Phosphorous doping a semiconductor particle
    3.
    发明授权
    Phosphorous doping a semiconductor particle 失效
    磷掺杂半导体颗粒

    公开(公告)号:US5926727A

    公开(公告)日:1999-07-20

    申请号:US570028

    申请日:1995-12-11

    摘要: A method (10) of phosphorus doping a semiconductor particle using ammonium phosphate. A p-doped silicon sphere is mixed with a diluted solution of ammonium phosphate having a predetermined concentration. These spheres are dried (16, 18), with the phosphorus then being diffused (20) into the sphere to create either a shallow or deep p-n junction. A good PSG glass layer is formed on the surface of the sphere during the diffusion process. A subsequent segregation anneal process is utilized to strip metal impurities from near the p-n junction into the glass layer. A subsequent HF strip procedure is then utilized to removed the PSG layer. Ammonium phosphate is not a restricted chemical, is inexpensive, and does not pose any special shipping, handling, or disposal requirement.

    摘要翻译: 使用磷酸铵磷掺杂半导体颗粒的方法(10)。 将p掺杂的硅球与预定浓度的磷酸铵的稀释溶液混合。 这些球体被干燥(16,18),然后磷被扩散(20)进入球体以产生浅的或深的p-n结。 在扩散过程中,球体表面形成良好的PSG玻璃层。 利用随后的偏析退火工艺将金属杂质从p-n结附近剥离到玻璃层中。 随后使用随后的HF条带程序去除PSG层。 磷酸铵不是限制性化学品,价格便宜,不构成任何特殊的运输,处理或处置要求。

    Boron doping a semiconductor particle
    4.
    发明授权
    Boron doping a semiconductor particle 失效
    硼掺杂半导体颗粒

    公开(公告)号:US5763320A

    公开(公告)日:1998-06-09

    申请号:US570070

    申请日:1995-12-11

    摘要: A method (10,30) of boron doping a semiconductor particle using boric acid to obtain a p-type doped particle. Either silicon spheres or silicon powder is mixed with a diluted solution of boric acid having a predetermined concentration. The spheres are dried (16), with the boron film then being driven (18) into the sphere. A melt procedure mixes the driven boron uniformly throughout the sphere. In the case of silicon powder, the powder is metered out (38) into piles and melted/fused (40) with an optical furnace. Both processes obtain a p-type doped silicon sphere with desired resistivity. Boric acid is not a restricted chemical, is inexpensive, and does not pose any special shipping, handling, or disposal requirements.

    摘要翻译: 使用硼酸掺杂半导体颗粒以获得p型掺杂颗粒的方法(10,30)。 将硅球或硅粉末与预定浓度的硼酸稀释溶液混合。 将球体干燥(16),然后硼膜被驱动(18)进入球体。 熔融程序将驱动的硼在整个球体中均匀混合。 在硅粉的情况下,将粉末计量(38)成堆并用光学炉熔化(40)。 两种工艺获得具有所需电阻率的p型掺杂硅球体。 硼酸不是限制性化学品,价格便宜,并不构成任何特殊的运输,处理或处置要求。