摘要:
The present invention seeks to provide an improved system for inspection of and detection of defects in objects such as reticles, photomasks, semiconductor wafers, flat panel displays and other patterned objects. Preferably, the system has two or more stages, whereby the object is examined separately for fine defects, preferably by inspecting a binary level representation of the object, and for ultra fine defects, preferably by inspecting a gray level representation of the object. The system also preferably includes reinspection apparatus for reinspection of detected defects, thereby to reduce the false alarm rate, and for classifying the remaining defects by size, area and type.
摘要:
An inspection method including the steps of providing a patterned object to be inspected and compared with a reference, inspecting the patterned object and providing an output of information relating to the visual characteristics of the patterned object, comparing binary level information relating to the visual characteristics of the patterned object to binary level information relating to the visual characteristics of the reference, and comparing gray level information relating to the visual characteristics of the patterned object to gray level information relating to the visual characteristics of the reference.
摘要:
A defect detection system for inspecting objects such as reticles, photomasks, semiconductor wafers, flat panel displays and other patterned objects has two or more stages, whereby the object is examined separately for fine defects, by inspecting a binary level representation of the object, and for ultra fine defects, by inspecting a gray level representation of the object. The system also includes re-inspection apparatus for re-inspection of detected defects, thereby to reduce the false alarm rate, and for classifying the remaining defects by size, area and type.
摘要:
Methods and apparatus are provided for simultaneously reading data from multiple tracks of an optical disk at a high rate. Circuitry is provided for use with a detector matrix to read and buffer data in parallel from the multiple adjacent tracks, while asynchronously providing processed data to a host processor. Circuitry is also provided for electronic tracking of tracks on the optical disk and for reducing cross-talk between adjacent tracks. Circuitry is further provided for correcting phase errors resulting from variations in the linear velocity of the tracks being read, depending upon the radial position of the tracks.
摘要:
A method of writing data simultaneously on a plurality of tracks of an optical disk, comprises providing an array of light sources, each light source being independently modulated, providing means to determine the position of each light source with respect to the center of a given track, and varying the intensity of each light source so as to generate a plurality of writing light beams, each generated by a plurality of adjacent light sources, each of the said light beams having the desired width, intensity and position on the written track.
摘要:
A method of reading data from an optical disk comprises providing means for illuminating the required part of the disk and acquiring the optical image of a plurality of tracks, providing a detector matrix comprising a plurality of detectors, each of the detectors being capable of producing an output signal which is proportional to the intensity of the light detected by it causing an optical image corresponding to an illuminated area to fall on the said detector matrix, transferring the output signal of the detector matrix to image processing means, determining position coordinates of the track center for each data track, by analyzing the output signal of the said detector matrix, saving in memory means expected track center data, comprising position coordinates of the track center located by the analysis of the output signal, and if an actually detected track center is shifted with respect to the expected track center, electronically moving the track center position.
摘要:
Devices and methods for substantially reducing the caloric efficiency of the digestive tract by capturing food being digested in the stomach 10 and/or anywhere else in the gastrointestinal (GI) tract, absorbing or encapsulating the captured food into multiple capturing members and moving such multiple capturing members containing the ingestible encapsulated food down the GI tract, practically out of reach of the GI absorption organs, thus excluding the entrapped ingredients from being involved in the digestion and\or absorption process. The device is designed for oral delivery. The system can be comprised of liquid, food bars or a capsule system. The capsule system is comprised of an external capsule that dissolves in accordance with a temporal or ph dependent preset, which allows the food intake to be at least partially fluidic. The capsule system is further comprised of a mechanism designed to capture and isolate a portion of the food being digested.
摘要:
Methods and apparatus are provided for improving optical drive access times using a detector having multiple sensing elements to sense and count disk tracks. The detector may be oriented either radially or tangentially with respect to the disk radius, and either capable of sensing more than one disk location simultaneously or have a length greater than the maximum distance between detectable features of the disk.
摘要:
Focussing system methods and apparatus are provided for apparatus capable of simultaneously reading multiple tracks of an optical disk. Astigmatism introduced by a cylindrical lens disposed adjacent to the light source, or before the focus detectors arranged at the edge of a wide-area field of illumination, is used to compute an error signal corresponding to the degree of out-of-focus, which error signal is provided to a servo-system that moves the objective lens to correct the focus. An alternative embodiment employs a pair of focus detectors and a pair of micro-lenses having different focal lengths that directs the reflected light onto the focus detectors to generate a focus correction signal. Further alternative embodiments of employing the astigmatism method of focussing are described.
摘要:
Focussing system methods and apparatus are provided for apparatus capable of simultaneously reading multiple tracks of an optical disk. Astigmatism introduced by a cylindrical lens disposed adjacent to the light source, or before the focus detectors arranged at the edge of a wide-area field of illumination, is used to compute an error signal corresponding to the degree of out-of-focus, which error signal is provided to a servo-system that moves the objective lens to correct the focus. An alternative embodiment employs a pair of focus detectors and a pair of micro-lenses having different focal lengths that directs the reflected light onto the focus detectors to generate a focus correction signal. Further alternative embodiments of employing the astigmatism method of focussing are described.