EOP PROBING ON MULTI-DIE STACKS
    1.
    发明公开

    公开(公告)号:US20240201252A1

    公开(公告)日:2024-06-20

    申请号:US18535640

    申请日:2023-12-11

    CPC classification number: G01R31/311

    Abstract: An example method can include focusing a light source onto a circuit of a first memory die of a plurality of memory dies. A light of the light source can reach the circuit of the memory die and can be reflected back toward a sensor. The method can further include receiving the reflection of light from the circuit at the sensor. The method can further include determining whether the circuit is transferring a particular signal based on the reflected light.

    ELECTRO-OPTICAL PROBING AND MECHANICAL MICROPROBING OF MEMORY DIE USING A CANTILEVER

    公开(公告)号:US20250123305A1

    公开(公告)日:2025-04-17

    申请号:US18784516

    申请日:2024-07-25

    Abstract: An example apparatus can include a plurality of metal lines. The example apparatus can further include a cantilever, a diode, or a transistor in contact with at least a first metal line and a second metal line of the plurality of metal lines. The example apparatus can further include a circuit comprising at least one transistor or at least one diode in contact with at least the first metal line of the plurality of metal lines. The example apparatus can further include a diode or transistor in contact with at least the second metal line of the plurality of metal lines. An end of the cantilever is in contact with the first metal line through a first via and a first oxide portion. A portion of the cantilever is in contact with the second metal line through a second via and a second oxide portion.

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