Emissivity calibration apparatus and method
    1.
    发明授权
    Emissivity calibration apparatus and method 失效
    发射率校准装置及方法

    公开(公告)号:US4989991A

    公开(公告)日:1991-02-05

    申请号:US365678

    申请日:1989-06-12

    IPC分类号: G01J5/00 G01J5/04

    摘要: An improved method and apparatus are disclosed for calibrating the emissivity characteristics of a semiconductor wafer within a processing chamber by supporting a sample wafer on a graphite susceptor within the chamber and by comparing the temperature measured within the susceptor in close proximity to the center of the wafer with the temperature measured by the emission of radiation from the surface of the wafer through the walls of the processing chamber. Temperature measurements subsequently made from the radiation emitted from the surface of similar wafers are corrected with reference to the measurement made of the temperature within the susceptor on the sample wafer.

    摘要翻译: 公开了一种改进的方法和装置,用于通过将样品晶片支撑在腔室内的石墨感受器上来校准处理室内的半导体晶片的发射率特性,并且通过将基座内测量的温度与晶片的中心相接近 其温度通过从晶片表面通过处理室的壁的辐射而被测量。 随后从相似晶片表面发射的辐射产生的温度测量参照由样品晶片上的基座内的温度进行的测量来校正。

    Emissivity calibration apparatus and method
    2.
    发明授权
    Emissivity calibration apparatus and method 失效
    发射率校准装置及方法

    公开(公告)号:US4854727A

    公开(公告)日:1989-08-08

    申请号:US114542

    申请日:1987-10-26

    IPC分类号: G01J5/00 G01J5/04

    摘要: An improved method and apparatus are disclosed for calibrating the emissivity characteristics of a semiconductor wafer within a processing chamber by supporting a sample wafer on a graphite susceptor within the chamber and by comparing the temperature measured within the susceptor in close proximity to the center of the wafer with the temperature measured by the emission of radiation from the surface of the wafer through the walls of the processing chamber. Temperature measurements subsequently made from the radiation emitted from the surface of similar wafers are corrected with reference to the measurement made of the temperature within the susceptor on the sample wafer.

    摘要翻译: 公开了一种改进的方法和装置,用于通过将样品晶片支撑在腔室内的石墨感受器上来校准处理室内的半导体晶片的发射率特性,并且通过将基座内测量的温度与晶片的中心相接近 其温度通过从晶片表面通过处理室的壁的辐射而被测量。 随后从相似晶片表面发射的辐射产生的温度测量参照由样品晶片上的基座内的温度进行的测量来校正。

    Device and method for vector equalization of an OFDM signal
    3.
    发明授权
    Device and method for vector equalization of an OFDM signal 失效
    OFDM信号矢量均衡的装置和方法

    公开(公告)号:US6061327A

    公开(公告)日:2000-05-09

    申请号:US941624

    申请日:1997-09-30

    摘要: The present invention belongs to the field of transmission of a signal, using OFDM modulation (Orthogonal Frequency Division Multiplexing), from a transmitter to at least one receiver, via a transmission channel. The invention relates in particular to a device and a method for equalization of the received OFDM signal. Said equalization device is fitted into the reception system between a synchronization module and a module for binary decoding of the received signal, in which the receiver includes a recursive vector equalizer (10) capable of correcting the received signal in the time domain.According to the invention, the recursive vector equalizer (10) includes computation means (16; 22; 24; 40; 44; 46; 56) capable of estimating each transmitted symbol as a function of an estimate of the transmitted symbol which precedes the said transmitted symbol.

    摘要翻译: 本发明通过传输信道属于从发射机到至少一个接收机的使用OFDM调制(正交频分复用)的信号传输领域。 本发明具体涉及用于均衡接收的OFDM信号的装置和方法。 所述均衡装置在同步模块和用于对接收信号进行二进制解码的模块之间的接收系统中进行装配,其中接收机包括能够在时域中校正接收信号的递归矢量均衡器(10)。 根据本发明,递归矢量均衡器(10)包括计算装置(16; 22; 24; 40; 44; 46; 56),其能够估计作为所述发射符号之前的发射符号的估计的每个发射符号 传输符号。

    Television signal sub-band coder/decoder with different levels of
compatibility
    6.
    发明授权
    Television signal sub-band coder/decoder with different levels of compatibility 失效
    电视信号子带编码器/解码器具有不同级别的兼容性

    公开(公告)号:US5446495A

    公开(公告)日:1995-08-29

    申请号:US972485

    申请日:1993-02-11

    CPC分类号: H04N19/61 H04N19/63

    摘要: A coder comprising banks of analysis filters (26, 27) for partitioning the spatio-temporal spectrum of each television image into sub-bands. The banks of analysis filters are coupled to devices for differential coding (30.sub.i, 31.sub.i, 32.sub.i) for separately coding the signals obtained in each sub-band. The decoder comprises prediction loops (24; 25; 12, 17 . . . 20, 3, 21, 22, 23) equal in number to the number of sub-bands for reconstructing each television image transmitted by the coder portion together with its level of resolution in each of the sub-bands.

    摘要翻译: PCT No.PCT / FR92 / 00514 Sec。 371日期:1993年2月11日 102(e)日期1993年2月11日PCT提交1992年6月9日PCT公布。 出版物WO92 / 22985 日期1999年12月23日。一种编码器,包括用于将每个电视图像的时空谱划分为子带的分析滤波器组(26,27)。 分析滤波器组耦合到用于差分编码的装置(30i,31i,32i),用于分别编码在每个子带中获得的信号。 解码器包括与用于重建由编码器部分发送的每个电视图像一起的子带​​数量等于数量的预测环路(24; 25; 12,17,17 ... 20,3,21,22,23)及其等级 在每个子频段中的分辨率。

    Method for hierarchical estimation of the movement in a sequence of
images
    7.
    发明授权
    Method for hierarchical estimation of the movement in a sequence of images 失效
    用于分层估计图像序列中的运动的方法

    公开(公告)号:US5278915A

    公开(公告)日:1994-01-11

    申请号:US828993

    申请日:1992-02-04

    摘要: The method consists in effecting a hierarchical decomposition of the image by levels of resolutions, (I.sub.31, I.sub.32, I.sub.33 ; I.sub.21, I.sub.22, I.sub.23 ; I.sub.11, I.sub.12, I.sub.13 ; I), in estimating an overall movement at the coarsest level of resolution and in refining the estimate (I.sub.31, I.sub.32, I.sub.33) in each level as the resolution increases.

    摘要翻译: PCT No.PCT / FR91 / 00416 Sec。 一九九二年二月四日 102(e)日期1992年2月4日PCT提交1991年5月24日PCT公布。 出版物WO91 / 19264 日期为1991年12月12日。该方法包括通过分辨率水平(I31,I32,I33; I21,I22,I23; I11,I12,I13; I)来实现图像的分层分解, 在最高级别的决议和在提高每个级别的估计(I31,I32,I33),随着决议的增加。