Abstract:
An apparatus and method for monolithic force transducers in which a sensed force is applied across only two ends of a pair of force sensing elements so that the pair of force sensing elements are loaded in series with one in compression and the other in tension, whereby the force sensed by each of the two force sensing elements are identically equal in magnitude but opposite in sense.
Abstract:
An accelerometer that has a cross coupling coefficient due to pendulum droop of the proof mass that is approximately equal and opposite in sign to a cross coupling coefficient due to resonator nonlinearity. The accelerometer includes a proof mass, a housing having at least two opposing interior walls, and one or more flexures for flexibly connecting the proof mass at a first end to a first one of the opposing walls of the housing. A first resonator is connected to a first surface of the proof mass at an end of the proof mass opposite the first end and to the housing wall that is not attached to the flexure. A second resonator is connected to a second surface of the proof mass and the housing wall that receives the first resonator. The second surface is on an opposite side of the proof mass as the first surface.
Abstract:
An accelerometer that has a cross coupling coefficient due to pendulum droop of the proof mass that is approximately equal and opposite in sign to a cross coupling coefficient due to resonator nonlinearity. The accelerometer includes a proof mass, a housing having at least two opposing interior walls, and one or more flexures for flexibly connecting the proof mass at a first end to a first one of the opposing walls of the housing. A first resonator is connected to a first surface of the proof mass at an end of the proof mass opposite the first end and to the housing wall that is not attached to the flexure. A second resonator is connected to a second surface of the proof mass and the housing wall that receives the first resonator. The second surface is on an opposite side of the proof mass as the first surface.
Abstract:
A technique is described for tailoring the configuration of electrodes on a piezoelectric beam such that the tendency of the beam to vibrate in a predetermined flexure mode is enhanced. The mode has a predetermined longitudinal strain versus longitudinal position profile. At least two electrodes are mounted on the beam, and the configuration of at least one electrode varies as a function of longitudinal position, such that when a voltage difference is applied between the electrodes, the longitudinal force produced by the electrodes, as a function of longitudinal position, approximates the longitudinal strain versus longitudinal position profile. The configuration may be varied by varying the width of the electrode or the position of the electrode on the underlying beam surface.