利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

26 条记录 (耗时 0.028 秒)

    Actuator device, liquid-jet head and liquid-jet apparatus
    1.
    发明申请
    Actuator device, liquid-jet head and liquid-jet apparatus 有权
    执行器装置，喷液头和液体喷射装置

    公开(公告)号：US20080012911A1

    公开(公告)日：2008-01-17

    申请号：US11730644

    申请日：2007-04-03

    申请人： Motoki Takabe ,  Koji Sumi ,  Motohisa Noguchi ,  Naoto Yokoyama ,  Takeshi Saito

    发明人： Motoki Takabe ,  Koji Sumi ,  Motohisa Noguchi ,  Naoto Yokoyama ,  Takeshi Saito

    IPC分类号： B41J2/045

    CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

    摘要： Disclosed is an actuator device which includes a vibration plate and a piezoelectric element. The vibration plate includes an elastic film which is made of silicon oxide (SiO2) and which is formed on a substrate while the piezoelectric element is formed on the vibration plate and including a lower electrode, a piezoelectric layer and an upper electrode. The vibration plate has such a stress as to give a tensile stress between 300 MPa and 500 MPa, inclusive, to the piezoelectric element that is in a state of being displaced.

    摘要翻译： 公开了一种致动器装置，其包括振动板和压电元件。 振动板包括由氧化硅（SiO 2）构成的弹性膜，并且形成在基板上，同时压电元件形成在振动板上并且包括下电极，压电层 和上电极。 该振动板具有这样的应力，即对处于移动状态的压电元件产生在300MPa至500MPa之间的拉伸应力。

    Actuator device, liquid-jet head and liquid-jet apparatus
    3.
    发明授权
    Actuator device, liquid-jet head and liquid-jet apparatus 有权
    执行器装置，喷液头和液体喷射装置

    公开(公告)号：US07740345B2

    公开(公告)日：2010-06-22

    申请号：US11730644

    申请日：2007-04-03

    申请人： Motoki Takabe ,  Koji Sumi ,  Motohisa Noguchi ,  Naoto Yokoyama ,  Takeshi Saito

    发明人： Motoki Takabe ,  Koji Sumi ,  Motohisa Noguchi ,  Naoto Yokoyama ,  Takeshi Saito

    IPC分类号： B41J2/045

    CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

    摘要： Disclosed is an actuator device which includes a vibration plate and a piezoelectric element. The vibration plate includes an elastic film which is made of silicon oxide (SiO2) and which is formed on a substrate while the piezoelectric element is formed on the vibration plate and including a lower electrode, a piezoelectric layer and an upper electrode. The vibration plate has such a stress as to give a tensile stress between 300 MPa and 500 MPa, inclusive, to the piezoelectric element that is in a state of being displaced.

    摘要翻译： 公开了一种致动器装置，其包括振动板和压电元件。 振动板包括由氧化硅（SiO 2）制成的弹性膜，并且形成在基板上，同时压电元件形成在振动板上并且包括下电极，压电层和上电极。 该振动板具有这样的应力，即对处于移动状态的压电元件产生在300MPa至500MPa之间的拉伸应力。

    Piezoelectric device and liquid jet head
    5.
    发明申请
    Piezoelectric device and liquid jet head 有权
    压电元件和液体喷头

    公开(公告)号：US20080018716A1

    公开(公告)日：2008-01-24

    申请号：US11879628

    申请日：2007-07-18

    申请人： Motohisa Noguchi ,  Koji Sumi ,  Motoki Takabe ,  Naoto Yokoyama

    发明人： Motohisa Noguchi ,  Koji Sumi ,  Motoki Takabe ,  Naoto Yokoyama

    IPC分类号： B41J2/045 ,  H01L41/187

    CPC分类号： B41J2/14233 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/317 ,  H01L41/319

    摘要： A piezoelectric device including: a substrate; a lower electrode formed over the substrate; a piezoelectric layer formed over the lower electrode and including lead zirconate titanate; and an upper electrode formed over the piezoelectric layer, the lead zirconate titanate having a half-width of a peak of a (100) plane measured by an X-ray diffraction rocking curve method of 10 degrees or more and 25 degrees or less.

    摘要翻译： 一种压电装置，包括：基板; 形成在所述基板上的下电极; 形成在下电极上并包括锆钛酸铅的压电层; 和形成在压电层上的上电极，通过X射线衍射摇摆曲线法测量的具有（100）面的峰的半值宽度为10度以上且25度以下的钛酸铅钛酸铅。

    Piezoelectric device and liquid jet head
    6.
    发明授权
    Piezoelectric device and liquid jet head 有权
    压电元件和液体喷头

    公开(公告)号：US07717546B2

    公开(公告)日：2010-05-18

    申请号：US11879628

    申请日：2007-07-18

    申请人： Motohisa Noguchi ,  Koji Sumi ,  Motoki Takabe ,  Naoto Yokoyama

    发明人： Motohisa Noguchi ,  Koji Sumi ,  Motoki Takabe ,  Naoto Yokoyama

    IPC分类号： B41J2/045

    CPC分类号： B41J2/14233 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/317 ,  H01L41/319

    摘要： A piezoelectric device including: a substrate; a lower electrode formed over the substrate; a piezoelectric layer formed over the lower electrode and including lead zirconate titanate; and an upper electrode formed over the piezoelectric layer, the lead zirconate titanate having a half-width of a peak of a (100) plane measured by an X-ray diffraction rocking curve method of 10 degrees or more and 25 degrees or less.

    摘要翻译： 一种压电装置，包括：基板; 形成在所述基板上的下电极; 形成在下电极上并包括锆钛酸铅的压电层; 和形成在压电层上的上电极，通过X射线衍射摇摆曲线法测量的具有（100）面的峰的半值宽度为10度以上且25度以下的钛酸铅钛酸铅。

    Actuator device, liquid-jet head and liquid-jet apparatus
    7.
    发明申请
    Actuator device, liquid-jet head and liquid-jet apparatus 失效
    执行器装置，喷液头和液体喷射装置

    公开(公告)号：US20070007860A1

    公开(公告)日：2007-01-11

    申请号：US11482689

    申请日：2006-07-10

    申请人： Motoki Takabe ,  Koji Sumi ,  Naoto Yokoyama

    发明人： Motoki Takabe ,  Koji Sumi ,  Naoto Yokoyama

    IPC分类号： H01L41/187

    CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2202/03 ,  B41J2202/20 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/319

    摘要： An actuator device includes: a layer provided on a single crystal silicon (Si) substrate, and made of silicon dioxide (SiO2); at least one buffer layer provided on the layer made of silicon dioxide (SiO2); a base layer provided on the buffer layer, and made of lanthanum nickel oxide (LNO) having the (100) plane orientation; and a piezoelectric element. The piezoelectric element includes: a lower electrode provided on the base layer, and made of platinum (Pt) having the (100) plane orientation; a piezoelectric layer made of a ferroelectric layer whose plane orientation is the (100) orientation, the piezoelectric layer formed on the lower electrode by epitaxial growth where a crystal system of at least one kind selected from a group consisting of a tetragonal system, a monoclinic system and a rhombohedral system dominates the other crystal systems; and an upper electrode provided on the piezoelectric layer.

    摘要翻译： 致动器装置包括：设置在单晶硅（Si）衬底上的由二氧化硅（SiO 2）构成的层; 设置在由二氧化硅（SiO 2）构成的层上的至少一个缓冲层; 设置在缓冲层上的由具有（100）面取向的氧化镧（LNO）制成的基层; 和压电元件。 压电元件包括​​：设置在基底层上并由具有（100）面取向的铂（Pt）制成的下电极; 由平面取向为（100）取向的铁电体层构成的压电层，通过外延生长在下部电极上形成的压电体，其中选自四方晶系，单斜晶系 系统和菱方系统主导其他晶体系统; 以及设置在压电层上的上电极。

    Actuator device, liquid-jet head and liquid-jet apparatus
    8.
    发明授权
    Actuator device, liquid-jet head and liquid-jet apparatus 失效
    执行器装置，喷液头和液体喷射装置

    公开(公告)号：US07589450B2

    公开(公告)日：2009-09-15

    申请号：US11482689

    申请日：2006-07-10

    申请人： Motoki Takabe ,  Koji Sumi ,  Naoto Yokoyama

    发明人： Motoki Takabe ,  Koji Sumi ,  Naoto Yokoyama

    IPC分类号： H01L41/00 ,  H02N2/00

    CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2202/03 ,  B41J2202/20 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/319

    摘要： An actuator device includes: a layer provided on a single crystal silicon (Si) substrate, and made of silicon dioxide (SiO2); at least one buffer layer provided on the layer made of silicon dioxide (SiO2); a base layer provided on the buffer layer, and made of lanthanum nickel oxide (LNO) having the (100m) plane orientation; and a piezoelectric element. The piezoelectric element includes: a lower electrode provided on the base layer, and made of platinum (Pt) having the (100) plane orientation; a piezoelectric layer made of a ferroelectric layer whose plane orientation is the (100) orientation, the piezoelectric layer formed on the lower electrode by epitaxial growth where a crystal system of at least one kind selected from a group consisting of a tetragonal system, a monoclinic system and a rhombohedral system dominates the other crystal systems; and an upper electrode provided on the piezoelectric layer.

    摘要翻译： 致动器装置包括：设置在单晶硅（Si）衬底上的由二氧化硅（SiO 2）制成的层; 提供在由二氧化硅（SiO 2）制成的层上的至少一个缓冲层; 设置在缓冲层上的由具有（100μm）面取向的氧化镧（LNO）构成的基层; 和压电元件。 压电元件包括​​：设置在基底层上并由具有（100）面取向的铂（Pt）制成的下电极; 由平面取向为（100）取向的铁电体层构成的压电层，通过外延生长在下部电极上形成的压电体，其中选自四方晶系，单斜晶系 系统和菱方系统主导其他晶体系统; 以及设置在压电层上的上电极。

    Piezoelectric actuator and liquid ejecting head
    10.
    发明授权
    Piezoelectric actuator and liquid ejecting head 有权
    压电致动器和液体喷头

    公开(公告)号：US08444256B2

    公开(公告)日：2013-05-21

    申请号：US12840393

    申请日：2010-07-21

    申请人： Naoto Yokoyama

    发明人： Naoto Yokoyama

    IPC分类号： B41J2/045

    CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491 ,  H01L41/047 ,  H01L41/0973

    摘要： There is provided a piezoelectric actuator including: a substrate that is supported by a support portion; a piezoelectric element that includes a lower electrode formed on the substrate, a piezoelectric layer formed on the lower substrate, and an upper electrode formed on the piezoelectric layer; and a driving circuit that applies a voltage to the piezoelectric element. The upper electrode has a first upper electrode that is positioned on an outer peripheral side of the piezoelectric layer and at least one second upper electrode that is positioned on a center side of the piezoelectric layer, and a voltage applied to the first upper electrode is lower than a voltage applied to the second upper electrode.

    摘要翻译： 提供了一种压电致动器，包括：由支撑部支撑的基板; 压电元件，其包括形成在所述基板上的下电极，形成在所述下基板上的压电层和形成在所述压电层上的上电极; 以及向压电元件施加电压的驱动电路。 上部电极具有位于压电层的外周侧的第一上部电极和位于压电体层的中心侧的至少一个第二上部电极，施加到第一上部电极的电压较低 而不是施加到第二上电极的电压。