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1.发明授权Method and apparatus for enhanced sensitivity fly height testing and measurement 失效增强灵敏度飞高测试和测量的方法和装置公开(公告)号：US06665077B1
公开(公告)日：2003-12-16
申请号：US09884929
申请日：2001-06-21
IPC分类号： G01B1102
CPC分类号： G11B5/6005 , G01B11/026 , G11B5/00 , G11B2005/001
摘要： A method and apparatus for performing interferometric measurement/testing of flying heights of read-write head sliders utilizing an improved rotating disk, the disk having a central opening for use with a spindle for rotation about a central axis, the disk comprising: a substrate comprised of a light transmissive material and including a pair of opposed, smooth, major surfaces; and a wear-resistant, protective overcoat layer on one of the major surfaces for improving the tribological properties thereof; wherein the optical properties of the one surface of the disk are optimized for enhancing the sensitivity of the interferometric measurement/testing by increasing the intensity of reflected light received by a detector of the apparatus.
摘要翻译： 一种用于利用改进的旋转盘对读写头滑块的飞行高度进行干涉测量/测试的方法和装置，所述盘具有用于与中心轴线一起旋转的心轴的中心开口，所述盘包括：衬底， 的透光材料并且包括一对相对的，平滑的主表面; 在其中一个主表面上具有耐磨保护外涂层，用于改善其摩擦学性能;其中盘的一个表面的光学性质被优化，以通过增加反射的强度来提高干涉测量/测试的灵敏度 由装置的检测器接收的光。
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公开(公告)号：US06753130B1
公开(公告)日：2004-06-22
申请号：US10047105
申请日：2002-01-17
申请人： Jianwei Liu , David Shiao-Min Kuo , Li-Ping Wang
发明人： Jianwei Liu , David Shiao-Min Kuo , Li-Ping Wang
IPC分类号： G03F700
摘要： A method for patterning a carbon-containing substrate utilizing a patterned layer of a resist material as a mask and then safely removing the mask from the substrate without adversely affecting the substrate, comprising sequential steps of: (a) providing a substrate including a surface comprising carbon; (b) forming a thin metal layer on the substrate surface; (c) forming a layer of a resist material on the thin metal layer; (d) patterning the layer of resist material; (e) patterning the substrate utilizing the patterned layer of resist material as a pattern-defining mask; and (f) removing the mask utilizing the thin metal layer as a wet strippable layer or a plasma etch/ash stop layer.
摘要翻译： 一种利用抗蚀剂材料的图案化层作为掩模来图案化含碳衬底的方法，然后从衬底安全地除去掩模而不会不利地影响衬底，包括以下顺序的步骤：（a）提供包括表面的衬底，包括： 碳;（b）在所述基板表面上形成薄金属层;（c）在所述薄金属层上形成抗蚀剂材料层;（d）图案化所述抗蚀剂材料层;（e） 抗蚀剂材料层作为图案定义掩模; 和（f）使用薄金属层作为湿剥离层或等离子体蚀刻/灰停止层去除掩模。
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公开(公告)号：US06338811B2
公开(公告)日：2002-01-15
申请号：US09874544
申请日：2001-06-04
IPC分类号： B29C5900
CPC分类号： G11B5/8404
摘要： A method for producing a substantially smooth surface on a computer disk media comprises providing a substantially smooth master surface. A curable polymer dielectric composition is applied to the master surface as well as the surface of the disk to be smoothed. The master surface is then pressed onto the disk surface and the polymer is cured. The master surface is then removed and the cured polymer forms a smooth surface on the disk.
摘要翻译： 用于在计算机磁盘介质上产生基本平滑表面的方法包括提供基本平滑的主表面。 将可固化聚合物电介质组合物施加到主表面以及待平滑的盘的表面。 然后将主表面压在盘表面上，聚合物固化。 然后去除主表面，并且固化的聚合物在盘上形成光滑的表面。
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公开(公告)号：US20130070370A1
公开(公告)日：2013-03-21
申请号：US13618691
申请日：2012-09-14
申请人： Yuan Xu , Wei Hu , Justin Jia-Jen Hwu , Gene Gauzner , Koichi Wago , David Shiao-Min Kuo
发明人： Yuan Xu , Wei Hu , Justin Jia-Jen Hwu , Gene Gauzner , Koichi Wago , David Shiao-Min Kuo
IPC分类号： G11B5/74
摘要： A planarization process may planarize a media disk that has data trenches between data features and larger servo trenches between servo features. A filler material layer is deposited on the media disk and provides step coverage of the trenches. The filler material has data recesses over the data trenches and servo recesses over the servo trenches that must be removed to produce a planar media surface. A first planarization process is used to remove the data recesses and a second planarization process is used to remove the servo recesses.
摘要翻译： 平坦化处理可以平坦化在伺服特征之间具有数据特征和较大伺服沟槽之间的数据沟槽的介质盘。 填充材料层沉积在介质盘上并提供沟槽的台阶覆盖。 填充材料在伺服沟槽上的数据沟槽和伺服凹槽上具有必须被移除以产生平面介质表面的数据凹槽。 使用第一平面化处理来去除数据凹槽，并且使用第二平面化处理来去除伺服凹部。
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公开(公告)号：US20120196094A1
公开(公告)日：2012-08-02
申请号：US13018416
申请日：2011-01-31
申请人： Yuan Xu , Kim Lee , Wei Hu , Koichi Wago , David Shiao-Min Kuo
发明人： Yuan Xu , Kim Lee , Wei Hu , Koichi Wago , David Shiao-Min Kuo
CPC分类号： G11B5/84 , G11B5/746 , G11B5/855 , Y10T428/24479 , Y10T428/24802
摘要： A method for nano-patterning includes imprinting features in a resist with an imprint mold to form one or more topographic surface patterns on the imprinted resist. A a block copolymer (“BCP”) material is deposited on the imprinted resist, wherein a molecular dimension L0 of the BCP material correlates by an integer multiple to a spacing dimension of the one or more topographic surface patterns on the imprinted resist. The deposited BCP is annealed and at least a portion of the annealed BCP is removed, forming a template having discrete domains.
摘要翻译： 纳米图案的方法包括在抗蚀剂中用压印模具压印特征以在印刷抗蚀剂上形成一个或多个形貌表面图案。 在压印抗蚀剂上沉积嵌段共聚物（“BCP”）材料，其中BCP材料的分子尺寸L0与印迹抗蚀剂上的一个或多个形貌表面图案的间隔尺寸相乘一整数倍。 将沉积的BCP退火，并且去除退火的BCP的至少一部分，形成具有离散区域的模板。
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6.发明授权Method of calibrating a system for detecting contact of a glide head with a recording media surface 失效校准用于检测滑动头与记录介质表面的接触的系统的方法公开(公告)号：US06293135B1
公开(公告)日：2001-09-25
申请号：US09664713
申请日：2000-09-19
IPC分类号： G01B1130
CPC分类号： G01N29/2418 , G01N2291/014 , G11B21/21 , G11B33/10
摘要： A method and apparatus for calibrating a glide head and detector system performs a pre-screening to ensure the quality of the glide head and the piezoelectric sensor in the detection system. The glide head and the piezoelectric sensor detect a signal when the glide head makes contact with the disk, such as a magnetic recording disk. Calibration of the detection system utilizes a specially made bump disk that has asperities of desired height and size that protrude out of a flat disk surface. The glide head is flown over the bump disk, and by gradually reducing the disk spinning velocity, the head is brought closer to the disk and eventually into contact with the asperity. The onset of contact, as detected by the piezoelectric sensor, defines a disk spinning velocity for the head to fly at the desired height. In order to decouple the glide head flying characteristics and the piezoelectric quality and transfer function from other factors that affect the calibration of the detection system, laser pulses are directed at the glide head. Head vibrations are introduced in the glide head and detected by the piezoelectric sensor. The head excitations are recorded as a spectrogram in which the resonance frequencies are observed. From the amplitude and frequency readings, head resonance frequencies are identified and the piezoelectric sensor response is characterized. This allows the pre-screening of the head/sensor system and the decoupling of the glide head flying characteristics and the piezoelectric sensor quality from the asperity integrity effects on the calibration of the detection system.
摘要翻译： 用于校准滑行头和检测器系统的方法和装置进行预筛选以确保检测系统中的滑动头和压电传感器的质量。 滑动头和压电传感器在滑动头与磁盘（例如磁记录盘）接触时检测信号。 检测系统的校准使用特别制造的凸起盘，其具有从平坦盘表面突出的期望的高度和尺寸的粗糙度。 滑动头在凸块上方飞行，通过逐渐减小磁盘旋转速度，磁头更接近磁盘并最终与凹凸接触。 由压电传感器检测到的接触开始限定了磁头旋转速度以使头部以期望的高度飞行。 为了从其他影响检测系统校准的因素中去除滑行头的飞行特性和压电质量和传递函数，激光脉冲指向滑行头。 头部振动被引入到滑动头中并由压电传感器检测。 磁头激励被记录为其中观察到共振频率的频谱图。 从振幅和频率读数，识别头部谐振频率，并表征压电传感器响应。 这允许头部/传感器系统的预筛选和滑翔头飞行特性和压电传感器质量的去耦从对检测系统的校准的粗糙度完整性影响。
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公开(公告)号：US08946835B2
公开(公告)日：2015-02-03
申请号：US13618691
申请日：2012-09-14
申请人： Yuan Xu , Wei Hu , Justin Jia-Jen Hwu , Gene Gauzner , Koichi Wago , David Shiao-Min Kuo
发明人： Yuan Xu , Wei Hu , Justin Jia-Jen Hwu , Gene Gauzner , Koichi Wago , David Shiao-Min Kuo
IPC分类号： H01L29/82
摘要： A planarization process may planarize a media disk that has data trenches between data features and larger servo trenches between servo features. A filler material layer is deposited on the media disk and provides step coverage of the trenches. The filler material has data recesses over the data trenches and servo recesses over the servo trenches that must be removed to produce a planar media surface. A first planarization process is used to remove the data recesses and a second planarization process is used to remove the servo recesses.
摘要翻译： 平坦化处理可以平坦化在伺服特征之间具有数据特征和较大伺服沟槽之间的数据沟槽的介质盘。 填充材料层沉积在介质盘上并提供沟槽的台阶覆盖。 填充材料在伺服沟槽上的数据沟槽和伺服凹槽上具有必须被移除以产生平面介质表面的数据凹槽。 使用第一平面化处理来去除数据凹槽，并且使用第二平面化处理来去除伺服凹部。
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公开(公告)号：US06987627B1
公开(公告)日：2006-01-17
申请号：US10417220
申请日：2003-04-17
IPC分类号： G11B5/86
CPC分类号： G11B11/10582 , G11B5/865 , G11B11/10578
摘要： A device for use in performing simultaneous contact printing of magnetic patterns in opposing surfaces of a dual-sided magnetic or magneto-optical (MO) recording medium, comprising: (a) a fixedly mounted first magnetic pole having a first end surface; (b) an axially movable second magnetic pole in axial alignment with the first magnetic pole, the second magnetic pole having a second end surface opposite to and facing the first end surface of the first magnetic pole; (c) a first portion of a centering insert fixture mounted on the first end surface of the first magnetic pole; and (d) a second portion of a centering insert fixture mounted on the second end surface of the second magnetic pole.
摘要翻译： 一种用于在双面磁或磁光（MO）记录介质的相对表面中同时进行磁图案的接触印刷的装置，包括：（a）固定安装的第一磁极，其具有第一端面; （b）与所述第一磁极轴向对准的可轴向移动的第二磁极，所述第二磁极具有与所述第一磁极的第一端面相对并面对所述第一磁极的第二端面; （c）安装在第一磁极的第一端面上的定心插入夹具的第一部分; 和（d）安装在第二磁极的第二端面上的定心插入夹具的第二部分。
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公开(公告)号：US06949199B1
公开(公告)日：2005-09-27
申请号：US10087846
申请日：2002-03-05
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G11B5/59633 , G11B5/743 , G11B5/82 , Y10S977/887
摘要： A method of performing thermal imprint lithography of a surface of a thermoplastic layer-coated workpiece for forming a pattern therein comprises pre-heating the workpiece to a pre-selected high temperature prior to inserting the workpiece in a stamping/imprinting tool maintained at a predetermined lower temperature, whereby the interval for thermal cycling of the stamping/imprinting tool between higher and lower temperatures is eliminated or at least reduced. Applications of the method include forming servo patterns in disk-shaped substrates for hard disk recording media.
摘要翻译： 对在其中形成图案的热塑性层涂覆的工件的表面进行热压印光刻的方法包括在将工件插入保持在预定的压印/压印工具之前将工件预加热到预选的高温 较低的温度，从而消除或至少减少了冲压/压印工具在较高和较低温度之间的热循环间隔。 该方法的应用包括在用于硬盘记录介质的盘形基底中形成伺服图案。
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公开(公告)号：US06519114B1
公开(公告)日：2003-02-11
申请号：US09272786
申请日：1999-03-19
申请人： Li-Ping Wang , David Shiao-Min Kuo , Wei Hsin Yao
发明人： Li-Ping Wang , David Shiao-Min Kuo , Wei Hsin Yao
IPC分类号： G11B584
CPC分类号： G11B5/855 , G11B5/6005
摘要： A storage medium is provided that includes a texture zone having a plurality of protrusions. Each of the protrusions is separated by a short circumferential pitch. Alternatively, the texture zone includes a plurality of protrusions with a circumferential pitch less than the diameter of any protrusion. The resonance excitation between the magnetic head and the storage medium in the data storage system is reduced by forming the texture zone with the protrusions that cause the excitation frequencies of the data storage system to shift away from its resonance frequencies.
摘要翻译： 提供一种存储介质，其包括具有多个突起的纹理区域。 每个突起被短的圆周间距分开。 或者，纹理区域包括具有小于任何突起的直径的周向间距的多个突起。 数据存储系统中的磁头和存储介质之间的共振激励通过用引起数据存储系统的激发频率偏离谐振频率的突起形成纹理区而减小。
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