Apparatus and method for inspection of a patterned object by comparison
thereof to a reference
    1.
    发明授权
    Apparatus and method for inspection of a patterned object by comparison thereof to a reference 失效
    通过将其与参考文献进行比较来检查图案化物体的装置和方法

    公开(公告)号:US5586058A

    公开(公告)日:1996-12-17

    申请号:US880100

    申请日:1992-04-21

    IPC分类号: G01N21/956 G06T7/00 G06K9/68

    摘要: The present invention seeks to provide an improved system for inspection of and detection of defects in objects such as reticles, photomasks, semiconductor wafers, flat panel displays and other patterned objects. Preferably, the system has two or more stages, whereby the object is examined separately for fine defects, preferably by inspecting a binary level representation of the object, and for ultra fine defects, preferably by inspecting a gray level representation of the object. The system also preferably includes reinspection apparatus for reinspection of detected defects, thereby to reduce the false alarm rate, and for classifying the remaining defects by size, area and type.

    摘要翻译: 本发明寻求提供一种用于检查和检测诸如掩模版,光掩模,半导体晶片,平板显示器和其它图案化物体的物体中的缺陷的改进系统。 优选地,该系统具有两个或更多个阶段,由此优选地通过检查对象的二进制水平表示以及优选通过检查对象的灰度级表示来获得精细缺陷,分别检查对象的细小缺陷。 该系统还优选地包括用于重新检测检测到的缺陷的再检测装置,从而减少误报率,并且根据尺寸,面积和类型对剩余的缺陷进行分类。

    Apparatus and method for inspection of a patterned object by comparison
thereof to a reference
    2.
    发明授权
    Apparatus and method for inspection of a patterned object by comparison thereof to a reference 失效
    通过将其与参考文献进行比较来检查图案化物体的装置和方法

    公开(公告)号:US5619429A

    公开(公告)日:1997-04-08

    申请号:US801761

    申请日:1991-11-27

    IPC分类号: G01N21/956 G06T7/00 G06K9/68

    摘要: An inspection method including the steps of providing a patterned object to be inspected and compared with a reference, inspecting the patterned object and providing an output of information relating to the visual characteristics of the patterned object, comparing binary level information relating to the visual characteristics of the patterned object to binary level information relating to the visual characteristics of the reference, and comparing gray level information relating to the visual characteristics of the patterned object to gray level information relating to the visual characteristics of the reference.

    摘要翻译: 一种检查方法,包括以下步骤:提供待检查的图案化对象并与参考进行比较,检查图案化对象并提供与图案化对象的视觉特征相关的信息的输出,比较与视觉特征有关的二进制级信息 所述图案化对象与所述参考物的视觉特征相关的二进制级信息,以及将与所述图案对象的视觉特征相关的灰度级信息与所述参考的视觉特征相关的灰度级信息进行比较。

    Apparatus and method for microscopic inspection of articles
    3.
    发明授权
    Apparatus and method for microscopic inspection of articles 失效
    用于显微镜检查制品的装置和方法

    公开(公告)号:US06360005B1

    公开(公告)日:2002-03-19

    申请号:US08679739

    申请日:1996-07-12

    IPC分类号: G06K964

    摘要: A defect detection system for inspecting objects such as reticles, photomasks, semiconductor wafers, flat panel displays and other patterned objects has two or more stages, whereby the object is examined separately for fine defects, by inspecting a binary level representation of the object, and for ultra fine defects, by inspecting a gray level representation of the object. The system also includes re-inspection apparatus for re-inspection of detected defects, thereby to reduce the false alarm rate, and for classifying the remaining defects by size, area and type.

    摘要翻译: 用于检查诸如掩模版,光掩模,半导体晶片,平板显示器和其它图案对象的物体的缺陷检测系统具有两个或更多个阶段,由此通过检查物体的二进制水平表示来分开检查物体以获得精细缺陷,以及 对于超细缺陷,通过检查对象的灰度级表示。 该系统还包括用于重新检查检测到的缺陷的再检查装置,从而降低误报率,并根据尺寸,面积和类型对剩余缺陷进行分类。

    Method and apparatus for high speed optical storage device
    4.
    发明授权
    Method and apparatus for high speed optical storage device 失效
    高速光存储装置的方法和装置

    公开(公告)号:US5701283A

    公开(公告)日:1997-12-23

    申请号:US559419

    申请日:1995-11-15

    摘要: Methods and apparatus are provided for simultaneously reading data from multiple tracks of an optical disk at a high rate. Circuitry is provided for use with a detector matrix to read and buffer data in parallel from the multiple adjacent tracks, while asynchronously providing processed data to a host processor. Circuitry is also provided for electronic tracking of tracks on the optical disk and for reducing cross-talk between adjacent tracks. Circuitry is further provided for correcting phase errors resulting from variations in the linear velocity of the tracks being read, depending upon the radial position of the tracks.

    摘要翻译: 提供了用于以高速率从光盘的多个轨道同时读取数据的方法和装置。 电路被提供用于与检测器矩阵一起用于从多个相邻轨道并行读取和缓冲数据,同时将处理的数据异步地提供给主机处理器。 还提供电路用于电子跟踪光盘上的轨道并减少相邻轨道之间的串扰。 进一步提供电路,用于根据磁道的径向位置来校正由正在读取的磁道的线速度的变化引起的相位误差。

    Method of writing data simultaneously on a plurality of tracks of an
optical disk, and apparatus therefor
    5.
    发明授权
    Method of writing data simultaneously on a plurality of tracks of an optical disk, and apparatus therefor 失效
    在光盘的多个磁道上同时写入数据的方法及其装置

    公开(公告)号:US5592444A

    公开(公告)日:1997-01-07

    申请号:US254187

    申请日:1994-06-06

    摘要: A method of writing data simultaneously on a plurality of tracks of an optical disk, comprises providing an array of light sources, each light source being independently modulated, providing means to determine the position of each light source with respect to the center of a given track, and varying the intensity of each light source so as to generate a plurality of writing light beams, each generated by a plurality of adjacent light sources, each of the said light beams having the desired width, intensity and position on the written track.

    摘要翻译: 一种在光盘的多个磁道上同时写入数据的方法,包括提供光源阵列,每个光源被独立调制,提供用于确定每个光源相对于给定轨道的中心的位置的装置 并且改变每个光源的强度,以产生由多个相邻光源产生的多个写入光束,每个所述光束在所写入的轨道上具有期望的宽度,强度和位置。

    Optical information system with a broad non-coherent irradiating beam
coupled with optical fiber from a laser source
    6.
    发明授权
    Optical information system with a broad non-coherent irradiating beam coupled with optical fiber from a laser source 失效
    具有广泛的非相干照射光束的光学信息系统与来自激光源的光纤耦合

    公开(公告)号:US5535189A

    公开(公告)日:1996-07-09

    申请号:US393802

    申请日:1995-02-24

    摘要: A method of reading data from an optical disk comprises providing means for illuminating the required part of the disk and acquiring the optical image of a plurality of tracks, providing a detector matrix comprising a plurality of detectors, each of the detectors being capable of producing an output signal which is proportional to the intensity of the light detected by it causing an optical image corresponding to an illuminated area to fall on the said detector matrix, transferring the output signal of the detector matrix to image processing means, determining position coordinates of the track center for each data track, by analyzing the output signal of the said detector matrix, saving in memory means expected track center data, comprising position coordinates of the track center located by the analysis of the output signal, and if an actually detected track center is shifted with respect to the expected track center, electronically moving the track center position.

    摘要翻译: 从光盘读取数据的方法包括:提供用于照亮盘的所需部分并获取多个轨道的光学图像的装置,提供包括多个检测器的检测器矩阵,每个检测器能够产生 输出信号,其与由其检测到的光的强度成比例,使得与照明区域相对应的光学图像落在所述检测器矩阵上,将检测器矩阵的输出信号传送到图像处理装置,确定轨道的位置坐标 通过分析所述检测器矩阵的输出信号,通过分析所述检测器矩阵的输出信号来节省存储装置预期轨道中心数据,包括通过对输出信号的分析定位的轨道中心的位置坐标,以及如果实际检测到的轨道中心是 相对于预期轨道中心移动,电子地移动轨道中心位置。

    Device and method for reducing calorie intake
    7.
    发明授权
    Device and method for reducing calorie intake 有权
    减少热量摄入的装置和方法

    公开(公告)号:US09220688B2

    公开(公告)日:2015-12-29

    申请号:US12757843

    申请日:2010-04-09

    IPC分类号: A61K9/48

    CPC分类号: A61K9/48 A61K9/4808

    摘要: Devices and methods for substantially reducing the caloric efficiency of the digestive tract by capturing food being digested in the stomach 10 and/or anywhere else in the gastrointestinal (GI) tract, absorbing or encapsulating the captured food into multiple capturing members and moving such multiple capturing members containing the ingestible encapsulated food down the GI tract, practically out of reach of the GI absorption organs, thus excluding the entrapped ingredients from being involved in the digestion and\or absorption process. The device is designed for oral delivery. The system can be comprised of liquid, food bars or a capsule system. The capsule system is comprised of an external capsule that dissolves in accordance with a temporal or ph dependent preset, which allows the food intake to be at least partially fluidic. The capsule system is further comprised of a mechanism designed to capture and isolate a portion of the food being digested.

    摘要翻译: 通过捕获在胃10和/或胃肠道(GI)道中的任何其他地方消化的食物来显着降低消化道的热量效率的装置和方法,将捕获的食物吸收或包封到多个捕获构件中并移动这种多次捕获 在胃肠道下方含有可摄入的包封食物的成员实际上不能接触胃肠吸收器官,因此不包括被捕获的成分参与消化和吸收过程。 该设备设计用于口服输送。 该系统可以由液体,食品棒或胶囊系统组成。 胶囊系统包括外部胶囊,其根据时间或ph依赖性预设溶解,这允许食物摄取至少部分流体化。 胶囊系统还包括设计成捕获和分离被消化食物的一部分的机构。

    Focussing system and methods for multi- track optical disk apparatus
    9.
    发明授权
    Focussing system and methods for multi- track optical disk apparatus 失效
    多轨光盘设备的聚焦系统和方法

    公开(公告)号:US5774432A

    公开(公告)日:1998-06-30

    申请号:US842936

    申请日:1997-04-25

    摘要: Focussing system methods and apparatus are provided for apparatus capable of simultaneously reading multiple tracks of an optical disk. Astigmatism introduced by a cylindrical lens disposed adjacent to the light source, or before the focus detectors arranged at the edge of a wide-area field of illumination, is used to compute an error signal corresponding to the degree of out-of-focus, which error signal is provided to a servo-system that moves the objective lens to correct the focus. An alternative embodiment employs a pair of focus detectors and a pair of micro-lenses having different focal lengths that directs the reflected light onto the focus detectors to generate a focus correction signal. Further alternative embodiments of employing the astigmatism method of focussing are described.

    摘要翻译: 提供了能够同时读取光盘的多个轨道的装置的聚焦系统方法和装置。 由与邻近光源设置的柱面透镜或者布置在大面积照明区域的边缘处的焦点检测器之前的散光引入的散光用于计算对应于失焦程度的误差信号,其中 误差信号被提供给移动物镜以校正焦点的伺服系统。 替代实施例采用一对焦点检测器和具有不同焦距的一对微透镜,其将反射光引导到焦点检测器上以产生聚焦校正信号。 描述采用聚焦散光方法的其它替代实施例。

    Focussing system and methods for multi-track optical disk apparatus
    10.
    发明授权
    Focussing system and methods for multi-track optical disk apparatus 失效
    多轨光盘设备的聚焦系统和方法

    公开(公告)号:US5708634A

    公开(公告)日:1998-01-13

    申请号:US531764

    申请日:1995-09-20

    摘要: Focussing system methods and apparatus are provided for apparatus capable of simultaneously reading multiple tracks of an optical disk. Astigmatism introduced by a cylindrical lens disposed adjacent to the light source, or before the focus detectors arranged at the edge of a wide-area field of illumination, is used to compute an error signal corresponding to the degree of out-of-focus, which error signal is provided to a servo-system that moves the objective lens to correct the focus. An alternative embodiment employs a pair of focus detectors and a pair of micro-lenses having different focal lengths that directs the reflected light onto the focus detectors to generate a focus correction signal. Further alternative embodiments of employing the astigmatism method of focussing are described.

    摘要翻译: 提供了能够同时读取光盘的多个轨道的装置的聚焦系统方法和装置。 由与邻近光源设置的柱面透镜或者布置在大面积照明区域的边缘处的焦点检测器之前的散光引入的散光用于计算对应于失焦程度的误差信号,其中 误差信号被提供给移动物镜以校正焦点的伺服系统。 替代实施例采用一对焦点检测器和具有不同焦距的一对微透镜,其将反射光引导到焦点检测器上以产生聚焦校正信号。 描述采用聚焦散光方法的其它替代实施例。