公开(公告)号：US20090283599A1

公开(公告)日：2009-11-19

申请号：US12512250

申请日：2009-07-30

申请人： Michio OKAMOTO ,  Hisao Yamagata ,  Nobuo Murakami ,  Keizo Kakitani ,  Hidehiro Fujiwara ,  Takeshi Saitou

发明人： Michio OKAMOTO ,  Hisao Yamagata ,  Nobuo Murakami ,  Keizo Kakitani ,  Hidehiro Fujiwara ,  Takeshi Saitou

IPC分类号： G06K7/00 ,  G06K19/06

CPC分类号： H01Q1/2208 ,  G01N22/04 ,  G06K7/0095 ,  G06K7/10336 ,  G06K7/10465 ,  G06K19/07718 ,  G06K19/07747 ,  G06K19/07749 ,  H01L21/563 ,  H01L22/20 ,  H01L23/49855 ,  H01L24/11 ,  H01L24/16 ,  H01L24/81 ,  H01L2224/13099 ,  H01L2224/13144 ,  H01L2224/16 ,  H01L2224/75 ,  H01L2224/75301 ,  H01L2224/81191 ,  H01L2224/81203 ,  H01L2224/81801 ,  H01L2924/00014 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/0105 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/16152 ,  H01Q17/001 ,  H01L2924/00 ,  H01L2224/0401

摘要： A method accurately inspects whether an IC inlet to be inspected is non-defective or defective in a state in which a large number of IC inlets are formed over an insulating film. The inspection of IC inlets formed over an insulating film is performed by transmitting microwaves to the IC inlets from antennas. To selectively irradiate the microwaves to only one IC inlet to be inspected out of a large number of IC inlets that are formed over the insulating film, a radio-wave absorbing plate is inserted between the insulating film and the antennas, and the microwaves are irradiated to the IC inlet through a slit formed in the radio-wave absorbing plate. The radio-wave absorbing plate is configured such that the slit, which is substantially equal to the IC inlet in size, is formed in a portion of a planar plate that is formed of a radio-wave absorber.

摘要翻译： 在绝缘膜上形成有大量的IC入口的状态下，准确地检查要检查的IC入口是否不良或有缺陷。 在绝缘膜上形成的IC入口的检查通过从天线向IC入口发送微波来进行。 为了在绝缘膜上形成的大量IC入口中仅选择性地将微波照射到要检查的一个IC入口，在绝缘膜和天线之间插入无线电波吸收板，并且照射微波 通过形成在无线电波吸收板中的狭缝到IC入口。 无线电波吸收板被构造成使得与由IC入口大致相等的狭缝形成在由无线电波吸收体形成的平板的一部分中。

公开(公告)号：US20060258025A1

公开(公告)日：2006-11-16

申请号：US11491275

申请日：2006-07-24

申请人： Michio Okamoto ,  Hisao Yamagata ,  Nobuo Murakami ,  Keizo Kakitani ,  Hidehiro Fujiwara ,  Takeshi Saitou

发明人： Michio Okamoto ,  Hisao Yamagata ,  Nobuo Murakami ,  Keizo Kakitani ,  Hidehiro Fujiwara ,  Takeshi Saitou

IPC分类号： H01L21/66 ,  G01R23/16 ,  G01S3/02 ,  G01V3/00

CPC分类号： H01Q1/2208 ,  G01N22/04 ,  G06K7/0095 ,  G06K7/10336 ,  G06K7/10465 ,  G06K19/07718 ,  G06K19/07747 ,  G06K19/07749 ,  H01L21/563 ,  H01L22/20 ,  H01L23/49855 ,  H01L24/11 ,  H01L24/16 ,  H01L24/81 ,  H01L2224/13099 ,  H01L2224/13144 ,  H01L2224/16 ,  H01L2224/75 ,  H01L2224/75301 ,  H01L2224/81191 ,  H01L2224/81203 ,  H01L2224/81801 ,  H01L2924/00014 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/0105 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/16152 ,  H01Q17/001 ,  H01L2924/00 ,  H01L2224/0401

摘要： A method accurately inspects whether an IC inlet to be inspected is non-defective or defective in a state in which a large number of IC inlets are formed over an insulating film. The inspection of IC inlets formed over an insulating film is performed by transmitting microwaves to the IC inlets from antennas. To selectively irradiate the microwaves to only one IC inlet to be inspected out of a large number of IC inlets that are formed over the insulating film, a radio-wave absorbing plate is inserted between the insulating film and the antennas, and the microwaves are irradiated to the IC inlet through a slit formed in the radio-wave absorbing plate. The radio-wave absorbing plate is configured such that the slit, which is substantially equal to the IC inlet in size, is formed in a portion of a planar plate that is formed of a radio-wave absorber.

摘要翻译： 在绝缘膜上形成有大量的IC入口的状态下，准确地检查要检查的IC入口是否不良或有缺陷。 在绝缘膜上形成的IC入口的检查通过从天线向IC入口发送微波来进行。 为了在绝缘膜上形成的大量IC入口中仅选择性地将微波照射到要检查的一个IC入口，在绝缘膜和天线之间插入无线电波吸收板，并且照射微波 通过形成在无线电波吸收板中的狭缝到IC入口。 无线电波吸收板被构造成使得与由IC入口大致相等的狭缝形成在由无线电波吸收体形成的平板的一部分中。