Method for controlling laser power in a texturing process
    3.
    发明授权
    Method for controlling laser power in a texturing process 失效
    在纹理化过程中控制激光功率的方法

    公开(公告)号:US5790433A

    公开(公告)日:1998-08-04

    申请号:US708627

    申请日:1996-09-05

    CPC分类号: G11B5/84

    摘要: A disk texturing tool is used, for example, to provide textured spots in an annular portion of both sides of a disk for a hard disk drive. Disks are moved into and out of the texturing process in cassettes, through two disk-handling stations. An optical system includes a laser directed at a beamsplitter to split the laser beam into two beams having approximately power, which are directed along parallel paths through a power control optics block to expose simultaneously opposite sides of a disk to be textured. The power level of each of these two beams is controlled by a program which operates in a teach mode to develop a look up table describing laser beam power as a function of a signal driving an attenuator, in a set point mode setting this drive signal to provide a certain laser beam power, in a run mode controlling this power through a feedback loop, and in a display mode showing laser beam power as a function of time.

    摘要翻译: 例如,使用磁盘纹理工具来在用于硬盘驱动器的盘的两侧的环形部分中提供纹理斑点。 通过两个磁盘处理站将磁盘移入和移出磁带盒中的纹理过程。 光学系统包括一个定向在分束器处的激光器,以将激光束分成两束具有大致功率的光束,这些光束沿平行路径通过功率控制光学器件块,以同时暴露于待纹理光盘的相对侧。 这两个光束中的每一个的功率电平由在教学模式下操作的程序控制,以便在设定该模式信号的设定点模式下形成描述作为驱动衰减器的信号的函数的激光束功率的查找表 在通过反馈回路控制该功率的运行模式中提供一定的激光束功率,以及显示作为时间的函数的激光束功率的显示模式。

    Apparatus and method for measuring distortion of a visible pattern on a substrate by viewing predetermined portions thereof
    5.
    发明授权
    Apparatus and method for measuring distortion of a visible pattern on a substrate by viewing predetermined portions thereof 失效
    用于通过观察其基材的预定部分来测量基板上的可见图案的变形的装置和方法

    公开(公告)号:US06219442B1

    公开(公告)日:2001-04-17

    申请号:US08727199

    申请日:1996-10-08

    IPC分类号: G06K900

    CPC分类号: G01N21/95607 G01N21/93

    摘要: An inspection station for determining the characteristics of a visible overlay pattern on a ceramic substrate includes an electronic camera unit directed at each corner of the overlay pattern. The inspection station is calibrated using a calibration substrate having a known pattern, portions of which are viewed by the cameras. The cameras remain stationary during both the calibration process and during the subsequent inspection of one or more substrates. In a first version of the station, a holder holding the substrate in place is split into quadrants, which are moved with associated camera units to accommodate varying sizes of rectangular substrates. In a second version, a lens is added to increase the magnification of the optical path to the camera units.

    摘要翻译: 用于确定陶瓷衬底上的可见覆盖图案的特性的检查站包括指向覆盖图案的每个角的电子照相机单元。 检查站使用具有已知图案的校准基板进行校准,其中部分由照相机观看。 在校准过程中和在随后检查一个或多个基底期间,照相机保持静止。 在工位的第一版本中,将基板保持在适当位置的夹持器被分成四边形,它们与相关的相机单元一起移动以适应不同尺寸的矩形基板。 在第二版本中,添加透镜以增加到相机单元的光路的放大率。