公开(公告)号：US5699160A

公开(公告)日：1997-12-16

申请号：US710806

申请日：1996-09-23

申请人： Michael Barenboim ,  Peter Michael Baumgart ,  Peter P. Chrusch ,  Benny Michael Harper ,  Benjamin Karni ,  Pieter J. M. Kerstens ,  Michael Gerard Lisanke ,  Hong S. Seing ,  Huizong Lu ,  Lanphuong Thi Pena ,  Ali Reza Taheri ,  Andrew Ching Tam

发明人： Michael Barenboim ,  Peter Michael Baumgart ,  Peter P. Chrusch ,  Benny Michael Harper ,  Benjamin Karni ,  Pieter J. M. Kerstens ,  Michael Gerard Lisanke ,  Hong S. Seing ,  Huizong Lu ,  Lanphuong Thi Pena ,  Ali Reza Taheri ,  Andrew Ching Tam

IPC分类号： G01B9/02 ,  G01B11/22 ,  G11B5/84

CPC分类号： G01B9/02019 ,  G01B11/22 ,  G01B9/02057 ,  G11B5/8404 ,  G01B2290/45 ,  G01B2290/70

摘要： Inspection apparatus for determining the profile of textured spots extending in a pattern along a surface of a magnetic disk includes an interferometer which illuminates first and second, adjacently disposed test spots on the surface. The disk and the interferometer are moved, relative to one another, so that one of the test spots traverses the textured spots in the pattern while the other test spot is moved along a flat portion of the disk surface. In one embodiment, the inspection apparatus is built into the device forming the textured spots, providing feedback controlling the texturing process.

摘要翻译： 用于确定沿着磁盘表面沿图案延伸的纹理斑点的轮廓的检查装置包括：照射第一和第二相邻设置在表面上的测试点的干涉仪。 盘和干涉仪相对于彼此移动，使得一个测试点在图案中穿过纹理斑点，而另一个测试点沿着盘表面的平坦部分移动。 在一个实施例中，检查装置内置在形成纹理斑点的装置中，提供控制纹理化工艺的反馈。

公开(公告)号：US5822211A

公开(公告)日：1998-10-13

申请号：US748642

申请日：1996-11-13

申请人： Michael Barenboim ,  Peter Michael Baumgart ,  Peter P. Chrusch ,  Benny Michael Harper ,  Benjamin Kami ,  Pieter J. M. Kerstens ,  Michael Gerard Lisanke ,  Huizong Lu ,  Lanphuong Thi Pena ,  Eric V. Schnetzer ,  Hong S. Seing ,  Ali Reza Taheri ,  Andrew Ching Tam

发明人： Michael Barenboim ,  Peter Michael Baumgart ,  Peter P. Chrusch ,  Benny Michael Harper ,  Benjamin Kami ,  Pieter J. M. Kerstens ,  Michael Gerard Lisanke ,  Huizong Lu ,  Lanphuong Thi Pena ,  Eric V. Schnetzer ,  Hong S. Seing ,  Ali Reza Taheri ,  Andrew Ching Tam

IPC分类号： B23K26/00 ,  B23K26/067 ,  B23K26/08 ,  G11B5/82 ,  G11B5/84 ,  G11B23/00 ,  G06F19/00

CPC分类号： B23K26/0084 ,  B23K26/067 ,  B23K26/0676 ,  B23K26/0823 ,  G11B23/0028 ,  G11B5/82 ,  G11B5/8404 ,  G11B5/8408

摘要： A disk texturing process uses a single pulsed laser to texture disks within a first group, which are carried through the texturing process on a first spindle assembly, and from a second group, which are carried through the texturing process on a second spindle assembly. Preferably, disks from the first group are textured alternately with disks in the second group. A first level of least one texturing parameter is stored for use only as the process is applied to disks from the first group, while a second level of the same texturing parameter is stored for use only as the process is applied to disks from the second group. These levels may be derived from measurements of textured spots made with interferometric devices forming portions of a texturing station.

摘要翻译： 磁盘纹理化处理使用单个脉冲激光来纹理在第一组内的光盘，第一组中的光盘通过第一主轴组件上的纹理化处理以及通过第二主轴组件上的纹理化工艺承载的第二组。 优选地，来自第一组的盘与第二组中的盘交替地纹理化。 存储第一级至少一个纹理参数，以便仅当该过程应用于来自第一组的磁盘时使用，而相同纹理参数的第二级别被存储以供使用，因为该过程被应用于来自第二组的磁盘 。 这些水平可以来自用形成纹理站的部分的干涉仪装置制成的纹理斑点的测量。

公开(公告)号：US5951891A

公开(公告)日：1999-09-14

申请号：US823273

申请日：1997-03-24

申请人： Michael Barenboim ,  Peter Michael Baumgart ,  Pieter J. M. Kerstens ,  Huizong Lu ,  Iraj Kahkesh Pour ,  Eric Von Schnetzer ,  Hong S. Seing ,  Andrew Ching Tam

发明人： Michael Barenboim ,  Peter Michael Baumgart ,  Pieter J. M. Kerstens ,  Huizong Lu ,  Iraj Kahkesh Pour ,  Eric Von Schnetzer ,  Hong S. Seing ,  Andrew Ching Tam

IPC分类号： B23K26/00 ,  B23K26/03 ,  B23K26/067 ,  B23K26/08 ,  G01B11/30

CPC分类号： B23K26/0084 ,  B23K26/032 ,  B23K26/0619 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0652 ,  B23K26/066 ,  B23K26/067 ,  B23K26/0823

摘要： A disk texturing tool is used, for example, to provide textured spots in an annular portion of both sides of a hardfile disk. An optical system includes a laser directed at a beamsplitter to split the laser beam into two beams having approximately equal power, which are directed along parallel paths through a power control optics block to expose simultaneously opposite sides of a disk to be textured. A visible laser beam is also directed along this optical system to an inspection spot on each side of the disk, by which a central portion of each textured spots passes. A beam angle detector detects deflection of a reflection of the inspection beam from this spot in the direction of motion of the disk at this spot. This deflection provides a measure of the topography of the spot.

摘要翻译： 例如，使用磁盘纹理工具来在硬盘的两侧的环形部分中提供纹理斑点。 光学系统包括指向分束器的激光器，以将激光束分成具有大致相等功率的两个光束，所述光束具有大致相等的功率，这些光束沿着平行路径通过功率控制光学块，以同时暴露于待纹理的光盘的相对侧。 可见光激光束也沿着该光学系统引导到盘的每侧的检查点，每个纹理斑点的中心部分通过该检查点。 光束角检测器检测来自该光点的检查光束在该光点处的盘的运动方向上的偏转。 该偏转提供了斑点的形貌的度量。

公开(公告)号：US5710631A

公开(公告)日：1998-01-20

申请号：US789031

申请日：1997-01-27

申请人： Akram Aref Bou-Ghannam ,  Alan David Dorundo ,  Michael Gerard Lisanke ,  Huizong Lu ,  Lanphuong Thi Pena ,  Ali Reza Taheri ,  Samuel Sheung-Lok So ,  Kenneth Wayne Watts ,  Darell Smith Whitaker

发明人： Akram Aref Bou-Ghannam ,  Alan David Dorundo ,  Michael Gerard Lisanke ,  Huizong Lu ,  Lanphuong Thi Pena ,  Ali Reza Taheri ,  Samuel Sheung-Lok So ,  Kenneth Wayne Watts ,  Darell Smith Whitaker

IPC分类号： G01N21/88 ,  G01B9/02

CPC分类号： G01N21/88

摘要： An interferometer is used to locate and examine defects in a test surface of a test specimen. Defects are first located as the test surface is driven past the objective of the interferometer at a constant speed, with a darkfield interferogram being examined as it flows across a row of CCD elements. During this process, the location of each defect is stored. Next, the test specimen is sequentially moved into the locations at which static measurements are made using an area array of CCD elements. During these measurements, the phase angle relationship of the interferometer is varied so that heights of surface segments may be calculated. If some to these segments are located more than a quarter wave length of the interferometer light source from the surface at which the darkfield is established, a process is used to perform height corrections for segments within transition boundaries.

摘要翻译： 使用干涉仪来定位和检查试样表面的缺陷。 当测试表面以恒定的速度被驱动经过干涉仪的目标时，首先定位缺陷，当它们流过一行CCD元件时，检查暗场干涉图。 在此过程中，存储每个缺陷的位置。 接下来，使用CCD元件的区域阵列将测试样本顺序地移动到进行静态测量的位置。 在这些测量期间，改变干涉仪的相位角关系，从而可以计算出表面段的高度。 如果这些段中的一些位于来自暗场建立的表面的干涉仪光源的四分之一波长以上，则使用过程对过渡边界内的段执行高度校正。

公开(公告)号：US5926266A

公开(公告)日：1999-07-20

申请号：US710805

申请日：1996-09-23

申请人： Alan D. Dorundo ,  Michael Gerard Lisanke ,  Huizong Lu ,  Richard J. McCormick ,  Lanphuong Thi Pena ,  Eric V. Schnetzer ,  Ali Reza Taheri

发明人： Alan D. Dorundo ,  Michael Gerard Lisanke ,  Huizong Lu ,  Richard J. McCormick ,  Lanphuong Thi Pena ,  Eric V. Schnetzer ,  Ali Reza Taheri

IPC分类号： G01B9/02 ,  G01B11/06 ,  G01B11/30 ,  G01N21/95 ,  G01J21/00

CPC分类号： G01B11/0608 ,  G01B9/02019 ,  G01B9/02048 ,  G01B9/02068 ,  G01N21/9506 ,  G01B2290/70

摘要： Apparatus for inspecting the surface of a sample includes a wide scanning interferometer, which is used to locate defects, or anomalies in the surface, and a narrow scanning interferometer, which is used to develop profiles of individual defects found by the narrow scanning interferometer. The sample may be driven in rotation about an axis, while the interferometers are independently moved radially to the axis.

摘要翻译： 用于检查样品表面的装置包括用于定位缺陷或表面异常的宽扫描干涉仪和用于形成由窄扫描干涉仪发现的各个缺陷的轮廓的窄扫描干涉仪。 样品可以围绕轴线旋转驱动，而干涉仪独立地径向移动到轴线。

公开(公告)号：US5703684A

公开(公告)日：1997-12-30

申请号：US710818

申请日：1996-09-23

申请人： Huizong Lu ,  Ali Reza Taheri

发明人： Huizong Lu ,  Ali Reza Taheri

IPC分类号： G11B21/21 ,  G01B11/14 ,  G01B9/02

CPC分类号： G01B11/14

摘要： A glide height tester for inspecting a surface of a spinning magnetic disk includes a glide plate, which is mounted to pivot above the disk surface. A reflective surface fastened to the glide plate is imaged by interferometric apparatus which produces a calculated output indicating a first angle of the glide plate. The interferometric apparatus includes a Wollaston prism, which can be rotated 90-degrees to provide an output indicating a second angle of the glide plate, perpendicular to the first angle.

摘要翻译： 用于检查旋转磁盘的表面的滑行高度测试器包括滑动板，其安装成在盘表面上方枢转。 固定到滑板的反射表面通过干涉仪来成像，该装置产生表示滑板的第一角度的计算输出。 该干涉仪包括一个Wollaston棱镜，该棱镜可以旋转90度，以提供指示滑板的第二角度的输出，垂直于第一角度。

公开(公告)号：US5877858A

公开(公告)日：1999-03-02

申请号：US932447

申请日：1997-09-19

申请人： Pieter J. M. Kerstens ,  Huizong Lu ,  Hee Kuwon Park

发明人： Pieter J. M. Kerstens ,  Huizong Lu ,  Hee Kuwon Park

IPC分类号： G01B11/24 ,  G01B11/30 ,  G11B5/82 ,  G11B5/84 ,  G11B33/10 ,  G01B9/02

CPC分类号： G01B11/303 ,  G01B11/2441 ,  G11B5/84 ,  G11B33/10 ,  G11B5/82

摘要： Optical apparatus is provided for inspecting a textured surface measures a level of scattered reflections from the surface, occurring when an inspection laser beam is directed at the surface. In a first version of the apparatus, the intensity of scattered reflections directed at a single light-sensitive element are compared with the intensity of specular reflections directed at another light-sensitive element. In a second version, diffraction rings formed by the scattered reflections are passed through a mask which attenuates their intensity according to differences between the actual diffraction rings and a predetermined diffraction pattern. In a third version, the scattered light is divided by a beamsplitter to pass through one mask which increases attenuation as the diffraction rings are increased in size compared to a predetermined diffraction pattern or through another mask which decreases attenuation as the diffraction rings are decreased in size compared to the predetermined diffraction pattern.

摘要翻译： 光学装置被设置用于检查纹理表面，以测量来自表面的散射反射水平，当检查激光束指向表面时发生。 在设备的第一版本中，将针对单个光敏元件的散射反射的强度与针对另一个光敏元件的镜面反射的强度进行比较。 在第二版本中，通过散射反射形成的衍射环通过掩模，该掩模根据实际衍射环和预定衍射图案之间的差异来衰减其强度。 在第三版本中，散射光被分束器分割以通过一个掩模，当预定的衍射图形与衍射环的尺寸相比增加时，通过一个掩模增加衰减，或通过另一个减小衰减的掩模，因为衍射环尺寸减小 与预定的衍射图案相比。

公开(公告)号：US5784163A

公开(公告)日：1998-07-21

申请号：US710807

申请日：1996-09-23

申请人： Huizong Lu ,  Ali Reza Taheri

发明人： Huizong Lu ,  Ali Reza Taheri

IPC分类号： G01B11/06 ,  G01B11/30 ,  G01N21/95 ,  G01B9/02

CPC分类号： G01B11/303 ,  G01B11/0608 ,  G01N21/9506

摘要： An interferometer forms a pair of projected sub-beams by decomposing a single coherent, linearly-polarized beam. These sub-beams are focussed by an objective lens onto a pair of test spots on a test surface. The reflections of these sub-beams are recombined to form an elliptically polarized return beam, which is broken into return sub-beams of opposing polarities in a polarizing beam splitter. The intensities of these return sub-beams are used to calculate a difference in height between the two test spots. When these test spots are aligned along a path of relative motion with the test surface, the resulting differences in height are added to form an accumulative profile of the test surface.

摘要翻译： 干涉仪通过分解单个相干线性偏振光束形成一对投影子光束。 这些子光束被物镜聚焦在测试表面上的一对测试点上。 这些子光束的反射被重新组合以形成椭圆偏振的返回光束，其在偏振分束器中被分解成相反极性的返回子光束。 这些返回子光束的强度用于计算两个测试点之间的高度差。 当这些测试点沿着与测试表面的相对运动的路径对准时，加上所产生的高度差异以形成测试表面的累积轮廓。

公开(公告)号：US06798970B1

公开(公告)日：2004-09-28

申请号：US10085625

申请日：2002-02-26

申请人： Robert Brown ,  Jeffrey E. Leclaire ,  Huizong Lu ,  John L. Sullivan

发明人： Robert Brown ,  Jeffrey E. Leclaire ,  Huizong Lu ,  John L. Sullivan

IPC分类号： G02B600

CPC分类号： G02B6/3636 ,  G02B6/3612 ,  G02B6/368

摘要： An apparatus for placing a fiber on a substrate, the apparatus including a base, a supporting member attached to the base, a first placement head attached to the support member, the first placement head having an extendable plunger slidably coupled to the first placement head, the first placement head having an airflow channel formed proximate to a tip of the plunger, a substrate carrier attached to the base, wherein, during operation of the apparatus, the substrate carrier holds a substrate beneath the plunger mechanism, and wherein, during operation of the apparatus, a vacuum source is connected to the placement head to draw a flow of air through the airflow channel, and wherein, during operation of the apparatus, the placement head picks up and holds a fiber against the plunger tip using forces associated with the flow of air.

摘要翻译： 一种用于将光纤放置在基板上的装置，该装置包括基座，附接到基座的支撑构件，附接到支撑构件的第一放置头，第一放置头具有可滑动地联接到第一放置头的可伸缩柱塞， 所述第一放置头具有靠近所述柱塞的尖端形成的气流通道，附接到所述基座的衬底载体，其中在所述装置的操作期间，所述衬底载体将衬底保持在所述柱塞机构下方，并且其中，在操作期间， 该设备中，真空源连接到放置头以吸引空气流通过气流通道，并且其中，在设备的操作期间，放置头使用与所述设备相关联的力拾取并保持纤维抵靠柱塞顶端 空气流动

公开(公告)号：US06829419B1

公开(公告)日：2004-12-07

申请号：US10067522

申请日：2002-02-04

申请人： Robert Brown ,  Jeffrey E. Leclaire ,  Huizong Lu ,  John L. Sullivan

发明人： Robert Brown ,  Jeffrey E. Leclaire ,  Huizong Lu ,  John L. Sullivan

IPC分类号： G02B626

CPC分类号： G02B6/3636 ,  G02B6/262 ,  G02B6/362 ,  G02B6/368

摘要： A method of aligning fibers on a substrate includes placing a grooved substrate on a base next to an opening formed through a top surface of the base, flowing air through the opening to draw the plurality of fibers down towards the top surface of the substrate or base, placing a set of fibers to extend over the substrate or base and over the opening and bonding the plurality of fibers to the substrate.

摘要翻译： 在基板上对准纤维的方法包括将带凹槽的基板放置在靠近基底的顶表面形成的开口的基部上，使空气流过开口以将多个纤维向下朝向基底或基底的顶表面 将一组纤维放置在衬底或基底上并且在开口上方并且将多根纤维粘合到衬底上。