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公开(公告)号：US6034772A
公开(公告)日：2000-03-07
申请号：US216044
申请日：1998-12-18
申请人： Michael A. Marcus , Jiann-Rong Lee
发明人： Michael A. Marcus , Jiann-Rong Lee
CPC分类号： G01B9/02021 , G01B11/06 , G01B11/0675 , G01B9/02007 , G01B9/02027 , G01B9/02083 , G01B9/02097 , G06F15/00 , G01B2290/45
摘要： A method for processing interferometric measurement data representative of a physical property of an object, such as the thickness of material M. A plurality of interference signals are acquired and stored with respect to a length L, and a dimension of length L over which the plurality of interference signals were acquired is determined. A location of all peaks of the interference signals is then determined with respect to a start position of the acquisition of the plurality of interference signals. The interferometer peaks which are representative of the physical property of the object are then determined and stored.
摘要翻译： 用于处理表示物体的物理性质的干涉测量数据的方法，例如材料M的厚度。多个干涉信号相对于长度L获取并存储，并且长度L的尺寸在多个 确定了干扰信号的采集。 然后相对于多个干扰信号的获取的开始位置确定干扰信号的所有峰值的位置。 然后确定和存储代表物体的物理性质的干涉仪峰。
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2.发明授权Apparatus and method for measuring digital imager, package and wafer bow and deviation from flatness 有权用于测量数字成像仪，封装和晶片弓以及偏离平面度的装置和方法公开(公告)号：US06724487B2
公开(公告)日：2004-04-20
申请号：US10163519
申请日：2002-06-06
IPC分类号： G01B902
CPC分类号： G01B11/303 , G01B9/02007 , G01B9/02025 , G01B9/02064 , G01B9/02071 , G01B9/0209 , G01B2290/15 , G01B2290/35 , G01B2290/45 , G01B2290/65
摘要： Apparatus for measuring the surface profile of a sample, includes a fixture for locating a surface of a transparent optical flat relative to a surface of a sample; a low-coherence light interferometer having an optical probe coupled to an XY scanning frame for scanning the surface of the sample through the transparent optical flat to produce interferometric data signals representing the distances between the optical flat surface and the surface of the sample; and a computer system responsive to the interferometric data signals for generating a surface profile of the sample using a best fit to a plane.
摘要翻译： 用于测量样品的表面轮廓的装置包括用于相对于样品表面定位透明光学平面的表面的夹具; 低相干光干涉仪，其具有耦合到XY扫描框架的光学探针，用于通过透明光学平面扫描样品的表面，以产生表示光学平坦表面和样品表面之间的距离的干涉数据信号; 以及响应于所述干涉测量数据信号的计算机系统，用于使用与平面最佳拟合来生成所述样本的表面轮廓。
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3.发明授权
公开(公告)号：US6034774A
公开(公告)日：2000-03-07
申请号：US105742
申请日：1998-06-26
申请人： Michael A. Marcus , Jiann-Rong Lee
发明人： Michael A. Marcus , Jiann-Rong Lee
CPC分类号： G01B9/0209 , G01B11/06 , G01B9/02065
摘要： A method for determining the optical retardation of an anisotropic material. A beam of light is directed toward a sample of the material and a portion of the reflected beam is collected from the optical interfaces of the material and directed toward an interferometer. The resulting interference signal is analyzed to determine the retardation. The retardation is determined as being the distance between particular peaks of the interference signal. In a further embodiment, light from multiple wavelength light sources is directed toward the sample of the material.
摘要翻译： 一种用于确定各向异性材料的光学延迟的方法。 光束指向材料的样品，并且反射光束的一部分从材料的光学界面收集并且指向干涉仪。 分析所得到的干扰信号以确定延迟。 该延迟被确定为干扰信号的特定峰值之间的距离。 在另一个实施例中，来自多个波长光源的光指向材料的样品。
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公开(公告)号：US06587209B2
公开(公告)日：2003-07-01
申请号：US10281589
申请日：2002-10-28
IPC分类号： G01B1106
CPC分类号： H04N17/002
摘要： A method for determining whether an imager assembly outside of a camera body meets predetermined focus specifications, wherein the imager assembly includes an image sensor and a camera mounting plate having reference features adapted to cooperate with alignment features in the camera body to locate the image sensor at a predetermined focal plane, including the steps of: mounting the imager assembly onto an imager mounting apparatus having equivalent alignment features; and utilizing low-coherence light interferometry to determine whether the image sensor will meet predetermined focus specifications when mounted in a camera body.
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公开(公告)号：US6067161A
公开(公告)日：2000-05-23
申请号：US216094
申请日：1998-12-18
CPC分类号： G01B9/02024 , B65H23/00 , B65H43/08 , G01B11/0691 , G01B9/02021 , G01B9/02065 , G01B9/02071 , G01B9/0209 , B65H2511/13 , B65H2553/41 , G01B2290/60
摘要： An apparatus for determining a thickness profile of a moving material having at least two optical interfaces. A transport apparatus transports a length of moving material at a predetermined flatness through a measurement region. A recessed track disposed in the channel provides an area of non-contact in the measurement region. An interferometer apparatus collects a portion of a beam of light reflected from the optical interfaces of the moving length and generates an interference signal representative of the collected light. An analyzer then analyzes the interference signal to determine a thickness profile of the material in the first direction.
摘要翻译： 一种用于确定具有至少两个光学接口的移动材料的厚度分布的装置。 运送装置通过测量区域以预定的平坦度输送一定长度的移动材料。 设置在通道中的凹陷轨道在测量区域中提供非接触区域。 干涉仪装置收集从移动长度的光学接口反射的光束的一部分，并产生表示所收集的光的干涉信号。 然后分析器分析干涉信号以确定材料在第一方向上的厚度分布。
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6.发明授权Measurement method and apparatus of an external digital camera imager assembly 失效外部数码相机成像器组件的测量方法和装置公开(公告)号：US06587210B2
公开(公告)日：2003-07-01
申请号：US10281590
申请日：2002-10-28
IPC分类号： G01B1106
CPC分类号： H04N17/002
摘要： A method for determining whether an imager assembly outside of a camera body meets predetermined focus specifications, wherein the imager assembly includes an image sensor and a camera mounting plate having reference features adapted to cooperate with alignment features in the camera body to locate the image sensor at a predetermined focal plane, including the steps of: mounting the imager assembly onto an imager mounting apparatus having equivalent alignment features; and utilizing low-coherence light interferometry to determine whether the image sensor will meet predetermined focus specifications when mounted in a camera body.
摘要翻译： 一种用于确定相机机身外的成像器组件是否满足预定焦点规格的方法，其中成像器组件包括图像传感器和相机安装板，其具有适于与照相机主体中的对准特征配合的参考特征，以将图像传感器定位在 预定的焦平面，包括以下步骤：将成像器组件安装到具有等效对准特征的成像器安装装置上; 并且利用低相干光干涉测量来确定当安装在相机机身中时图像传感器是否将满足预定的焦点规格。
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公开(公告)号：US06522410B1
公开(公告)日：2003-02-18
申请号：US09521089
申请日：2000-03-07
申请人： Michael A. Marcus , Jiann-Rong Lee
发明人： Michael A. Marcus , Jiann-Rong Lee
IPC分类号： G01B902
CPC分类号： G01B9/02083 , G01B9/02049 , G01B9/0209
摘要： A method of processing interferometric data relating to a sample having multiple reflective surfaces, includes the steps of: specifying a set of acceptance ranges for peaks of interest in the interferogram, based on a knowledge of the sample; determining which peaks in the interferogram fall within the acceptance ranges; identifying which peaks within the acceptance ranges represent multiple reflections and eliminating these peaks from the interferometric data; identifying acceptance ranges which do not contain peaks; and employing other peaks in the interferogram to calculate the locations of peaks in the acceptance ranges that do not contain peaks.
摘要翻译： 一种处理与具有多个反射表面的样本有关的干涉测量数据的方法包括以下步骤：基于样本的知识来指定干涉图中的感兴趣峰值的一组接受范围; 确定干涉图中的哪些峰落在接受范围内; 识别接受范围内的哪些峰表示多次反射并从干涉测量数据中消除这些峰; 识别不包含峰的接受范围; 并且在干涉图中使用其他峰来计算不包含峰的接受范围内的峰的位置。
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8.发明授权Digital camera image sensor positioning method including a non-coherent interferometer 失效数码相机图像传感器定位方法包括非相干干涉仪
公开(公告)号：US5757485A
公开(公告)日：1998-05-26
申请号：US755072
申请日：1996-11-22
申请人： Michael A. Marcus , Jiann-Rong Lee
发明人： Michael A. Marcus , Jiann-Rong Lee
CPC分类号： G01B11/026 , H04N5/2253
摘要： An optical probe apparatus and method for determining a position of an image sensor within a digital camera relative to a reference surface. The apparatus includes an optical probe assembly removably mountable to the digital camera. A non-coherent light interferometer in communication with the optical probe assembly is utilized to determine a depth from a reference surface to the image sensor and optical probe assembly.
摘要翻译： 一种用于确定数字照相机内的图像传感器相对于参考表面的位置的光学探针装置和方法。 该装置包括可移除地安装到数字照相机的光学探针组件。 利用与光学探针组件连通的非相干光干涉仪来确定从参考表面到图像传感器和光学探针组件的深度。
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公开(公告)号：US06624891B2
公开(公告)日：2003-09-23
申请号：US09976654
申请日：2001-10-12
IPC分类号： G02B902
CPC分类号： G01B9/02028 , G01B9/02019 , G01B9/0205 , G01B9/0209
摘要： An interferometric-based measurement system for externally measuring a distance between a pair of reference surfaces on an object, including: a low coherence light interferometer; an object mounting apparatus including an optical probe having an optical probe chuck; an optical fiber cable for coupling light from the interferometer to the optical probe chuck; and a computer for processing data collected by the interferometer, wherein the data is used to determine the distance between the pair of reference surfaces on the object.
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10.发明授权Method and apparatus for combined measurement of surface non-uniformity index of refraction variation and thickness variation 有权用于组合测量表面不均匀性折射率变化和厚度变化的方法和装置公开(公告)号：US06614534B1
公开(公告)日：2003-09-02
申请号：US09460280
申请日：1999-12-14
IPC分类号： G01B1102
CPC分类号： G01B11/0675
摘要： A method of simultaneously measuring the thickness, group index of refraction, and top and bottom surface profiles of a sample, includes the steps of locating the sample between a surface of a transparent optical flat and a parallel reflective surface such that the respective optical distances between any two of the surface of the optical flat, the top surface of the sample, the bottom surface of the sample, and the reflective surface are distinct and in a known relative optical distance relationship, the distance between the surface of the transparent optical flat and the parallel reflective surface being known. A low-coherent light interferometer operating in an autocorrelation configuration is employed to measure the distance between the optical flat surface and the top surface of the sample, the optical thickness of the sample, and the distance between the bottom surface of the sample and the reflective surface at a plurality of locations over the sample, employing the known relative optical distance relationships. Top and bottom surface profiles and a thickness profile of the sample are generated from the measured distances and the known distance between the surface of the transparent optical flat and the parallel reflective surface. An group index of refraction profile is generated from the measured optical thickness and bottom surface profiles.
摘要翻译： 同时测量样品的厚度，组折射率和顶表面和底表面轮廓的方法包括以下步骤：将样品定位在透明光学平面的表面和平行反射表面之间，使得样品之间的相应光学距离 光学平面的表面，样品的上表面，样品的底表面和反射表面中的任何两个是不同的，并且在已知的相对光学距离关系中，透明光学平面的表面与 平行的反射表面是已知的。 采用以自相关配置工作的低相干光干涉仪来测量光学平面与样品顶表面之间的距离，样品的光学厚度以及样品底表面与反射层之间的距离 使用已知的相对光学距离关系在样品上的多个位置处的表面。 从测量的距离和透明光学平面的表面与平行反射表面之间的已知距离产生样品的顶部和底部表面轮廓和厚度分布。 从测量的光学厚度和底部表面轮廓产生折射率分布的组折射率。
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