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公开(公告)号：US07204426B2
公开(公告)日：2007-04-17
申请号：US11116416
申请日：2005-04-28
IPC分类号： G06K19/06
CPC分类号： G06K17/0022 , G06K7/0008
摘要： In a support server communicable with a computer through a network, a first receiving unit is configured to receive a control parameter and communication state data transmitted from a reader/writer, a determining unit is configured to determine an update control parameter based on the received control parameter and the communication state data. In the support server, a second transmitting unit is configured to transmit the determined update control parameter to the reader/writer.
摘要翻译： 在通过网络与计算机通信的支持服务器中，第一接收单元被配置为接收从读取器/写入器发送的控制参数和通信状态数据，确定单元被配置为基于所接收的控制来确定更新控制参数 参数和通信状态数据。 在支持服务器中，第二发送单元被配置为将所确定的更新控制参数发送到读取器/写入器。
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2.发明授权Information carrier reader/writer, method and apparatus for supporting the same 失效信息载体读写器，支持相同的方法和装置公开(公告)号：US07357320B2
公开(公告)日：2008-04-15
申请号：US11106686
申请日：2005-04-15
IPC分类号： G06K7/08
CPC分类号： G06K7/10297 , G06K7/0008
摘要： In a reader/writer, a storage unit is configured to store a plurality of parameter files each including a plurality of control parameters required to communications. The parameter files meet the communication characteristics. An identifying unit is configured to try to communicate with the at least one of the information carriers based on every parameter file to identify that one of the parameter files meets the communication characteristic of the at least one of the information carriers based on the tried result.
摘要翻译： 在读取器/写入器中，存储单元被配置为存储多个参数文件，每个参数文件包括通信所需的多个控制参数。 参数文件符合通信特性。 识别单元被配置为基于每个参数文件尝试与所述信息载体中的至少一个进行通信，以基于所尝试的结果来识别参数文件中的一个满足所述至少一个信息载体的通信特性。
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3.发明申请Information carrier reader/writer, method and apparatus for supporting the same 失效信息载体读写器，支持相同的方法和装置公开(公告)号：US20050230475A1
公开(公告)日：2005-10-20
申请号：US11106686
申请日：2005-04-15
CPC分类号： G06K7/10297 , G06K7/0008
摘要： In a reader/writer, a storage unit is configured to store a plurality of parameter files each including a plurality of control parameters required to communications. The parameter files meet the communication characteristics. An identifying unit is configured to try to communicate with the at least one of the information carriers based on every parameter file to identify that one of the parameter files meets the communication characteristic of the at least one of the information carriers based on the tried result.
摘要翻译： 在读取器/写入器中，存储单元被配置为存储多个参数文件，每个参数文件包括通信所需的多个控制参数。 参数文件符合通信特性。 识别单元被配置为基于每个参数文件尝试与所述信息载体中的至少一个进行通信，以基于所尝试的结果来识别参数文件中的一个满足所述至少一个信息载体的通信特性。
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公开(公告)号：US08963680B2
公开(公告)日：2015-02-24
申请号：US11185756
申请日：2005-07-21
CPC分类号： G06K7/0008 , G06K7/10039 , G07C9/00007 , G07C9/00309 , G07C2209/10
摘要： In a contactless communication system, a first storage unit stores a group of access control programs corresponding to plural types of noncontact information carriers, respectively. A second storage unit stores access reference information required to execute the group of access control programs. A program execution unit refers to the access reference information to select at least one program in the group of access control programs based on the reference result. The program execution unit executes the selected at least one program in the group of access control programs based on the access reference information.
摘要翻译： 在非接触通信系统中，第一存储单元分别存储与多种类型的非接触式信息载体相对应的一组访问控制程序。 第二存储单元存储执行该组访问控制程序所需的访问参考信息。 程序执行单元参考访问参考信息，以基于参考结果来选择访问控制程序组中的至少一个程序。 程序执行单元基于访问参考信息执行访问控制程序组中所选择的至少一个程序。
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公开(公告)号：US20060027653A1
公开(公告)日：2006-02-09
申请号：US11116416
申请日：2005-04-28
IPC分类号： G06K7/00
CPC分类号： G06K17/0022 , G06K7/0008
摘要： In a support server communicable with a computer through a network, a first receiving unit is configured to receive a control parameter and communication state data transmitted from a reader/writer, a determining unit is configured to determine an update control parameter based on the received control parameter and the communication state data. In the support server, a second transmitting unit is configured to transmit the determined update control parameter to the reader/writer.
摘要翻译： 在通过网络与计算机通信的支持服务器中，第一接收单元被配置为接收从读取器/写入器发送的控制参数和通信状态数据，确定单元被配置为基于所接收的控制来确定更新控制参数 参数和通信状态数据。 在支持服务器中，第二发送单元被配置为将所确定的更新控制参数发送到读取器/写入器。
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公开(公告)号：US20060020706A1
公开(公告)日：2006-01-26
申请号：US11185756
申请日：2005-07-21
IPC分类号： G06F15/16
CPC分类号： G06K7/0008 , G06K7/10039 , G07C9/00007 , G07C9/00309 , G07C2209/10
摘要： In a contactless communication system, a first storage unit stores a group of access control programs corresponding to plural types of noncontact information carriers, respectively. A second storage unit stores access reference information required to execute the group of access control programs. A program execution unit refers to the access reference information to select at least one program in the group of access control programs based on the reference result. The program execution unit executes the selected at least one program in the group of access control programs based on the access reference information.
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7.发明授权Method and an apparatus for aligning first and second objects with each other 失效用于将第一和第二物体彼此对准的方法和装置
公开(公告)号：US4902133A
公开(公告)日：1990-02-20
申请号：US251842
申请日：1988-09-30
申请人： Toru Tojo , Osamu Kuwabara , Masashi Kamiya , Hisakazu Yoshino
发明人： Toru Tojo , Osamu Kuwabara , Masashi Kamiya , Hisakazu Yoshino
IPC分类号： G01B11/00 , G03F9/00 , H01L21/027 , H01L21/30 , H01L21/68
CPC分类号： G03F9/7049
摘要： A distance between a mask and a wafer is set such that exposure light beams emerged from the mask are converged by the projection lens to be focused on the wafer. According to the present invention, two mask marks of diffraction gratings are formed on the mask and spaced at a predetermined distance from each other. When the alignment light beams are applied to the mask marks, two diffracted light beams of predetermined order emerge individually from the mask marks in such a manner that the respective optical axes of the two diffracted light beams, which are directed opposite to the advancing direction of the diffracted light beams, intersect each other one the first point. Thus, the diffracted light beams advance as if the diffracted light beams were the two light beams emerging from the first point. Therefore, the two diffracted light beams can be focused on the wafer or neighborhood of it. The diffracted light beams can be incident on a wafer mark which is formed on the wafer and is diffraction grating. Thus rediffracted light beams emerge from the wafer mark and are detected, so that the mask and the wafer are aligned with each other. Accordingly, the alignment can be performed, despite a great diffraction between the wave-lengths of the exposure light beam and the alignment light beam.
摘要翻译： 设置掩模和晶片之间的距离使得从掩模出射的曝光光束被投影透镜会聚以聚焦在晶片上。 根据本发明，在掩模上形成两个衍射光栅的掩模标记，并以彼此间隔预定距离。 当将对准光束施加到掩模标记时，预定次数的两个衍射光束从掩模标记分别出现，使得两个衍射光束的相应光轴相对于前进方向 衍射光束与第一点相交。 因此，衍射光束如同衍射光束是从第一点出射的两个光束那样前进。 因此，两个衍射光束可以聚焦在晶片或其附近。 衍射光束可以入射到形成在晶片上的晶片标记，并且是衍射光栅。 因此，从晶片标记出现重衍红光，并被检测，使得掩模和晶片彼此对准。 因此，尽管曝光光束的波长与对准光束之间有很大的衍射，但是可以进行对准。
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8.发明授权
公开(公告)号：US4538081A
公开(公告)日：1985-08-27
申请号：US464148
申请日：1983-02-07
申请人： Masashi Kamiya , Mitsuo Sumiya , Ryoji Yamaguchi
发明人： Masashi Kamiya , Mitsuo Sumiya , Ryoji Yamaguchi
CPC分类号： H02K7/09 , F16C17/02 , F16C32/0402 , F16C32/0417 , F16C33/1015 , G02B26/121 , F16C2370/22
摘要： In an electric motor unit, a spindle is rotatably supported by bearing sections of a dynamic-pressure type, and is floated along its axis by a magnetic thrust bearing. At the bearing sections, air current layers are formed in the gaps between journals of the spindle and bearings by elongated parallel grooves formed along the axis, and the spindle is supported by pressure distributed over the air current layers. In the thrust bearing, rotor magnets fixed to the spindle are attracted to stator magnets fixed to the housing and surrounding the rotor magnets. The spindle is floated along the axis by the attraction between the magnets.
摘要翻译： 在电动机单元中，主轴由动压型的轴承部分可旋转地支撑，并且通过磁性推力轴承沿其轴线浮动。 在轴承部分，通过沿轴线形成的细长的平行槽，在主轴和轴承的轴颈之间的间隙中形成气流层，并且主轴由分布在气流层上的压力支撑。 在推力轴承中，固定在主轴上的转子磁体被固定在壳体上并围绕转子磁体的定子磁体吸引。 主轴通过磁铁之间的吸引力沿轴线浮动。
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公开(公告)号：US4512626A
公开(公告)日：1985-04-23
申请号：US504424
申请日：1983-06-15
IPC分类号： F16C17/02 , B41J2/47 , F16C32/00 , F16C32/04 , F16C32/06 , G02B5/09 , G02B7/18 , G02B26/10 , G02B26/12 , G03G15/04 , H02K7/09 , G02B27/17
CPC分类号： B41J2/471 , F16C17/028 , F16C17/18 , F16C33/1075 , F16C39/063 , G02B26/121 , G02B5/09 , G02B7/18 , H02K7/09 , F16C2370/22 , F16C3/02
摘要： In a rotating mirror scanner, a polygonal mirror is fixed between a pair of journals of a spindle. A rotor is fixed on the spindle, and a rotor magnet constituting a magnetic thrust bearing is fixed to one end of the spindle. One bearing of a dynamic pressure type and a ring-shaped stator magnet which constitutes the magnetic thrust bearing are both fixed in a hollow housing having an opening. The spindle is inserted into the housing through the opening thereof so that the outer peripheral surface of the rotor magnet faces the inner peripheral surface of the stator magnet, and that one journal is fitted in the one bearing. Thus, the spindle is set in the housing. A cover having the other bearing is fitted in the opening of the housing so that the other journal is supported by the other bearing.
摘要翻译： 在旋转镜扫描器中，多面镜固定在主轴的一对轴颈之间。 转子固定在主轴上，构成磁力推力轴承的转子磁体固定在主轴的一端。 构成磁力推力轴承的动压型和环形定子磁体的一个轴承都固定在具有开口的中空壳体中。 主轴通过其开口插入到壳体中，使得转子磁体的外周面面对定子磁体的内周面，并且一个轴颈安装在一个轴承中。 因此，主轴设置在壳体中。 具有另一个轴承的盖子装配在壳体的开口中，使得另一个轴颈由另一个轴承支撑。
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公开(公告)号：US4441026A
公开(公告)日：1984-04-03
申请号：US315731
申请日：1981-10-28
CPC分类号： G01B11/272 , G01B11/12 , G01B5/0002
摘要： A concentricity evaluating system has a stage supported by a hydrostatic bearing in at least one of radial and thrust directions. The angle of rotation of the stage is detected by a rotation angle detector. On the stage a hollow cylindrical member is fixed coaxially. Onto the upper end face of the hollow cylindrical member or into the hole thereof a light beam is applied from a light emitting means, whereby a clear image of the profile of the hole is formed. The image thus formed is enlarged by an optical system. The light beam passing through the optical system reaches a photodiode array which is positioned across a part of the enlarged image. The hollow cylindrical member is rotated, and a displacement meter is detected how the circumference of the hollow cylindrical member varies as the member rotates. Data from the displacement meter, photodiode array and the rotation angle detector are fed to an interface and processed. The data thus processed are fed to a computer, which perform arithmetic operations on these data, thus evaluating the concentricity of the hollow cylindrical member.
摘要翻译： 同心度评估系统具有在径向和推力方向中的至少一个中由静压轴承支撑的台阶。 通过旋转角度检测器检测台的旋转角度。 在舞台上，中空圆柱形构件被同轴地固定。 在中空圆柱形构件的上端面或其孔中，从发光装置施加光束，由此形成孔的轮廓的清晰图像。 这样形成的图像被光学系统放大。 通过光学系统的光束到达位于放大图像的一部分的光电二极管阵列。 中空圆柱形构件旋转，并且检测位移计如何随着构件旋转而中空圆柱形构件的圆周变化。 来自位移计，光电二极管阵列和旋转角度检测器的数据被馈送到接口并进行处理。 将这样处理的数据送入计算机，对这些数据执行算术运算，从而评估中空圆柱形构件的同心度。
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