公开(公告)号：US4525262A

公开(公告)日：1985-06-25

申请号：US555449

申请日：1983-11-28

申请人： Walter H. Class ,  Steven D. Hurwitt ,  Michael L. Hill

发明人： Walter H. Class ,  Steven D. Hurwitt ,  Michael L. Hill

IPC分类号： H01J37/34 ,  C23C15/00

CPC分类号： H01J37/3405

摘要： The film deposition rate of metallic compounds onto a substrate in a vacuum chamber by reactive sputtering or reactive ion plating is significantly increased by providing a substrate support with spaced apart magnetic poles to create a magnetic field having lines of force which leave the support, extend across a surface of the substrate exposed to a metallic coating source and re-enter the support to enclose the exposed surface in a localized magnetic electron-trapping field. A reactive gas is fed into the chamber, and a bias voltage is applied to the substrate support sufficient to create a dense glow discharge of ionized reactive gas closely adjacent to the substrate surface. The reactive gas ions react with metallic particles deposited on the exposed substrate surface from the coating source to form a film of the desired metallic compound. The localized magnetic plasma trap close to the substrate increases the chemical reaction rate at the substrate and reduces back sputtering, to result in a metallic compound coating having superior physical and chemical characteristics.

摘要翻译： 通过反应溅射或反应离子电镀在真空室中的金属化合物在基板上的成膜速率通过提供具有间隔开的磁极的基板支撑而产生具有离开载体的力线的磁场而显着增加 所述基板的表面暴露于金属涂层源并重新进入所述支撑件以将所述暴露表面包围在局部磁性电子捕获场中。 将反应性气体进料到室中，并且将偏置电压施加到衬底支撑件，足以产生与衬底表面紧密相邻的电离反应气体的致密辉光放电。 反应气体离子与沉积在暴露的基底表面上的金属颗粒与涂层源反应，形成所需金属化合物的膜。 靠近基板的局部磁等离子体阱增加了基板的化学反应速率，并减少了反溅射，从而导致具有优异的物理和化学特性的金属化合物涂层。

公开(公告)号：US4472259A

公开(公告)日：1984-09-18

申请号：US316433

申请日：1981-10-29

申请人： Walter H. Class ,  Arnold J. Aronson ,  Steven D. Hurwitt ,  Michael L. Hill

发明人： Walter H. Class ,  Arnold J. Aronson ,  Steven D. Hurwitt ,  Michael L. Hill

IPC分类号： H01J37/34 ,  C23C15/00

CPC分类号： H01J37/3405

摘要： A cathode assembly for use in a magnetron sputtering system, the system having a cathode assembly with parallel elongated target segments which are formed substantially of a material which is desired to be sputter-deposited onto a substrate. The elongated target segments are each provided with a material removal surface which is inclined toward the other segment with respect to the plane of the substrate. Such inclination permits the material which is removed from the target bars to be focused onto a relatively narrow area, thereby improving the efficiency of the sputtering operation and reducing machine down-time for cleaning and vacuum pumping. In other embodiments, end target segments are provided for improving the efficiency of film deposition near the ends of the elongated bars. The end target segments are provided with material removal surfaces which are also inclined, and connect with the elongated target segments to form a rectangular frame arrangement.

摘要翻译： 一种用于磁控溅射系统的阴极组件，该系统具有阴极组件，该阴极组件具有基本上由期望溅射沉积到衬底上的材料形成的平行细长靶区段。 细长的目标区段各自设置有相对于基板的平面朝向另一个段倾斜的材料去除表面。 这种倾斜允许将从目标棒移除的材料聚焦到相对较窄的区域上，从而提高溅射操作的效率并减少清洗和真空泵送的机器停机时间。 在其他实施例中，提供端部目标段用于提高细长杆端部附近的膜沉积的效率。 末端目标区段设置有也倾斜的材料去除表面，并且与细长目标区段连接以形成矩形框架布置。

公开(公告)号：US5847530A

公开(公告)日：1998-12-08

申请号：US920052

申请日：1997-08-28

申请人： Michael L. Hill

发明人： Michael L. Hill

IPC分类号： H02P6/08 ,  G05B11/28

CPC分类号： H02P6/08

摘要： A brushless DC motor is controlled by determining a speed of the motor and a line voltage supplying drivers of the motor. Based upon these determined values and predetermined motor performance data, a maximum PWM on-time is determined for drive signals supplied to windings of the motor. This maximum PWM on-time thereby limits motor torque output to a predetermined maximum. Stopping the motor is performed in sequential phases including a loaded generator phase, an active braking phase and a holding phase. During holding, the amount of energy supplied to the motor is reduced to the point just before slippage such that holding energy is minimized. Upon power failure, the motor is driven toward a spring return home position overcoming static friction that may prevent the spring return mechanism from functioning properly. These techniques are applied to a motor in an actuator.

摘要翻译： 无刷直流电动机通过确定电动机的速度和电动机的线路电压供应来控制。 基于这些确定的值和预定的电动机性能数据，确定提供给电动机绕组的驱动信号的最大PWM导通时间。 该最大PWM导通时间从而将电机转矩输出限制到预定的最大值。 停止电动机在连续的阶段执行，包括负载的发电机相，主动制动阶段和保持阶段。 在保持期间，提供给马达的能量减少到滑动之前的点，使得保持能量最小化。 电源故障时，马达被驱动回弹簧返回原位，克服可能妨碍弹簧复位机构正常工作的静摩擦。 这些技术应用于致动器中的电动机。

公开(公告)号：US5838124A

公开(公告)日：1998-11-17

申请号：US920053

申请日：1997-08-28

申请人： Michael L. Hill

发明人： Michael L. Hill

IPC分类号： H02P6/00 ,  H02P6/08 ,  H02P6/24 ,  H02P1/00

CPC分类号： H02P6/24 ,  H02P6/00 ,  H02P6/085

摘要： A brushless DC motor is controlled by determining a speed of the motor and a line voltage supplying drivers of the motor. Based upon these determined values and predetermined motor performance data, a maximum PWM on-time is determined for drive signals supplied to windings of the motor. This maximum PWM on-time thereby limits motor torque output to a predetermined maximum. Stopping the motor is performed in sequential phases including a loaded generator phase, an active braking phase and a holding phase. During holding, the amount of energy supplied to the motor is reduced to the point just before slippage such that holding energy is minimized. Upon power failure, the motor is driven toward a spring return home position overcoming static friction that may prevent the spring return mechanism from functioning properly. These techniques are applied to a motor in an actuator.

摘要翻译： 无刷直流电动机通过确定电动机的速度和电动机的线路电压供应来控制。 基于这些确定的值和预定的电动机性能数据，确定提供给电动机绕组的驱动信号的最大PWM导通时间。 该最大PWM导通时间从而将电机转矩输出限制到预定的最大值。 停止电动机在连续的阶段执行，包括负载的发电机相，主动制动阶段和保持阶段。 在保持期间，提供给马达的能量减少到滑动之前的点，使得保持能量最小化。 电源故障时，马达被驱动回弹簧返回原位，克服可能妨碍弹簧复位机构正常工作的静摩擦。 这些技术应用于致动器中的电动机。

公开(公告)号：US4422896A

公开(公告)日：1983-12-27

申请号：US342976

申请日：1982-01-26

申请人： Walter H. Class ,  Steven D. Hurwitt ,  Michael L. Hill ,  Marvin K. Hutt

发明人： Walter H. Class ,  Steven D. Hurwitt ,  Michael L. Hill ,  Marvin K. Hutt

IPC分类号： H01L21/302 ,  C23F4/00 ,  H01J37/32 ,  H01J37/34 ,  H01L21/3065 ,  H01L21/306 ,  B44C1/22 ,  C03C15/00 ,  C03C25/06

CPC分类号： H01J37/32623 ,  C23F4/00 ,  H01J37/3266 ,  H01J37/3405

摘要： Method and apparatus are disclosed for plasma treating a substrate in a hermetic chamber with a magnetic field having lines of force which leave a support, extend across the surface of the substrate and re-enter the support to enclose the substrate exposed surface in a magnetic electron-trapping field. The voltage applied to the substrate support is adjusted to produce a dense glow discharge closely adjacent the substrate surface for reacting chemically therewith.

摘要翻译： 公开了用于等离子体处理密封室中的衬底的方法和装置，其中具有留下支撑件的力线的磁场延伸穿过衬底的表面并重新进入支撑件以将衬底暴露表面包围在磁性电子 捕捉字段。 调节施加到基板支撑件上的电压以产生与基板表面紧密相邻的致密辉光放电，以与其进行化学反应。

公开(公告)号：US06966433B1

公开(公告)日：2005-11-22

申请号：US10771922

申请日：2004-02-04

申请人： Michael L. Hill ,  Patrick G. Hill

发明人： Michael L. Hill ,  Patrick G. Hill

IPC分类号： B65G15/60 ,  B65G15/62 ,  B65G21/22

CPC分类号： B65G15/62 ,  B65G21/22

摘要： A roller-chain conveyor includes a guide plate to support the load carried by the roller-chain conveyor belt, and to maintain the roller-chain on a consistent track. A guide plate is carried on top of a stiff foundation plate to resist load-induced deflection. Foundation plates desirably carry hold-down structure adapted for reception in socket structure formed in the guide plate. Operable socket structure can be formed to include a T-slot. A cooperating hold-down structure is a mushroom-shaped peg affixed to the foundation plate. Such a guide plate is installed by lowering the guide plate onto the foundation plate to place the peg into reception in the socket. Then, the guide plate is slid axially to engage a rim of the T-slot under the mushroom head. One or more fasteners is then typically placed through the guide plate and into the foundation plate to resist axial motion effective to decouple the peg and socket. Guide plates desirably are made from a plastic material, such as Tyvar 88.

摘要翻译： 滚子链输送机包括用于支撑由滚子链传送带承载的载荷的引导板，并且将滚子链保持在一致的轨道上。 引导板承载在刚性基础板的顶部以抵抗负载引起的偏转。 基板优选地具有适于在形成在导向板中的插座结构中接收的压紧结构。 可操作的插座结构可以形成为包括T形槽。 合作的压紧结构是固定在基础板上的蘑菇状的栓钉。 这样的导板通过将引导板下降到基础板上而将钉子插入插座中来进行安装。 然后，引导板轴向滑动以与伞形头下的T形槽的边缘接合。 然后通常将一个或多个紧固件穿过引导板放置到基础板中以抵抗轴向运动，以有效地使钉和套筒分离。 导板理想地由塑料材料制成，例如Tyvar 88。

公开(公告)号：US06851620B2

公开(公告)日：2005-02-08

申请号：US10427317

申请日：2003-04-30

申请人： Michael L. Hill

发明人： Michael L. Hill

IPC分类号： F16K31/04 ,  F24F7/00 ,  F24F11/00 ,  F24F11/02 ,  G05B1/00 ,  G05B11/00 ,  G05B19/04 ,  G05B19/40 ,  H03L7/00

CPC分类号： G05B19/40 ,  F24F11/70 ,  G05B2219/25249 ,  G05B2219/2614 ,  G05B2219/41135 ,  G05B2219/41306

摘要： A system and method of providing floating actuator control is provided. This system and method receives input command signals from an actuator controller, and effectively integrates these signals until the controller has requested a large enough movement of the actuator that the actuator can actually effectuate. At this point, the system and method drive the actuator to the commanded position. As a result, excessive mechanical wear in the actuator caused by small command signal perturbations and dither is reduced or eliminated.

摘要翻译： 提供了提供浮动致动器控制的系统和方法。 该系统和方法从致动器控制器接收输入命令信号，并且有效地整合这些信号，直到控制器请求致动器可以实际执行的致动器的足够大的移动。 此时，系统和方法将执行器驱动到指令位置。 结果，减少或消除了由小的指令信号扰动和抖动引起的致动器中的机械磨损过大。

公开(公告)号：US5872434A

公开(公告)日：1999-02-16

申请号：US920051

申请日：1997-08-28

申请人： Michael L. Hill

发明人： Michael L. Hill

IPC分类号： H02P6/08 ,  H02K7/10

CPC分类号： H02P6/085

摘要： A brushless DC motor is controlled by determining a speed of the motor and a line voltage supplying drivers of the motor. Based upon these determined values and predetermined motor performance data, a maximum PWM on-time is determined for drive signals supplied to windings of the motor. This maximum PWM on-time thereby limits motor torque output to a predetermined maximum. Stopping the motor is performed in sequential phases including a loaded generator phase, an active braking phase and a holding phase. During holding, the amount of energy supplied to the motor is reduced to the point just before slippage such that holding energy is minimized. Upon power failure, the motor is driven toward a spring return home position overcoming static friction that may prevent the spring return mechanism from functioning properly. These techniques are applied to a motor in an actuator.

摘要翻译： 无刷直流电动机通过确定电动机的速度和电动机的线路电压供应来控制。 基于这些确定的值和预定的电动机性能数据，确定提供给电动机绕组的驱动信号的最大PWM导通时间。 该最大PWM导通时间从而将电机转矩输出限制到预定的最大值。 停止电动机在连续的阶段执行，包括负载的发电机相，主动制动阶段和保持阶段。 在保持期间，提供给马达的能量减少到滑动之前的点，使得保持能量最小化。 电源故障时，马达被驱动回弹簧返回原位，克服可能妨碍弹簧复位机构正常工作的静摩擦。 这些技术应用于致动器中的电动机。