公开(公告)号：US06984823B2

公开(公告)日：2006-01-10

申请号：US10480535

申请日：2002-06-10

申请人： Masaya Iwaki ,  Norio Baba

发明人： Masaya Iwaki ,  Norio Baba

IPC分类号： H01J37/21 ,  H01J37/153

CPC分类号： H01J37/22 ,  H01J2237/216

摘要： There are provided an electron microscope capable of carrying out focusing and astigmatism correction without depending on characteristics of a sample, and a method for controlling its focus position.The electron microscope according to the present invention comprises: an electron optical system (2); a focus control part (3); an image detecting part (4); a first operating part (11) for mutually dividing first and second transformed images (9) and (10), which are obtained by carrying out the fast Fourier transform of first and second images (7) and (8) detected at two focus positions of a first focus position (f1) and a second focus position (f2) shifted from the first focus position by a known focus shifted quantity Δf, to obtain a measured divided quantity Rexp; divided quantity data (12) previously prepared and stored as a function of focus positions and spatial frequencies as a set of theoretical divided quantities, the theoretical divided quantities being obtained by substituting the two focus positions shifted by the focus shifted quantity Δf for an image transfer function (r,f) to obtain first and second transfer function values K(r;f) and (r;f+Δf) to mutually divide the first and second transfer function values K(r;f1) and (r;f+Δf) on a spatial frequency plane; and a second operating part (13) for making a reference to the divided quantity data (12) to derive a theoretical divided quantity K(r;f0) correlating to the measured divided quantity Rexp, and for deriving a focus position f0 corresponding to the derived theoretical divided quantity K(r;f0)/K(r;f0+Δf) as a first focus position f1.

摘要翻译： 提供了能够进行聚焦和散光校正的电子显微镜，而不依赖于样品的特性，以及用于控制其焦点位置的方法。 根据本发明的电子显微镜包括：电子光学系统（2）; 聚焦控制部（3）; 图像检测部分（4）; 第一操作部分（11），用于通过执行在两个焦点位置处检测到的第一和第二图像（7）和（8）的快速傅立叶变换来获得第一和第二变换图像（9）和（10） 第一对焦位置（f 1）和第二聚焦位置（f 2）从第一聚焦位置移位已知聚焦移动量Deltaf，以获得测量的分割数Rexp; 预先准备并存储作为焦点位置和空间频率的函数的分割数量数据（12）作为一组理论分割量，理论分割量通过将通过焦点移动量Deltaf移位的两个焦点位置替换为图像传送而获得 函数（r，f）以获得第一和第二传递函数值K（r; f）和（r; f + Deltaf），以将第一和第二传递函数值K（r; f 1）和（r; f + Deltaf）在空间频率平面上; 以及用于参考分割数量数据（12）的第二操作部分（13），以导出与测量的分割数量Rexp相关的理论分割量K（r; f 0），并且用于导出对应的对焦位置f 0 作为第一焦点位置f 1的导出的理论分割量K（r; f 0）/ K（r; f 0 + Deltaf）。

公开(公告)号：US5144129A

公开(公告)日：1992-09-01

申请号：US630843

申请日：1990-12-20

申请人： Hiroyuki Kobayashi ,  Koichi Kanaya ,  Norio Baba ,  Mitsuo Ogasawara

发明人： Hiroyuki Kobayashi ,  Koichi Kanaya ,  Norio Baba ,  Mitsuo Ogasawara

IPC分类号： H01J37/153 ,  H01J37/21 ,  H01J37/22 ,  H01J37/28

CPC分类号： H01J37/222 ,  H01J37/28

摘要： An electron microscope comprising an electron gun for generating an electron beam, an irradiation lens system for irradiating a specimen with the electron beam, means for obtaining an image signal of the specimen, a frame memory for storing the image signal, means for obtaining a total accumulation function, which indicates the sum total of accumulated values in a plurality of one-dimensional directions, and in which each of the accumulated values in the plurality of one-dimensional directions indicates accumulation with respect to a frequency of a function obtained by applying one-dimensional Fourier transform to a function obtained by projecting two-dimensional intensity distribution of said image signal in corresponding one-dimensional direction thereof, and means for obtaining a substantial extreme point of the total accumulation function.

公开(公告)号：US07853069B2

公开(公告)日：2010-12-14

申请号：US11810632

申请日：2007-06-06

申请人： Eisaku Katayama ,  Norio Baba ,  Yoshitaka Kimori

发明人： Eisaku Katayama ,  Norio Baba ,  Yoshitaka Kimori

IPC分类号： G06K9/00

CPC分类号： H01J37/22 ,  G01N23/046 ,  G01N2223/419 ,  H01J2237/221 ,  H01J2237/2611

摘要： There is provided a three-dimensional image reconstructing apparatus for reconstructing a three-dimensional image of an object. The three-dimensional image reconstructing apparatus includes an image-capturing section that captures a plurality of transmission-type images each of which is represented by densities of different levels, a characteristic region selecting section that selects a plurality of characteristic regions in each of the transmission-type images, a characteristic region distribution calculating section that calculates a spatial distribution of the characteristic regions based on respective positions of the characteristic regions, in each of the transmission-type images, and a three-dimensional image reconstructing section that, when reconstructing the three-dimensional image which shows the three-dimensional structure of the object and in which the densities of different levels are allocated to the whole object by integrating the transmission-type images, allocates the densities of different levels of the transmission-type images to respective positions, in the three-dimensional image, of the characteristic regions based on the spatial distribution of the characteristic regions, so as to reconstruct the three-dimensional image in which a three-dimensional structure in each of the characteristic regions is shown.

摘要翻译： 提供了一种用于重建物体的三维图像的三维图像重建装置。 三维图像重建装置包括：图像拍摄部，其捕获各自以不同等级的浓度表示的多个发送型图像;特征区域选择部，其在所述发送中选择多个特征区域 特征区域分布计算部分，其基于每个发送型图像中的特征区域的各个位置来计算特征区域的空间分布;以及三维图像重建部分，当重建 通过对发送型图像进行积分，显示对象的三维结构，将不同级别的密度分配给整个对象的三维图像，将发送型图像的不同级别的密度分配给各自的 位置，三维图像，c 基于特征区域的空间分布的特征区域，以重建其中示出了每个特征区域中的三维结构的三维图像。

公开(公告)号：US20130202180A1

公开(公告)日：2013-08-08

申请号：US13810034

申请日：2011-07-14

申请人： Takashi Kubo ,  Takahito Hashimoto ,  Toshie Yaguchi ,  Norio Baba

发明人： Takashi Kubo ,  Takahito Hashimoto ,  Toshie Yaguchi ,  Norio Baba

IPC分类号： G06T11/00

CPC分类号： G06T11/003 ,  G01N23/046 ,  G01N2223/419 ,  G06T11/006 ,  G06T2211/424 ,  H01J37/20 ,  H01J37/222 ,  H01J37/26 ,  H01J2237/20207

摘要： Disclosed is image processing: that significantly reduces false images and missing images in reconstructed images, improves reconstruction accuracy; and that can be applied to objects to be observed that are composed of a plurality of components, and to samples having an unknown number of structural compositions. An image processing device is provided with: a means, in an electron microscope having an imaging device and a tilting device that tilts an object to be observed, for tilting said object to be observed in an angle step, and storing the obtained tiled image; a means for aligning the position of said tilted images; a means for generating an initial reconstructed image based on said tilted images; a means for projecting said initial reconstructed image at arbitrarily-defined angles and generating a plurality of projected images; a means for calculating errors in the corresponding pixels between the tilted images and the projection images; a means for determining a processing priority from said errors; a means for calculating the density for each gradation level; a means for determining the processing priority from said densities; and a means for changing the density value of each pixel in the initial reconstructed image in each of the above-mentioned priorities.

摘要翻译： 公开了图像处理：显着减少重建图像中的假图像和丢失图像，提高重建精度; 并且可以应用于由多个部件组成的观察对象和具有未知数量的结构组成的样品。 一种图像处理装置具有：具有成像装置的电子显微镜和倾斜待观察物体的倾斜装置的装置，用于以角度步骤倾斜所述被观察物体，并存储所获得的平铺图像; 用于对准所述倾斜图像的位置的装置; 用于基于所述倾斜图像生成初始重建图像的装置; 用于以任意定义的角度投影所述初始重建图像并产生多个投影图像的装置; 用于计算倾斜图像和投影图像之间的对应像素中的误差的装置; 用于根据所述错误确定处理优先级的装置; 用于计算每个灰度级的密度的装置; 用于从所述密度确定处理优先级的装置; 以及用于在上述每个优先级中改变初始重构图像中的每个像素的浓度值的装置。

公开(公告)号：US20070253612A1

公开(公告)日：2007-11-01

申请号：US11810632

申请日：2007-06-06

申请人： Eisaku Katayama ,  Norio Baba ,  Yoshitaka Kimori

发明人： Eisaku Katayama ,  Norio Baba ,  Yoshitaka Kimori

IPC分类号： H01J35/00 ,  G06K9/00

CPC分类号： H01J37/22 ,  G01N23/046 ,  G01N2223/419 ,  H01J2237/221 ,  H01J2237/2611

摘要： There is provided a three-dimensional image reconstructing apparatus for reconstructing a three-dimensional image of an object. The three-dimensional image reconstructing apparatus includes an image-capturing section that captures a plurality of transmission-type images each of which is represented by densities of different levels, a characteristic region selecting section that selects a plurality of characteristic regions in each of the transmission-type images, a characteristic region distribution calculating section that calculates a spatial distribution of the characteristic regions based on respective positions of the characteristic regions, in each of the transmission-type images, and a three-dimensional image reconstructing section that, when reconstructing the three-dimensional image which shows the three-dimensional structure of the object and in which the densities of different levels are allocated to the whole object by integrating the transmission-type images, allocates the densities of different levels of the transmission-type images to respective positions, in the three-dimensional image, of the characteristic regions based on the spatial distribution of the characteristic regions, so as to reconstruct the three-dimensional image in which a three-dimensional structure in each of the characteristic regions is shown.

摘要翻译： 提供了一种用于重建物体的三维图像的三维图像重建装置。 三维图像重建装置包括：图像拍摄部，其捕获各自以不同等级的浓度表示的多个发送型图像;特征区域选择部，其在所述发送中选择多个特征区域 特征区域分布计算部分，其基于每个发送型图像中的特征区域的各个位置来计算特征区域的空间分布;以及三维图像重建部分，当重建 通过对发送型图像进行积分，显示对象的三维结构，将不同级别的密度分配给整个对象的三维图像，将发送型图像的不同级别的密度分配给各自的 位置，三维图像，c 基于特征区域的空间分布的特征区域，以重建其中示出了每个特征区域中的三维结构的三维图像。

公开(公告)号：US08588499B2

公开(公告)日：2013-11-19

申请号：US13810034

申请日：2011-07-14

申请人： Takashi Kubo ,  Takahito Hashimoto ,  Toshie Yaguchi ,  Norio Baba

发明人： Takashi Kubo ,  Takahito Hashimoto ,  Toshie Yaguchi ,  Norio Baba

IPC分类号： G06K9/00

CPC分类号： G06T11/003 ,  G01N23/046 ,  G01N2223/419 ,  G06T11/006 ,  G06T2211/424 ,  H01J37/20 ,  H01J37/222 ,  H01J37/26 ,  H01J2237/20207

摘要： Disclosed is image processing: that significantly reduces false images and missing images in reconstructed images, improves reconstruction accuracy; and that can be applied to objects to be observed that are composed of a plurality of components, and to samples having an unknown number of structural compositions. An image processing device is provided with: a means, in an electron microscope having an imaging device and a tilting device that tilts an object to be observed, for tilting said object to be observed in an angle step, and storing the obtained tiled image; a means for aligning the position of said tilted images; a means for generating an initial reconstructed image based on said tilted images; a means for projecting said initial reconstructed image at arbitrarily-defined angles and generating a plurality of projected images; a means for calculating errors in the corresponding pixels between the tilted images and the projection images; a means for determining a processing priority from said errors; a means for calculating the density for each gradation level; a means for determining the processing priority from said densities; and a means for changing the density value of each pixel in the initial reconstructed image in each of the above-mentioned priorities.

摘要翻译： 公开了图像处理：显着减少重建图像中的假图像和丢失图像，提高重建精度; 并且可以应用于由多个部件组成的观察对象和具有未知数量的结构组成的样品。 一种图像处理装置具有：具有成像装置的电子显微镜和倾斜待观察物体的倾斜装置的装置，用于以角度步骤倾斜所述被观察物体，并存储所获得的平铺图像; 用于对准所述倾斜图像的位置的装置; 用于基于所述倾斜图像生成初始重建图像的装置; 用于以任意定义的角度投影所述初始重建图像并产生多个投影图像的装置; 用于计算倾斜图像和投影图像之间的对应像素中的误差的装置; 用于根据所述错误确定处理优先级的装置; 用于计算每个灰度级的密度的装置; 用于从所述密度确定处理优先级的装置; 以及用于在上述每个优先级中改变初始重构图像中的每个像素的浓度值的装置。

公开(公告)号：US07639865B2

公开(公告)日：2009-12-29

申请号：US10461920

申请日：2003-06-13

申请人： Eisaku Katayama ,  Norio Baba

发明人： Eisaku Katayama ,  Norio Baba

IPC分类号： G06K9/00

CPC分类号： G01N23/046 ,  G01N2223/419 ,  G06T7/55 ,  G06T15/00

摘要： It is an object of the present invention to acquire 3-dimensional image data that correctly express a structural configuration of the subject by processing the projected image data obtained by projecting the subject toward the plural angles . A shape computing unit 260 calculates shape data which represent a outline of the subject, using a plurality of 1st image data of the subject obtained by projecting the subject toward the plural angles. A distributing unit 220 generates gray-scale density-distributions by spreading and distributing densities shown in gray-scale image of the subject respectively within angles along which said gray-scale image was captured. A second integrating unit 240 generates 3-dimensional gray-scale data, which expresses the subject with the 3-dimensional image data, by integrating a plurality of said gray-scale density-distributions generated from a plurality of gray-scale image captured from a plurality of angles. A first integrating unit 280 integrates the shape data and 3-dimensional gray-scale image. A data processing unit 300 generates 3-dimensional image data by extracting only density that exists in perimeter of a shape that the shape data represent, from the 3-dimensional gray-scale data.

摘要翻译： 本发明的目的是通过处理通过将被摄体投影到多个角度而获得的投影图像数据来获取正确表达被摄体的结构构造的3维图像数据。 形状计算单元260使用通过将对象投影到多个角度而获得的被摄体的多个第一图像数据来计算表示被摄体的轮廓的形状数据。 分配单元220通过在被摄体的灰度级图像的角度内分别扩散和分布被摄物体的灰度图像中所示的密度来生成灰度密度分布。 第二积分单元240通过对从多个灰度图像中捕获的多个灰度级图像进行积分而生成多个所述灰度密度分布，生成表示具有3维图像数据的被摄体的三维灰度数据 多个角度 第一积分单元280对形状数据和三维灰度图像进行积分。 数据处理单元300通过从三维灰度数据中仅提取存在于形状数据表示的形状的周边的密度来生成三维图像数据。

公开(公告)号：US07379582B2

公开(公告)日：2008-05-27

申请号：US10660464

申请日：2003-09-11

申请人： Eisaku Katayama ,  Norio Baba

发明人： Eisaku Katayama ,  Norio Baba

IPC分类号： G06K9/00

CPC分类号： G06K9/00134 ,  G06T7/0002 ,  G06T7/001 ,  G06T7/564 ,  G06T7/97 ,  G06T2200/04

摘要： A projection image data captured from a plurality of angles is processed, and a three-dimensional image data accurately indicating a three dimensional structure for an object is obtained. A shape computing unit 260 computes shape data indicating an outline of a subject using a plurality of first image data of the subject captured from a plurality of angles. A distributing unit 220 generates a gray-scale density-distribution by extending and distributing density indicated in a gray-scale image of the subject acquired by a projection image capturing apparatus to an angle at which the gray-scale image is captured. The second integrating unit 240 generates a three-dimensional gray-scale data indicating the subject with three-dimensional image data by integrating a plurality of gray-scale images acquired from a plurality of angles and a plurality of gray-scale density-distribution. The first integrating unit 280 integrates the three-dimensional gray-scale image and shape data. The data processing unit 300 generates the three-dimensional image data by extracting only the gray-scale data which exists in the circumference of the shape indicated in the shape data from the three-dimensional gray-scale data.

摘要翻译： 处理从多个角度拍摄的投影图像数据，并且获得准确地指示对象的三维结构的三维图像数据。 形状计算单元260使用从多个角度捕获的对象的多个第一图像数据来计算指示对象的轮廓的形状数据。 分配单元220通过将由投影图像捕获装置获取的被摄体的灰度图像中指示的浓度扩展并分布到捕获灰度图像的角度来生成灰度密度分布。 第二积分单元240通过对从多个角度获得的多个灰度图像和多个灰度密度分布进行积分，生成表示具有三维图像数据的对象的三维灰度数据。 第一积分单元280对三维灰度图像和形状数据进行积分。 数据处理单元300通过从三维灰度数据中仅提取存在于形状数据中指示的形状的圆周中的灰度数据来生成三维图像数据。

公开(公告)号：US06828555B2

公开(公告)日：2004-12-07

申请号：US10612820

申请日：2003-07-02

申请人： Eisaku Katayama ,  Norio Baba

发明人： Eisaku Katayama ,  Norio Baba

IPC分类号： H01J3726

CPC分类号： H01J37/26 ,  H01J37/222 ,  H01J2237/22 ,  H01J2237/2611 ,  H01J2237/2617

摘要： Verification of properness of a modeling theory of an uncrystallized substance or an image processing method is made easy. There includes: a first displaying unit 120 for rotationally displaying an simulated three-dimensionally shaded model image, which is a shaded image of the three-dimensional reconstruction image; and a second displaying unit 140 for displaying the three-dimensional image of the substance acquired by experimental structural analysis, which synchronously rotates with the simulated three-dimensionally shaded model image.

摘要翻译： 验证未结晶物质的建模理论的正确性或图像处理方法是容易的。 包括：第一显示单元120，用于旋转地显示作为三维重建图像的阴影图像的模拟三维阴影模型图像; 以及第二显示单元140，用于显示通过实验结构分析获得的物质的三维图像，其与模拟的三维阴影模型图像同步旋转。