invention relates to a boron-doped silicon single crystal wafer having a resistivity of from 10 m&OHgr;·cm to 100 m&OHgr;·cm, an antimony-doped silicon single crystal wafer, or a phosphorus-doped silicon single crystal wafer, which are produced by slicing a silicon single crystal ingot grown by the Czochralski method with nitrogen doping. The present invention also relates to an epitaxial wafer, wherein an epitaxial layer is formed on a surface of the aforementioned wafers. The present invention further relates to method for producing them.

摘要翻译： 用于外延生长的硅晶片由高掺硼硅单晶晶片，锑掺杂硅单晶晶片或磷掺杂硅单晶晶片组成，其允许容易的氧沉淀并且表现出高的吸杂能力 抑制氧浓度，并且以高生产率生产其中通过使用上述晶片生长的外延层作为基板晶片具有极低重金属杂质浓度的外延硅晶片。 本发明涉及电阻率为10mOMEGA.cm至100mOMEGA.cm的硼掺杂硅单晶晶片，掺锑硅单晶晶片或磷掺杂硅单晶晶片，其生产 通过用氮掺杂切片通过Czochralski法生长的硅单晶锭。 本发明还涉及外延晶片，其中在上述晶片的表面上形成外延层。 本发明还涉及它们的制造方法。

公开(公告)号：US06291874B1

公开(公告)日：2001-09-18

申请号：US09313680

申请日：1999-05-18

申请人： Masaro Tamatsuka ,  Katsuhiko Miki

发明人： Masaro Tamatsuka ,  Katsuhiko Miki

IPC分类号： H01L29167

CPC分类号： C30B29/06 ,  C30B15/00 ,  C30B33/00

摘要： There are disclosed a method for producing a silicon single crystal wafer for particle monitoring, which comprises growing a silicon single crystal ingot doped with nitrogen by the Czochralski method, and processing the single crystal ingot into wafers to produce the silicon single crystal wafer for particle monitoring; and a silicon single crystal wafer for particle monitoring, which is a silicon single crystal wafer for particle monitoring obtained by processing a silicon single crystal ingot into wafers, which ingot has been produced by the Czochralski method while doped with nitrogen. The method of the present invention can produce silicon single crystal wafers for particle monitoring having few pits on wafer surfaces with high productivity.

摘要翻译： 公开了一种用于制造用于粒子监测的硅单晶晶片的方法，其包括通过切克劳斯基法（Czochralski method）生长掺杂有氮的硅单晶锭，并将单晶锭加工成晶片以制备用于粒子监测的硅单晶晶片 ; 以及用于粒子监测的硅单晶晶片，其是通过将硅单晶锭加工成晶片而获得的用于粒子监测的硅单晶晶片，该晶锭已经通过切克劳斯基法以氮掺杂生产。 本发明的方法可以以高生产率制造用于颗粒监测的硅单晶晶片，其在晶片表面上具有很少的凹坑。

公开(公告)号：US06299982B1

公开(公告)日：2001-10-09

申请号：US09313856

申请日：1999-05-18

申请人： Masaro Tamatsuka ,  Akihiro Kimura ,  Katsuhiko Miki ,  Makoto Iida

发明人： Masaro Tamatsuka ,  Akihiro Kimura ,  Katsuhiko Miki ,  Makoto Iida

IPC分类号： C03B1529

CPC分类号： C30B29/06 ,  C30B15/206 ,  C30B33/00

摘要： There is disclosed a silicon single crystal wafer produced by processing a silicon single crystal ingot grown by Czochralski method with doping nitrogen, wherein a size of grown-in defects in the silicon single crystal wafer is 70 nm or less, a silicon single crystal wafer produced by processing a silicon single crystal ingot grown by Czochralski method with doping nitrogen, the silicon single crystal ingot is grown with controlling a rate of cooling from 1150 to 1080° C. to be 2.3° C./min or more, and a method for producing a silicon single crystal wafer wherein a silicon single crystal ingot is grown with doping nitrogen and controlling a rate of cooling from 1150 to 1080° C. to be 2.3° C./min or more, and is then processed to provide a silicon single crystal wafer. The silicon single crystal wafer for device wherein growth of the crystal defects is suppressed can be produced by CZ method in high productivity.

摘要翻译： 公开了通过用掺杂氮处理通过Czochralski法生长的硅单晶锭制造的硅单晶晶片，其中硅单晶晶片中的长期缺陷的尺寸为70nm以下，制造的硅单晶晶片 通过处理通过掺杂氮气的切克劳斯基法生长的硅单晶锭，生长硅单晶锭，控制冷却速率为1150℃至1080℃，为2.3℃/分钟以上， 制造硅单晶晶片，其中使用掺杂氮气生长硅单晶锭，并将冷却速率控制在1150至1080℃至2.3℃/分钟以上，然后进行处理以提供硅单晶 晶圆。 可以通过CZ法以高生产率制造晶体缺陷生长被抑制的器件用硅单晶晶片。

公开(公告)号：US20060180981A1

公开(公告)日：2006-08-17

申请号：US11270496

申请日：2005-11-10

申请人： Katsuhiko Miki

发明人： Katsuhiko Miki

IPC分类号： B65H5/00

CPC分类号： B65H1/04 ,  B65H1/266 ,  B65H2405/13 ,  B65H2405/31 ,  B65H2511/10 ,  B65H2220/03 ,  B65H2220/01

摘要： A detector detects a size of a recording medium stored in a tray of a device. The tray includes a first regulating member that can slide in a width direction of the recording medium, and a second regulating member that can slide in a feed direction of the recording medium. A first movable member engages with the first regulating member, and a second movable member, overlapped by the first movable member, engages with the second regulating member. Both the first and second movable members rotate around a common pivot and include convex members on peripheral edges thereof. Switches are selectively pressed by the convex members when the tray is attached to the device.

摘要翻译： 检测器检测存储在设备的托盘中的记录介质的尺寸。 托盘包括能够在记录介质的宽度方向上滑动的第一调节构件和能够在记录介质的进给方向上滑动的第二调节构件。 第一可动构件与第一调节构件接合，并且与第一可动构件重叠的第二可动构件与第二调节构件接合。 第一和第二可移动构件都围绕公共枢轴旋转并且在其周边边缘上包括凸起构件。 当托盘附接到设备时，开关被凸起构件选择性地按压。

公开(公告)号：US20050196211A1

公开(公告)日：2005-09-08

申请号：US11069953

申请日：2005-03-03

申请人： Katsuhiko Miki

发明人： Katsuhiko Miki

IPC分类号： B65H1/00 ,  B65H1/04 ,  B65H1/26 ,  G03G15/00

CPC分类号： B65H1/266 ,  B65H2220/09 ,  B65H2511/10 ,  B65H2511/20 ,  B65H2553/25 ,  B65H2220/01 ,  B65H2220/11 ,  B65H2220/03

摘要： A paper feed cassette, a recording medium size detector capable of detecting, with a simple constitution and with high accuracy, the size of the recording medium loaded on the paper feed cassette, and an image formation device comprising this recording medium size detector. Side fences and an end fence are slidably provided to a cassette body detachably installed in the body case, and a first movable member which moves in synchronization with the sliding motion of the side fences, and a second movable member which moves in synchronization with the sliding motion of the end fence are provided to the cassette body in an overlapping state. A plurality of synthesized convex portions are formed by overlapping a plurality of first convex portions formed on the first movable member and a plurality of second convex portions formed on the second movable member, and, by sliding the side fences and the end fence in accordance with the size of the recording medium loaded on the cassette body, the width size and position of the synthesized convex portions change in accordance with the size of the recording medium loaded on the cassette body.

摘要翻译： 一种供纸盒，能够以简单的结构和高精度检测装载在供纸盒上的记录介质的尺寸的记录介质尺寸检测器，以及包括该记录介质尺寸检测器的图像形成装置。 侧挡板和端挡板可滑动地设置到可拆卸地安装在主体壳体中的盒体上，以及第一可动构件，其与侧挡板的滑动运动同步地移动;以及第二可移动构件，其与滑动同步移动 端盖的运动以重叠的状态提供给盒体。 多个合成凸部通过将形成在第一可动部件上的多个第一凸部和形成在第二可动部件上的多个第二凸部重叠而形成，并且通过使侧挡板和端挡板滑动， 装载在盒体上的记录介质的尺寸，合成凸部的宽度尺寸和位置根据装在盒体上的记录介质的尺寸而变化。

公开(公告)号：US5099122A

公开(公告)日：1992-03-24

申请号：US441304

申请日：1989-11-27

申请人： Katsuhiko Miki

发明人： Katsuhiko Miki

IPC分类号： C30B29/06 ,  C30B25/02 ,  C30B33/00 ,  G02B6/13 ,  H01L21/205 ,  H01L21/66

CPC分类号： C30B29/06 ,  C30B25/02 ,  G02B6/131

摘要： A method is disclosed for evaluation of the transition region of a silicon epitaxial wafer comprising obtaining the waveform of an interferogram signal for reflected light by irradiation the silicon epitaxial wafer with infrared radiation followed by measurement of the intensity of the light of the interference fringe employing a Michelson interferometer and obtaining the extent of the transition region of the silicon epitaxial wafer by measuring the distance between the maximum peak of the waveform in the side burst region in the interferogram signal and the peak adjacent to said maximum peak of the waveform in the side burst region in the interferogram signal and the distance between the maximum peak and the bottom first coming after said maximum peak of the waveform in the side burst region in the interferogram signal, or the difference in height between the maximum peak and the bottom first coming after said maximum peak of the waveform in the side burst region in the interferogram signal.

公开(公告)号：US07413188B2

公开(公告)日：2008-08-19

申请号：US11069953

申请日：2005-03-03

申请人： Katsuhiko Miki

发明人： Katsuhiko Miki

IPC分类号： B65H1/00

CPC分类号： B65H1/266 ,  B65H2220/09 ,  B65H2511/10 ,  B65H2511/20 ,  B65H2553/25 ,  B65H2220/01 ,  B65H2220/11 ,  B65H2220/03

摘要： A paper feed cassette capable of detecting the size of the recording medium loaded on the paper feed cassette, and an image formation device comprising this recording medium size detector. Side fences and an end fence are slidably provided to a cassette body detachably installed in the body case, and a first movable member which moves in synchronization with the sliding motion of the side fences, and a second movable member which moves in synchronization with the sliding motion of the end fence are provided to the cassette body in an overlapping state. A plurality of synthesized convex portions are formed by overlapping a plurality of first convex portions formed on the first movable member and a plurality of second convex portions formed on the second movable member, and, by sliding the side fences and the end fence in accordance with the size of the recording medium loaded on the cassette body, the width size and position of the synthesized convex portions change in accordance with the size of the recording medium loaded on the cassette body.

摘要翻译： 一种能够检测装载在供纸盒上的记录介质尺寸的供纸盒，以及包括该记录介质尺寸检测器的图像形成装置。 侧挡板和端挡板可滑动地设置到可拆卸地安装在主体壳体中的盒体上，以及第一可动构件，其与侧挡板的滑动运动同步地移动;以及第二可移动构件，其与滑动同步移动 端盖的运动以重叠的状态提供给盒体。 多个合成凸部通过将形成在第一可动部件上的多个第一凸部和形成在第二可动部件上的多个第二凸部重叠而形成，并且通过使侧挡板和端挡板滑动， 装载在盒体上的记录介质的尺寸，合成凸部的宽度尺寸和位置根据装在盒体上的记录介质的尺寸而变化。

公开(公告)号：US20060164456A1

公开(公告)日：2006-07-27

申请号：US11327383

申请日：2006-01-09

申请人： Masaru Yamagishi ,  Nobuo Inoue ,  Kouki Sakamoto ,  Nobuyuki Shimodaira ,  Takashi Koshinuma ,  Yasuharu Gaman ,  Katsuhiko Miki

发明人： Masaru Yamagishi ,  Nobuo Inoue ,  Kouki Sakamoto ,  Nobuyuki Shimodaira ,  Takashi Koshinuma ,  Yasuharu Gaman ,  Katsuhiko Miki

IPC分类号： B41J29/38

CPC分类号： B65H7/125 ,  B65H29/62 ,  B65H2405/31 ,  B65H2511/416 ,  B65H2511/51 ,  B65H2511/524 ,  B65H2515/60 ,  B65H2553/412 ,  B65H2557/23 ,  B65H2557/64 ,  B65H2220/03 ,  B65H2220/01

摘要： A medium discrimination device includes a transmitted light quantity measurement device arranged to measure a transmitted light quantity in a thickness direction of a medium on a conveyance route, and configured to perform a measurement of the transmitted light quantity at each time the medium is conveyed, a measurement value memory device storing a result of the measurement performed by the transmitted light quantity measurement device, a medium setting device configured to previously set a type of medium to be used, a medium information memory device storing information of a transmitted light quantity assigned to each medium to be set by the medium setting device, and a control processing unit configured to perform paper type detection on a first medium, and double feed detection on following mediums.

摘要翻译： 介质识别装置包括透射光量测量装置，其布置成测量传送路径上的介质的厚度方向上的透射光量，并且被配置为在每次传送介质时执行透射光量的测量， 存储由所述透射光量测量装置进行的测量结果的测量值存储装置，配置为预先设定要使用的介质的类型的介质设置装置，存储分配给每一个的传输光量的信息的介质信息存储装置 由介质设定装置设定的介质，以及控制处理单元，被配置为对第一介质进行纸张类型检测，并且在后续介质上进行双进纸检测。

公开(公告)号：US06585253B1

公开(公告)日：2003-07-01

申请号：US09672851

申请日：2000-09-29

申请人： Katsuhiko Miki

发明人： Katsuhiko Miki

IPC分类号： B65H352

CPC分类号： B65H3/5261 ,  B65H2402/515 ,  B65H2403/723 ,  B65H2403/942 ,  B65H2404/1351

摘要： A paper feeder for use in an image forming apparatus is disclosed. The paper feeder applies vibration to paper sheets being paid out together to thereby reduce an adhering force acting between them. The paper feeder therefore reduces the simultaneous feed of two or more papers to a noticeable degree. An image forming apparatus including the paper feeder is also disclosed.

摘要翻译： 公开了一种用于成像设备的供纸盒。 供纸器对一起支付的纸张施加振动，从而减少在它们之间作用的粘合力。 因此，进纸器减少了两个或更多个纸张的同时进给程度。 还公开了一种包括供纸器的成像设备。

公开(公告)号：US5823525A

公开(公告)日：1998-10-20

申请号：US681213

申请日：1996-07-22

申请人： Katsuhiko Miki

发明人： Katsuhiko Miki

IPC分类号： G03G15/00 ,  B65H1/04 ,  B65H1/12 ,  B65H1/24 ,  B65H1/26 ,  B65H1/08

CPC分类号： B65H1/12 ,  B65H2511/10 ,  B65H2515/34

摘要： The current invention generally discloses methods, devices and systems for feeding an image-carrying medium of various sizes to an image-generating machine and more particularly discloses the methods, devices and system of applying a desirable initial pressure to a pile of an image-carrying medium towards a predetermined direction according to the medium size and the initial stack size and of continuously decreasing the pressure as the stack size is reduced.

摘要翻译： 本发明通常公开了用于向图像发生机器馈送各种尺寸的图像载体的方法，装置和系统，并且更具体地公开了将一种所需的初始压力施加到一堆图像携带的方法，装置和系统 介质朝向预定方向，根据介质尺寸和初始堆叠尺寸，并且当堆叠尺寸减小时连续减小压力。