FILM THICKNESS MEASUREMENT APPARATUS AND FILM THICKNESS MEASUREMENT METHOD
    3.
    发明申请
    FILM THICKNESS MEASUREMENT APPARATUS AND FILM THICKNESS MEASUREMENT METHOD 有权
    薄膜厚度测量装置和薄膜厚度测量方法

    公开(公告)号:US20140192349A1

    公开(公告)日:2014-07-10

    申请号:US14239468

    申请日:2012-08-21

    IPC分类号: G01B7/06 G01K1/14 G01B11/24

    摘要: A film thickness measurement apparatus includes: an ECT sensor for measuring a film thickness of a thermal barrier coating formed on a turbine blade; a storage unit for storing a measurement point on the turbine blade which is a point where the film thickness of the thermal barrier coating is measured; a laser displacement meter for measuring a shape of the turbine blade; a measurement position calculation unit for calculating an actual measurement point suitable for actual film thickness measurement using the ECT sensor, based on the shape of the turbine blade measured by the laser displacement meter and the measurement point on the turbine blade stored in the storage unit; and an arm drive unit for driving the ECT sensor to adjust a measurement position of the ECT sensor based on the actual measurement point calculated by the measurement position calculation unit.

    摘要翻译: 膜厚测量装置包括:用于测量形成在涡轮叶片上的隔热涂层的膜厚度的ECT传感器; 存储单元,用于将测量点存储在所述涡轮叶片上,所述测量点是测量所述热障涂层的膜厚度的点; 用于测量涡轮叶片的形状的激光位移计; 测量位置计算单元,用于基于由激光位移计测量的涡轮叶片的形状和存储在存储单元中的涡轮叶片上的测量点来计算适用于使用ECT传感器的实际膜厚测量的实际测量点; 以及臂驱动单元,用于驱动ECT传感器,以基于由测量位置计算单元计算出的实际测量点来调节ECT传感器的测量位置。

    Film thickness measurement apparatus and film thickness measurement method
    4.
    发明授权
    Film thickness measurement apparatus and film thickness measurement method 有权
    薄膜厚度测量装置和薄膜厚度测量方法

    公开(公告)号:US08988668B2

    公开(公告)日:2015-03-24

    申请号:US14239468

    申请日:2012-08-21

    摘要: A film thickness measurement apparatus includes: an ECT sensor for measuring a film thickness of a thermal barrier coating formed on a turbine blade; a storage unit for storing a measurement point on the turbine blade which is a point where the film thickness of the thermal barrier coating is measured; a laser displacement meter for measuring a shape of the turbine blade; a measurement position calculation unit for calculating an actual measurement point suitable for actual film thickness measurement using the ECT sensor, based on the shape of the turbine blade measured by the laser displacement meter and the measurement point on the turbine blade stored in the storage unit; and an arm drive unit for driving the ECT sensor to adjust a measurement position of the ECT sensor based on the actual measurement point calculated by the measurement position calculation unit.

    摘要翻译: 膜厚测量装置包括:用于测量形成在涡轮叶片上的隔热涂层的膜厚度的ECT传感器; 存储单元,用于将测量点存储在所述涡轮叶片上,所述测量点是测量所述热障涂层的膜厚度的点; 用于测量涡轮叶片的形状的激光位移计; 测量位置计算单元,用于基于由激光位移计测量的涡轮叶片的形状和存储在存储单元中的涡轮叶片上的测量点来计算适用于使用ECT传感器的实际膜厚测量的实际测量点; 以及臂驱动单元,用于驱动ECT传感器,以基于由测量位置计算单元计算出的实际测量点来调节ECT传感器的测量位置。