Positive-type photosensitive composition
    1.
    发明授权
    Positive-type photosensitive composition 有权
    正型光敏组合物

    公开(公告)号:US08426107B2

    公开(公告)日:2013-04-23

    申请号:US12991690

    申请日:2009-05-13

    IPC分类号: G03F7/00 G03F7/004 B32B3/10

    摘要: Disclosed is a positive-type photosensitive composition which can form a metal compound film pattern at high resolution and with less affection by organic residues. The positive-type photosensitive composition comprises: a metal complex component (A) which can form a metal compound film when applied and subsequently fired; and a photosensitizing agent (B). In the composition, a ligand in the component (A) is preferably a multidentate ligand having an aromatic compound as its skeleton. According to this construction, even a composition containing substantially no photosensitive resin can impart photosensitivity and a metal compound film pattern can be formed readily.

    摘要翻译: 公开了能够以高分辨率形成金属化合物膜图案并且较少受有机残基影响的正型感光性组合物。 正型感光性组合物包括:金属络合物成分(A),其可以在涂布后随后烧制时形成金属化合物膜; 和光敏剂(B)。 在组合物中,组分(A)中的配体优选为具有芳族化合物作为其骨架的多齿配体。 根据该结构,即使是基本上不含感光性树脂的组合物也能赋予光敏性,容易形成金属化合物膜图案。

    POSITIVE-TYPE PHOTOSENSITIVE COMPOSITION
    2.
    发明申请
    POSITIVE-TYPE PHOTOSENSITIVE COMPOSITION 有权
    阳性型光敏组合物

    公开(公告)号:US20110064913A1

    公开(公告)日:2011-03-17

    申请号:US12991690

    申请日:2009-05-13

    IPC分类号: B32B3/10 G03F7/004

    摘要: Disclosed is a positive-type photosensitive composition which can form a metal compound film pattern at high resolution and with less affection by organic residues. The positive-type photosensitive composition comprises: a metal complex component (A) which can form a metal compound film when applied and subsequently fired; and a photosensitizing agent (B). In the composition, a ligand in the component (A) is preferably a multidentate ligand having an aromatic compound as its skeleton. According to this construction, even a composition containing substantially no photosensitive resin can impart photosensitivity and a metal compound film pattern can be formed readily.

    摘要翻译: 公开了能够以高分辨率形成金属化合物膜图案并且较少受有机残基影响的正型感光性组合物。 正型感光性组合物包括:金属络合物成分(A),其可以在涂布后随后烧制时形成金属化合物膜; 和光敏剂(B)。 在组合物中,组分(A)中的配体优选为具有芳族化合物作为其骨架的多齿配体。 根据该结构,即使是基本上不含感光性树脂的组合物也能赋予光敏性,容易形成金属化合物膜图案。