公开(公告)号：US20180247974A1

公开(公告)日：2018-08-30

申请号：US15745914

申请日：2016-07-21

申请人： Massachusetts Institute of Technology

发明人： William D. Oliver ,  Rabindra N. Das ,  David J. Hover ,  Danna Rosenberg ,  Xhovalin Miloshi ,  Vladimir Bolkhovsky ,  Jonilyn L. Yoder ,  Corey W. Stull ,  Mark A. Gouker

IPC分类号： H01L27/18 ,  H01L39/22 ,  H01L39/24 ,  H01L39/04 ,  H01P7/08 ,  G06N99/00

CPC分类号： H01L27/18 ,  G06N10/00 ,  H01L39/045 ,  H01L39/223 ,  H01L39/2416 ,  H01L39/2493 ,  H01P7/086

摘要： A superconducting integrated circuit includes at least one superconducting resonator, including a substrate, a conductive layer disposed over a surface of the substrate with the conductive layer including at least one conductive material including a substantially low stress polycrystalline Titanium Nitride (TiN) material having an internal stress less than about two hundred fifty MPa (magnitude) such that the at least one superconducting resonator and/or qubit (hereafter called “device”) is provided as a substantially high quality factor, low loss superconducting device.

公开(公告)号：US10658424B2

公开(公告)日：2020-05-19

申请号：US15745914

申请日：2016-07-21

申请人： Massachusetts Institute of Technology

发明人： William D. Oliver ,  Rabindra N. Das ,  David J. Hover ,  Danna Rosenberg ,  Xhovalin Miloshi ,  Vladimir Bolkhovsky ,  Jonilyn L. Yoder ,  Corey W. Stull ,  Mark A. Gouker

IPC分类号： H01L27/18 ,  G06N10/00 ,  H01L39/22 ,  H01L39/24 ,  H01P7/08 ,  H01L39/04

摘要： A superconducting integrated circuit includes at least one superconducting resonator, including a substrate, a conductive layer disposed over a surface of the substrate with the conductive layer including at least one conductive material including a substantially low stress polycrystalline Titanium Nitride (TiN) material having an internal stress less than about two hundred fifty MPa (magnitude) such that the at least one superconducting resonator and/or qubit (hereafter called “device”) is provided as a substantially high quality factor, low loss superconducting device.